9/28/2010	9:59:13 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/28/2010	9:59:13 AM	Recipe started at 9:59 AM
9/28/2010	9:59:13 AM	H2 valve closed
9/28/2010	9:59:13 AM	BCl3 valve closed
9/28/2010	9:59:13 AM	PH3 valve closed
9/28/2010	9:59:13 AM	SiCl4 pre valve closed
9/28/2010	9:59:13 AM	SiCl4 post valve closed
9/28/2010	9:59:13 AM	Main Vac valve closed
9/28/2010	9:59:13 AM	Bypass valve closed
9/28/2010	9:59:13 AM	Bubbler valve closed
9/28/2010	9:59:13 AM	Helium valve opened
9/28/2010	9:59:13 AM	Helium MFC set to  500.000000
9/28/2010	9:59:13 AM	H2 MFC set to  0.000000
9/28/2010	9:59:13 AM	BCl3 MFC set to  0.000000
9/28/2010	9:59:13 AM	PHl3 MFC set to  0.000000
9/28/2010	9:59:13 AM	SiCl4 MFC set to  0.000000
9/28/2010	9:59:13 AM	Bypass solenoid MFC set to  0.000000
9/28/2010	9:59:13 AM	Tube furnace set to 0
9/28/2010	10:00:33 AM	Helium valve closed
9/28/2010	10:00:33 AM	H2 valve closed
9/28/2010	10:00:33 AM	BCl3 valve closed
9/28/2010	10:00:33 AM	PH3 valve closed
9/28/2010	10:00:33 AM	SiCl4 pre valve closed
9/28/2010	10:00:33 AM	SiCl4 post valve closed
9/28/2010	10:00:33 AM	Main Vac valve closed
9/28/2010	10:00:33 AM	Bypass valve closed
9/28/2010	10:00:33 AM	Bubbler valve closed
9/28/2010	10:00:33 AM	Helium MFC set to  0.000000
9/28/2010	10:00:33 AM	H2 MFC set to  0.000000
9/28/2010	10:00:33 AM	BCl3 MFC set to  0.000000
9/28/2010	10:00:33 AM	PHl3 MFC set to  0.000000
9/28/2010	10:00:33 AM	SiCl4 MFC set to  0.000000
9/28/2010	10:00:33 AM	Bypass solenoid MFC set to  0.000000
9/28/2010	10:00:33 AM	Tube furnace set to 0
9/28/2010	10:00:34 AM	Run finished at 10:00 AM
9/28/2010	10:00:34 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/28/2010	10:14:41 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/28/2010	10:14:42 AM	Recipe started at 10:14 AM
9/28/2010	10:14:42 AM	Helium valve closed
9/28/2010	10:14:42 AM	H2 valve closed
9/28/2010	10:14:42 AM	BCl3 valve closed
9/28/2010	10:14:42 AM	PH3 valve closed
9/28/2010	10:14:42 AM	SiCl4 pre valve closed
9/28/2010	10:14:42 AM	SiCl4 post valve closed
9/28/2010	10:14:42 AM	Main Vac valve closed
9/28/2010	10:14:42 AM	Bubbler valve closed
9/28/2010	10:14:42 AM	Bypass valve opened
9/28/2010	10:14:42 AM	Helium MFC set to  0.000000
9/28/2010	10:14:42 AM	H2 MFC set to  0.000000
9/28/2010	10:14:42 AM	BCl3 MFC set to  0.000000
9/28/2010	10:14:42 AM	PHl3 MFC set to  0.000000
9/28/2010	10:14:42 AM	SiCl4 MFC set to  0.000000
9/28/2010	10:14:42 AM	Bypass solenoid MFC set to  0.000000
9/28/2010	10:14:42 AM	Tube furnace set to 0
9/28/2010	10:15:23 AM	Helium valve closed
9/28/2010	10:15:23 AM	H2 valve closed
9/28/2010	10:15:23 AM	BCl3 valve closed
9/28/2010	10:15:23 AM	PH3 valve closed
9/28/2010	10:15:23 AM	SiCl4 pre valve closed
9/28/2010	10:15:23 AM	SiCl4 post valve closed
9/28/2010	10:15:23 AM	Bubbler valve closed
9/28/2010	10:15:23 AM	Main Vac valve opened
9/28/2010	10:15:23 AM	Bypass valve opened
9/28/2010	10:15:23 AM	Helium MFC set to  0.000000
9/28/2010	10:15:23 AM	H2 MFC set to  0.000000
9/28/2010	10:15:23 AM	BCl3 MFC set to  0.000000
9/28/2010	10:15:23 AM	PHl3 MFC set to  0.000000
9/28/2010	10:15:23 AM	SiCl4 MFC set to  0.000000
9/28/2010	10:15:23 AM	Bypass solenoid MFC set to  0.000000
9/28/2010	10:15:23 AM	Tube furnace set to 0
9/28/2010	10:15:23 AM	Run finished at 10:15 AM
9/28/2010	10:15:23 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/28/2010	10:18:38 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/28/2010	10:18:50 AM	Recipe started at 10:18 AM
9/28/2010	10:18:50 AM	Helium valve closed
9/28/2010	10:18:50 AM	H2 valve closed
9/28/2010	10:18:50 AM	BCl3 valve closed
9/28/2010	10:18:50 AM	PH3 valve closed
9/28/2010	10:18:50 AM	SiCl4 pre valve closed
9/28/2010	10:18:50 AM	SiCl4 post valve closed
9/28/2010	10:18:50 AM	Main Vac valve closed
9/28/2010	10:18:50 AM	Bubbler valve closed
9/28/2010	10:18:50 AM	Bypass valve opened
9/28/2010	10:18:50 AM	Helium MFC set to  0.000000
9/28/2010	10:18:50 AM	H2 MFC set to  0.000000
9/28/2010	10:18:50 AM	BCl3 MFC set to  0.000000
9/28/2010	10:18:50 AM	PHl3 MFC set to  0.000000
9/28/2010	10:18:50 AM	SiCl4 MFC set to  0.000000
9/28/2010	10:18:50 AM	Bypass solenoid MFC set to  0.000000
9/28/2010	10:18:51 AM	Tube furnace set to 0
9/28/2010	10:18:51 AM	Helium valve closed
9/28/2010	10:18:51 AM	H2 valve closed
9/28/2010	10:18:51 AM	BCl3 valve closed
9/28/2010	10:18:51 AM	PH3 valve closed
9/28/2010	10:18:51 AM	SiCl4 pre valve closed
9/28/2010	10:18:51 AM	SiCl4 post valve closed
9/28/2010	10:18:51 AM	Bubbler valve closed
9/28/2010	10:18:51 AM	Main Vac valve opened
9/28/2010	10:18:51 AM	Bypass valve opened
9/28/2010	10:18:51 AM	Helium MFC set to  0.000000
9/28/2010	10:18:51 AM	H2 MFC set to  0.000000
9/28/2010	10:18:51 AM	BCl3 MFC set to  0.000000
9/28/2010	10:18:51 AM	PHl3 MFC set to  0.000000
9/28/2010	10:18:51 AM	SiCl4 MFC set to  0.000000
9/28/2010	10:18:51 AM	Bypass solenoid MFC set to  0.000000
9/28/2010	10:18:51 AM	Tube furnace set to 0
9/28/2010	10:19:51 AM	H2 valve closed
9/28/2010	10:19:51 AM	BCl3 valve closed
9/28/2010	10:19:51 AM	PH3 valve closed
9/28/2010	10:19:51 AM	SiCl4 pre valve closed
9/28/2010	10:19:51 AM	SiCl4 post valve closed
9/28/2010	10:19:51 AM	Bubbler valve closed
9/28/2010	10:19:51 AM	Helium valve opened
9/28/2010	10:19:51 AM	Main Vac valve opened
9/28/2010	10:19:51 AM	Bypass valve opened
9/28/2010	10:19:51 AM	Helium MFC set to  100.000000
9/28/2010	10:19:51 AM	H2 MFC set to  0.000000
9/28/2010	10:19:51 AM	BCl3 MFC set to  0.000000
9/28/2010	10:19:51 AM	PHl3 MFC set to  0.000000
9/28/2010	10:19:51 AM	SiCl4 MFC set to  0.000000
9/28/2010	10:19:51 AM	Bypass solenoid MFC set to  0.000000
9/28/2010	10:19:51 AM	Tube furnace set to 0
9/28/2010	10:20:51 AM	Helium valve closed
9/28/2010	10:20:51 AM	H2 valve closed
9/28/2010	10:20:51 AM	BCl3 valve closed
9/28/2010	10:20:51 AM	PH3 valve closed
9/28/2010	10:20:51 AM	SiCl4 pre valve closed
9/28/2010	10:20:51 AM	SiCl4 post valve closed
9/28/2010	10:20:51 AM	Bubbler valve closed
9/28/2010	10:20:51 AM	Main Vac valve opened
9/28/2010	10:20:51 AM	Bypass valve opened
9/28/2010	10:20:51 AM	Helium MFC set to  0.000000
9/28/2010	10:20:51 AM	H2 MFC set to  0.000000
9/28/2010	10:20:51 AM	BCl3 MFC set to  0.000000
9/28/2010	10:20:51 AM	PHl3 MFC set to  0.000000
9/28/2010	10:20:51 AM	SiCl4 MFC set to  0.000000
9/28/2010	10:20:51 AM	Bypass solenoid MFC set to  0.000000
9/28/2010	10:20:51 AM	Tube furnace set to 0
9/28/2010	10:21:51 AM	H2 valve closed
9/28/2010	10:21:51 AM	BCl3 valve closed
9/28/2010	10:21:51 AM	PH3 valve closed
9/28/2010	10:21:51 AM	SiCl4 pre valve closed
9/28/2010	10:21:51 AM	SiCl4 post valve closed
9/28/2010	10:21:52 AM	Bubbler valve closed
9/28/2010	10:21:52 AM	Helium valve opened
9/28/2010	10:21:52 AM	Main Vac valve opened
9/28/2010	10:21:52 AM	Bypass valve opened
9/28/2010	10:21:52 AM	Helium MFC set to  100.000000
9/28/2010	10:21:52 AM	H2 MFC set to  0.000000
9/28/2010	10:21:52 AM	BCl3 MFC set to  0.000000
9/28/2010	10:21:52 AM	PHl3 MFC set to  0.000000
9/28/2010	10:21:52 AM	SiCl4 MFC set to  0.000000
9/28/2010	10:21:52 AM	Bypass solenoid MFC set to  0.000000
9/28/2010	10:21:52 AM	Tube furnace set to 0
9/28/2010	10:22:52 AM	Helium valve closed
9/28/2010	10:22:52 AM	H2 valve closed
9/28/2010	10:22:52 AM	BCl3 valve closed
9/28/2010	10:22:52 AM	PH3 valve closed
9/28/2010	10:22:52 AM	SiCl4 pre valve closed
9/28/2010	10:22:52 AM	SiCl4 post valve closed
9/28/2010	10:22:52 AM	Bubbler valve closed
9/28/2010	10:22:52 AM	Main Vac valve opened
9/28/2010	10:22:52 AM	Bypass valve opened
9/28/2010	10:22:52 AM	Helium MFC set to  0.000000
9/28/2010	10:22:52 AM	H2 MFC set to  0.000000
9/28/2010	10:22:52 AM	BCl3 MFC set to  0.000000
9/28/2010	10:22:52 AM	PHl3 MFC set to  0.000000
9/28/2010	10:22:52 AM	SiCl4 MFC set to  0.000000
9/28/2010	10:22:52 AM	Bypass solenoid MFC set to  0.000000
9/28/2010	10:22:52 AM	Tube furnace set to 0
9/28/2010	10:23:52 AM	H2 valve closed
9/28/2010	10:23:52 AM	BCl3 valve closed
9/28/2010	10:23:52 AM	PH3 valve closed
9/28/2010	10:23:52 AM	SiCl4 pre valve closed
9/28/2010	10:23:52 AM	SiCl4 post valve closed
9/28/2010	10:23:52 AM	Bubbler valve closed
9/28/2010	10:23:52 AM	Helium valve opened
9/28/2010	10:23:52 AM	Main Vac valve opened
9/28/2010	10:23:52 AM	Bypass valve opened
9/28/2010	10:23:52 AM	Helium MFC set to  100.000000
9/28/2010	10:23:52 AM	H2 MFC set to  0.000000
9/28/2010	10:23:52 AM	BCl3 MFC set to  0.000000
9/28/2010	10:23:52 AM	PHl3 MFC set to  0.000000
9/28/2010	10:23:52 AM	SiCl4 MFC set to  0.000000
9/28/2010	10:23:52 AM	Bypass solenoid MFC set to  0.000000
9/28/2010	10:23:52 AM	Tube furnace set to 0
9/28/2010	10:24:52 AM	Helium valve closed
9/28/2010	10:24:52 AM	H2 valve closed
9/28/2010	10:24:52 AM	BCl3 valve closed
9/28/2010	10:24:52 AM	PH3 valve closed
9/28/2010	10:24:52 AM	SiCl4 pre valve closed
9/28/2010	10:24:52 AM	SiCl4 post valve closed
9/28/2010	10:24:52 AM	Bubbler valve closed
9/28/2010	10:24:52 AM	Main Vac valve opened
9/28/2010	10:24:52 AM	Bypass valve opened
9/28/2010	10:24:52 AM	Helium MFC set to  0.000000
9/28/2010	10:24:52 AM	H2 MFC set to  0.000000
9/28/2010	10:24:52 AM	BCl3 MFC set to  0.000000
9/28/2010	10:24:52 AM	PHl3 MFC set to  0.000000
9/28/2010	10:24:52 AM	SiCl4 MFC set to  0.000000
9/28/2010	10:24:52 AM	Bypass solenoid MFC set to  0.000000
9/28/2010	10:24:52 AM	Tube furnace set to 0
9/28/2010	10:25:52 AM	H2 valve closed
9/28/2010	10:25:52 AM	BCl3 valve closed
9/28/2010	10:25:52 AM	PH3 valve closed
9/28/2010	10:25:52 AM	SiCl4 pre valve closed
9/28/2010	10:25:52 AM	SiCl4 post valve closed
9/28/2010	10:25:52 AM	Bubbler valve closed
9/28/2010	10:25:52 AM	Helium valve opened
9/28/2010	10:25:52 AM	Main Vac valve opened
9/28/2010	10:25:52 AM	Bypass valve opened
9/28/2010	10:25:52 AM	Helium MFC set to  100.000000
9/28/2010	10:25:52 AM	H2 MFC set to  0.000000
9/28/2010	10:25:52 AM	BCl3 MFC set to  0.000000
9/28/2010	10:25:52 AM	PHl3 MFC set to  0.000000
9/28/2010	10:25:52 AM	SiCl4 MFC set to  0.000000
9/28/2010	10:25:52 AM	Bypass solenoid MFC set to  0.000000
9/28/2010	10:25:52 AM	Tube furnace set to 0
9/28/2010	10:26:52 AM	Helium valve closed
9/28/2010	10:26:52 AM	H2 valve closed
9/28/2010	10:26:52 AM	BCl3 valve closed
9/28/2010	10:26:52 AM	PH3 valve closed
9/28/2010	10:26:52 AM	SiCl4 pre valve closed
9/28/2010	10:26:52 AM	SiCl4 post valve closed
9/28/2010	10:26:52 AM	Bubbler valve closed
9/28/2010	10:26:52 AM	Main Vac valve opened
9/28/2010	10:26:52 AM	Bypass valve opened
9/28/2010	10:26:52 AM	Helium MFC set to  0.000000
9/28/2010	10:26:52 AM	H2 MFC set to  0.000000
9/28/2010	10:26:52 AM	BCl3 MFC set to  0.000000
9/28/2010	10:26:52 AM	PHl3 MFC set to  0.000000
9/28/2010	10:26:52 AM	SiCl4 MFC set to  0.000000
9/28/2010	10:26:53 AM	Bypass solenoid MFC set to  0.000000
9/28/2010	10:26:53 AM	Tube furnace set to 0
9/28/2010	10:27:53 AM	H2 valve closed
9/28/2010	10:27:53 AM	BCl3 valve closed
9/28/2010	10:27:53 AM	PH3 valve closed
9/28/2010	10:27:53 AM	SiCl4 pre valve closed
9/28/2010	10:27:53 AM	SiCl4 post valve closed
9/28/2010	10:27:53 AM	Bubbler valve closed
9/28/2010	10:27:53 AM	Helium valve opened
9/28/2010	10:27:53 AM	Main Vac valve opened
9/28/2010	10:27:53 AM	Bypass valve opened
9/28/2010	10:27:53 AM	Helium MFC set to  100.000000
9/28/2010	10:27:53 AM	H2 MFC set to  0.000000
9/28/2010	10:27:53 AM	BCl3 MFC set to  0.000000
9/28/2010	10:27:53 AM	PHl3 MFC set to  0.000000
9/28/2010	10:27:53 AM	SiCl4 MFC set to  0.000000
9/28/2010	10:27:53 AM	Bypass solenoid MFC set to  0.000000
9/28/2010	10:27:53 AM	Tube furnace set to 0
9/28/2010	10:28:53 AM	Helium valve closed
9/28/2010	10:28:53 AM	H2 valve closed
9/28/2010	10:28:53 AM	BCl3 valve closed
9/28/2010	10:28:53 AM	PH3 valve closed
9/28/2010	10:28:53 AM	SiCl4 pre valve closed
9/28/2010	10:28:53 AM	SiCl4 post valve closed
9/28/2010	10:28:53 AM	Bubbler valve closed
9/28/2010	10:28:53 AM	Main Vac valve opened
9/28/2010	10:28:53 AM	Bypass valve opened
9/28/2010	10:28:53 AM	Helium MFC set to  0.000000
9/28/2010	10:28:53 AM	H2 MFC set to  0.000000
9/28/2010	10:28:53 AM	BCl3 MFC set to  0.000000
9/28/2010	10:28:53 AM	PHl3 MFC set to  0.000000
9/28/2010	10:28:53 AM	SiCl4 MFC set to  0.000000
9/28/2010	10:28:53 AM	Bypass solenoid MFC set to  0.000000
9/28/2010	10:28:53 AM	Tube furnace set to 0
9/28/2010	10:29:53 AM	H2 valve closed
9/28/2010	10:29:53 AM	BCl3 valve closed
9/28/2010	10:29:53 AM	PH3 valve closed
9/28/2010	10:29:53 AM	SiCl4 pre valve closed
9/28/2010	10:29:53 AM	SiCl4 post valve closed
9/28/2010	10:29:53 AM	Bubbler valve closed
9/28/2010	10:29:53 AM	Helium valve opened
9/28/2010	10:29:53 AM	Main Vac valve opened
9/28/2010	10:29:53 AM	Bypass valve opened
9/28/2010	10:29:53 AM	Helium MFC set to  100.000000
9/28/2010	10:29:53 AM	H2 MFC set to  0.000000
9/28/2010	10:29:53 AM	BCl3 MFC set to  0.000000
9/28/2010	10:29:53 AM	PHl3 MFC set to  0.000000
9/28/2010	10:29:53 AM	SiCl4 MFC set to  0.000000
9/28/2010	10:29:53 AM	Bypass solenoid MFC set to  0.000000
9/28/2010	10:29:53 AM	Tube furnace set to 0
9/28/2010	10:30:53 AM	Helium valve closed
9/28/2010	10:30:53 AM	H2 valve closed
9/28/2010	10:30:53 AM	BCl3 valve closed
9/28/2010	10:30:53 AM	PH3 valve closed
9/28/2010	10:30:53 AM	SiCl4 pre valve closed
9/28/2010	10:30:53 AM	SiCl4 post valve closed
9/28/2010	10:30:53 AM	Bubbler valve closed
9/28/2010	10:30:53 AM	Main Vac valve opened
9/28/2010	10:30:53 AM	Bypass valve opened
9/28/2010	10:30:53 AM	Helium MFC set to  0.000000
9/28/2010	10:30:53 AM	H2 MFC set to  0.000000
9/28/2010	10:30:53 AM	BCl3 MFC set to  0.000000
9/28/2010	10:30:53 AM	PHl3 MFC set to  0.000000
9/28/2010	10:30:53 AM	SiCl4 MFC set to  0.000000
9/28/2010	10:30:53 AM	Bypass solenoid MFC set to  0.000000
9/28/2010	10:30:53 AM	Tube furnace set to 0
9/28/2010	10:31:53 AM	H2 valve closed
9/28/2010	10:31:53 AM	BCl3 valve closed
9/28/2010	10:31:53 AM	PH3 valve closed
9/28/2010	10:31:53 AM	SiCl4 pre valve closed
9/28/2010	10:31:53 AM	SiCl4 post valve closed
9/28/2010	10:31:53 AM	Bubbler valve closed
9/28/2010	10:31:53 AM	Helium valve opened
9/28/2010	10:31:53 AM	Main Vac valve opened
9/28/2010	10:31:53 AM	Bypass valve opened
9/28/2010	10:31:53 AM	Helium MFC set to  100.000000
9/28/2010	10:31:53 AM	H2 MFC set to  0.000000
9/28/2010	10:31:53 AM	BCl3 MFC set to  0.000000
9/28/2010	10:31:53 AM	PHl3 MFC set to  0.000000
9/28/2010	10:31:53 AM	SiCl4 MFC set to  0.000000
9/28/2010	10:31:53 AM	Bypass solenoid MFC set to  0.000000
9/28/2010	10:31:54 AM	Tube furnace set to 0
9/28/2010	10:32:54 AM	Helium valve closed
9/28/2010	10:32:54 AM	H2 valve closed
9/28/2010	10:32:54 AM	BCl3 valve closed
9/28/2010	10:32:54 AM	PH3 valve closed
9/28/2010	10:32:54 AM	SiCl4 pre valve closed
9/28/2010	10:32:54 AM	SiCl4 post valve closed
9/28/2010	10:32:54 AM	Bubbler valve closed
9/28/2010	10:32:54 AM	Main Vac valve opened
9/28/2010	10:32:54 AM	Bypass valve opened
9/28/2010	10:32:54 AM	Helium MFC set to  0.000000
9/28/2010	10:32:54 AM	H2 MFC set to  0.000000
9/28/2010	10:32:54 AM	BCl3 MFC set to  0.000000
9/28/2010	10:32:54 AM	PHl3 MFC set to  0.000000
9/28/2010	10:32:54 AM	SiCl4 MFC set to  0.000000
9/28/2010	10:32:54 AM	Bypass solenoid MFC set to  0.000000
9/28/2010	10:32:54 AM	Tube furnace set to 0
9/28/2010	10:33:54 AM	H2 valve closed
9/28/2010	10:33:54 AM	BCl3 valve closed
9/28/2010	10:33:54 AM	PH3 valve closed
9/28/2010	10:33:54 AM	SiCl4 pre valve closed
9/28/2010	10:33:54 AM	SiCl4 post valve closed
9/28/2010	10:33:54 AM	Bubbler valve closed
9/28/2010	10:33:54 AM	Helium valve opened
9/28/2010	10:33:54 AM	Main Vac valve opened
9/28/2010	10:33:54 AM	Bypass valve opened
9/28/2010	10:33:54 AM	Helium MFC set to  100.000000
9/28/2010	10:33:54 AM	H2 MFC set to  0.000000
9/28/2010	10:33:54 AM	BCl3 MFC set to  0.000000
9/28/2010	10:33:54 AM	PHl3 MFC set to  0.000000
9/28/2010	10:33:54 AM	SiCl4 MFC set to  0.000000
9/28/2010	10:33:54 AM	Bypass solenoid MFC set to  0.000000
9/28/2010	10:33:54 AM	Tube furnace set to 0
9/28/2010	10:34:54 AM	Helium valve closed
9/28/2010	10:34:54 AM	H2 valve closed
9/28/2010	10:34:54 AM	BCl3 valve closed
9/28/2010	10:34:54 AM	PH3 valve closed
9/28/2010	10:34:54 AM	SiCl4 pre valve closed
9/28/2010	10:34:54 AM	SiCl4 post valve closed
9/28/2010	10:34:54 AM	Bubbler valve closed
9/28/2010	10:34:54 AM	Main Vac valve opened
9/28/2010	10:34:54 AM	Bypass valve opened
9/28/2010	10:34:54 AM	Helium MFC set to  0.000000
9/28/2010	10:34:54 AM	H2 MFC set to  0.000000
9/28/2010	10:34:54 AM	BCl3 MFC set to  0.000000
9/28/2010	10:34:54 AM	PHl3 MFC set to  0.000000
9/28/2010	10:34:54 AM	SiCl4 MFC set to  0.000000
9/28/2010	10:34:54 AM	Bypass solenoid MFC set to  0.000000
9/28/2010	10:34:54 AM	Tube furnace set to 0
9/28/2010	10:35:54 AM	H2 valve closed
9/28/2010	10:35:54 AM	BCl3 valve closed
9/28/2010	10:35:54 AM	PH3 valve closed
9/28/2010	10:35:54 AM	SiCl4 pre valve closed
9/28/2010	10:35:54 AM	SiCl4 post valve closed
9/28/2010	10:35:54 AM	Bubbler valve closed
9/28/2010	10:35:54 AM	Helium valve opened
9/28/2010	10:35:54 AM	Main Vac valve opened
9/28/2010	10:35:54 AM	Bypass valve opened
9/28/2010	10:35:54 AM	Helium MFC set to  100.000000
9/28/2010	10:35:54 AM	H2 MFC set to  0.000000
9/28/2010	10:35:54 AM	BCl3 MFC set to  0.000000
9/28/2010	10:35:54 AM	PHl3 MFC set to  0.000000
9/28/2010	10:35:54 AM	SiCl4 MFC set to  0.000000
9/28/2010	10:35:54 AM	Bypass solenoid MFC set to  0.000000
9/28/2010	10:35:54 AM	Tube furnace set to 0
9/28/2010	10:36:54 AM	Helium valve closed
9/28/2010	10:36:54 AM	H2 valve closed
9/28/2010	10:36:54 AM	BCl3 valve closed
9/28/2010	10:36:54 AM	PH3 valve closed
9/28/2010	10:36:54 AM	SiCl4 pre valve closed
9/28/2010	10:36:54 AM	SiCl4 post valve closed
9/28/2010	10:36:54 AM	Bubbler valve closed
9/28/2010	10:36:54 AM	Main Vac valve opened
9/28/2010	10:36:54 AM	Bypass valve opened
9/28/2010	10:36:54 AM	Helium MFC set to  0.000000
9/28/2010	10:36:54 AM	H2 MFC set to  0.000000
9/28/2010	10:36:54 AM	BCl3 MFC set to  0.000000
9/28/2010	10:36:54 AM	PHl3 MFC set to  0.000000
9/28/2010	10:36:54 AM	SiCl4 MFC set to  0.000000
9/28/2010	10:36:54 AM	Bypass solenoid MFC set to  0.000000
9/28/2010	10:36:55 AM	Tube furnace set to 0
9/28/2010	10:37:55 AM	H2 valve closed
9/28/2010	10:37:55 AM	BCl3 valve closed
9/28/2010	10:37:55 AM	PH3 valve closed
9/28/2010	10:37:55 AM	SiCl4 pre valve closed
9/28/2010	10:37:55 AM	SiCl4 post valve closed
9/28/2010	10:37:55 AM	Bubbler valve closed
9/28/2010	10:37:55 AM	Helium valve opened
9/28/2010	10:37:55 AM	Main Vac valve opened
9/28/2010	10:37:55 AM	Bypass valve opened
9/28/2010	10:37:55 AM	Helium MFC set to  100.000000
9/28/2010	10:37:55 AM	H2 MFC set to  0.000000
9/28/2010	10:37:55 AM	BCl3 MFC set to  0.000000
9/28/2010	10:37:55 AM	PHl3 MFC set to  0.000000
9/28/2010	10:37:55 AM	SiCl4 MFC set to  0.000000
9/28/2010	10:37:55 AM	Bypass solenoid MFC set to  0.000000
9/28/2010	10:37:55 AM	Tube furnace set to 0
9/28/2010	10:38:55 AM	Helium valve closed
9/28/2010	10:38:55 AM	H2 valve closed
9/28/2010	10:38:55 AM	BCl3 valve closed
9/28/2010	10:38:55 AM	PH3 valve closed
9/28/2010	10:38:55 AM	SiCl4 pre valve closed
9/28/2010	10:38:55 AM	SiCl4 post valve closed
9/28/2010	10:38:55 AM	Bubbler valve closed
9/28/2010	10:38:55 AM	Main Vac valve opened
9/28/2010	10:38:55 AM	Bypass valve opened
9/28/2010	10:38:55 AM	Helium MFC set to  0.000000
9/28/2010	10:38:55 AM	H2 MFC set to  0.000000
9/28/2010	10:38:55 AM	BCl3 MFC set to  0.000000
9/28/2010	10:38:55 AM	PHl3 MFC set to  0.000000
9/28/2010	10:38:55 AM	SiCl4 MFC set to  0.000000
9/28/2010	10:38:55 AM	Bypass solenoid MFC set to  0.000000
9/28/2010	10:38:55 AM	Tube furnace set to 0
9/28/2010	10:38:56 AM	Run finished at 10:38 AM
9/28/2010	10:38:56 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/28/2010	10:49:38 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/28/2010	10:49:50 AM	Recipe started at 10:49 AM
9/28/2010	10:49:50 AM	Helium valve closed
9/28/2010	10:49:50 AM	H2 valve closed
9/28/2010	10:49:50 AM	BCl3 valve closed
9/28/2010	10:49:50 AM	PH3 valve closed
9/28/2010	10:49:50 AM	SiCl4 pre valve closed
9/28/2010	10:49:50 AM	SiCl4 post valve closed
9/28/2010	10:49:50 AM	Main Vac valve closed
9/28/2010	10:49:50 AM	Bubbler valve closed
9/28/2010	10:49:50 AM	Bypass valve opened
9/28/2010	10:49:50 AM	Helium MFC set to  0.000000
9/28/2010	10:49:50 AM	H2 MFC set to  0.000000
9/28/2010	10:49:50 AM	BCl3 MFC set to  0.000000
9/28/2010	10:49:50 AM	PHl3 MFC set to  0.000000
9/28/2010	10:49:50 AM	SiCl4 MFC set to  0.000000
9/28/2010	10:49:50 AM	Bypass solenoid MFC set to  0.000000
9/28/2010	10:49:50 AM	Tube furnace set to 0
9/28/2010	10:49:51 AM	Helium valve closed
9/28/2010	10:49:51 AM	H2 valve closed
9/28/2010	10:49:51 AM	BCl3 valve closed
9/28/2010	10:49:51 AM	PH3 valve closed
9/28/2010	10:49:51 AM	SiCl4 pre valve closed
9/28/2010	10:49:51 AM	SiCl4 post valve closed
9/28/2010	10:49:51 AM	Bubbler valve closed
9/28/2010	10:49:51 AM	Main Vac valve opened
9/28/2010	10:49:51 AM	Bypass valve opened
9/28/2010	10:49:51 AM	Helium MFC set to  0.000000
9/28/2010	10:49:51 AM	H2 MFC set to  0.000000
9/28/2010	10:49:51 AM	BCl3 MFC set to  0.000000
9/28/2010	10:49:51 AM	PHl3 MFC set to  0.000000
9/28/2010	10:49:51 AM	SiCl4 MFC set to  0.000000
9/28/2010	10:49:51 AM	Bypass solenoid MFC set to  0.000000
9/28/2010	10:49:51 AM	Tube furnace set to 0
9/28/2010	10:50:51 AM	H2 valve closed
9/28/2010	10:50:51 AM	BCl3 valve closed
9/28/2010	10:50:51 AM	PH3 valve closed
9/28/2010	10:50:51 AM	SiCl4 pre valve closed
9/28/2010	10:50:51 AM	SiCl4 post valve closed
9/28/2010	10:50:51 AM	Bubbler valve closed
9/28/2010	10:50:51 AM	Helium valve opened
9/28/2010	10:50:51 AM	Main Vac valve opened
9/28/2010	10:50:51 AM	Bypass valve opened
9/28/2010	10:50:51 AM	Helium MFC set to  100.000000
9/28/2010	10:50:51 AM	H2 MFC set to  0.000000
9/28/2010	10:50:51 AM	BCl3 MFC set to  0.000000
9/28/2010	10:50:51 AM	PHl3 MFC set to  0.000000
9/28/2010	10:50:51 AM	SiCl4 MFC set to  0.000000
9/28/2010	10:50:51 AM	Bypass solenoid MFC set to  0.000000
9/28/2010	10:50:51 AM	Tube furnace set to 0
9/28/2010	10:51:51 AM	Helium valve closed
9/28/2010	10:51:51 AM	H2 valve closed
9/28/2010	10:51:51 AM	BCl3 valve closed
9/28/2010	10:51:51 AM	PH3 valve closed
9/28/2010	10:51:51 AM	SiCl4 pre valve closed
9/28/2010	10:51:51 AM	SiCl4 post valve closed
9/28/2010	10:51:51 AM	Bubbler valve closed
9/28/2010	10:51:51 AM	Main Vac valve opened
9/28/2010	10:51:51 AM	Bypass valve opened
9/28/2010	10:51:51 AM	Helium MFC set to  0.000000
9/28/2010	10:51:51 AM	H2 MFC set to  0.000000
9/28/2010	10:51:51 AM	BCl3 MFC set to  0.000000
9/28/2010	10:51:51 AM	PHl3 MFC set to  0.000000
9/28/2010	10:51:51 AM	SiCl4 MFC set to  0.000000
9/28/2010	10:51:51 AM	Bypass solenoid MFC set to  0.000000
9/28/2010	10:51:51 AM	Tube furnace set to 0
9/28/2010	10:52:51 AM	H2 valve closed
9/28/2010	10:52:51 AM	BCl3 valve closed
9/28/2010	10:52:51 AM	PH3 valve closed
9/28/2010	10:52:51 AM	SiCl4 pre valve closed
9/28/2010	10:52:51 AM	SiCl4 post valve closed
9/28/2010	10:52:51 AM	Bubbler valve closed
9/28/2010	10:52:51 AM	Helium valve opened
9/28/2010	10:52:51 AM	Main Vac valve opened
9/28/2010	10:52:51 AM	Bypass valve opened
9/28/2010	10:52:51 AM	Helium MFC set to  100.000000
9/28/2010	10:52:51 AM	H2 MFC set to  0.000000
9/28/2010	10:52:51 AM	BCl3 MFC set to  0.000000
9/28/2010	10:52:51 AM	PHl3 MFC set to  0.000000
9/28/2010	10:52:51 AM	SiCl4 MFC set to  0.000000
9/28/2010	10:52:51 AM	Bypass solenoid MFC set to  0.000000
9/28/2010	10:52:51 AM	Tube furnace set to 0
9/28/2010	10:53:51 AM	Helium valve closed
9/28/2010	10:53:51 AM	H2 valve closed
9/28/2010	10:53:51 AM	BCl3 valve closed
9/28/2010	10:53:51 AM	PH3 valve closed
9/28/2010	10:53:51 AM	SiCl4 pre valve closed
9/28/2010	10:53:51 AM	SiCl4 post valve closed
9/28/2010	10:53:51 AM	Bubbler valve closed
9/28/2010	10:53:51 AM	Main Vac valve opened
9/28/2010	10:53:51 AM	Bypass valve opened
9/28/2010	10:53:51 AM	Helium MFC set to  0.000000
9/28/2010	10:53:51 AM	H2 MFC set to  0.000000
9/28/2010	10:53:51 AM	BCl3 MFC set to  0.000000
9/28/2010	10:53:51 AM	PHl3 MFC set to  0.000000
9/28/2010	10:53:51 AM	SiCl4 MFC set to  0.000000
9/28/2010	10:53:51 AM	Bypass solenoid MFC set to  0.000000
9/28/2010	10:53:51 AM	Tube furnace set to 0
9/28/2010	10:54:52 AM	H2 valve closed
9/28/2010	10:54:52 AM	BCl3 valve closed
9/28/2010	10:54:52 AM	PH3 valve closed
9/28/2010	10:54:52 AM	SiCl4 pre valve closed
9/28/2010	10:54:52 AM	SiCl4 post valve closed
9/28/2010	10:54:52 AM	Bubbler valve closed
9/28/2010	10:54:52 AM	Helium valve opened
9/28/2010	10:54:52 AM	Main Vac valve opened
9/28/2010	10:54:52 AM	Bypass valve opened
9/28/2010	10:54:52 AM	Helium MFC set to  100.000000
9/28/2010	10:54:52 AM	H2 MFC set to  0.000000
9/28/2010	10:54:52 AM	BCl3 MFC set to  0.000000
9/28/2010	10:54:52 AM	PHl3 MFC set to  0.000000
9/28/2010	10:54:52 AM	SiCl4 MFC set to  0.000000
9/28/2010	10:54:52 AM	Bypass solenoid MFC set to  0.000000
9/28/2010	10:54:52 AM	Tube furnace set to 0
9/28/2010	10:55:52 AM	Helium valve closed
9/28/2010	10:55:52 AM	H2 valve closed
9/28/2010	10:55:52 AM	BCl3 valve closed
9/28/2010	10:55:52 AM	PH3 valve closed
9/28/2010	10:55:52 AM	SiCl4 pre valve closed
9/28/2010	10:55:52 AM	SiCl4 post valve closed
9/28/2010	10:55:52 AM	Bubbler valve closed
9/28/2010	10:55:52 AM	Main Vac valve opened
9/28/2010	10:55:52 AM	Bypass valve opened
9/28/2010	10:55:52 AM	Helium MFC set to  0.000000
9/28/2010	10:55:52 AM	H2 MFC set to  0.000000
9/28/2010	10:55:52 AM	BCl3 MFC set to  0.000000
9/28/2010	10:55:52 AM	PHl3 MFC set to  0.000000
9/28/2010	10:55:52 AM	SiCl4 MFC set to  0.000000
9/28/2010	10:55:52 AM	Bypass solenoid MFC set to  0.000000
9/28/2010	10:55:52 AM	Tube furnace set to 0
9/28/2010	10:56:52 AM	H2 valve closed
9/28/2010	10:56:52 AM	BCl3 valve closed
9/28/2010	10:56:52 AM	PH3 valve closed
9/28/2010	10:56:52 AM	SiCl4 pre valve closed
9/28/2010	10:56:52 AM	SiCl4 post valve closed
9/28/2010	10:56:52 AM	Bubbler valve closed
9/28/2010	10:56:52 AM	Helium valve opened
9/28/2010	10:56:52 AM	Main Vac valve opened
9/28/2010	10:56:52 AM	Bypass valve opened
9/28/2010	10:56:52 AM	Helium MFC set to  100.000000
9/28/2010	10:56:52 AM	H2 MFC set to  0.000000
9/28/2010	10:56:52 AM	BCl3 MFC set to  0.000000
9/28/2010	10:56:52 AM	PHl3 MFC set to  0.000000
9/28/2010	10:56:52 AM	SiCl4 MFC set to  0.000000
9/28/2010	10:56:52 AM	Bypass solenoid MFC set to  0.000000
9/28/2010	10:56:52 AM	Tube furnace set to 0
9/28/2010	10:57:52 AM	Helium valve closed
9/28/2010	10:57:52 AM	H2 valve closed
9/28/2010	10:57:52 AM	BCl3 valve closed
9/28/2010	10:57:52 AM	PH3 valve closed
9/28/2010	10:57:52 AM	SiCl4 pre valve closed
9/28/2010	10:57:52 AM	SiCl4 post valve closed
9/28/2010	10:57:52 AM	Bubbler valve closed
9/28/2010	10:57:52 AM	Main Vac valve opened
9/28/2010	10:57:52 AM	Bypass valve opened
9/28/2010	10:57:52 AM	Helium MFC set to  0.000000
9/28/2010	10:57:52 AM	H2 MFC set to  0.000000
9/28/2010	10:57:52 AM	BCl3 MFC set to  0.000000
9/28/2010	10:57:52 AM	PHl3 MFC set to  0.000000
9/28/2010	10:57:52 AM	SiCl4 MFC set to  0.000000
9/28/2010	10:57:52 AM	Bypass solenoid MFC set to  0.000000
9/28/2010	10:57:52 AM	Tube furnace set to 0
9/28/2010	10:58:52 AM	H2 valve closed
9/28/2010	10:58:52 AM	BCl3 valve closed
9/28/2010	10:58:52 AM	PH3 valve closed
9/28/2010	10:58:52 AM	SiCl4 pre valve closed
9/28/2010	10:58:52 AM	SiCl4 post valve closed
9/28/2010	10:58:52 AM	Bubbler valve closed
9/28/2010	10:58:52 AM	Helium valve opened
9/28/2010	10:58:52 AM	Main Vac valve opened
9/28/2010	10:58:52 AM	Bypass valve opened
9/28/2010	10:58:52 AM	Helium MFC set to  100.000000
9/28/2010	10:58:52 AM	H2 MFC set to  0.000000
9/28/2010	10:58:52 AM	BCl3 MFC set to  0.000000
9/28/2010	10:58:52 AM	PHl3 MFC set to  0.000000
9/28/2010	10:58:52 AM	SiCl4 MFC set to  0.000000
9/28/2010	10:58:52 AM	Bypass solenoid MFC set to  0.000000
9/28/2010	10:58:53 AM	Tube furnace set to 0
9/28/2010	10:59:53 AM	Helium valve closed
9/28/2010	10:59:53 AM	H2 valve closed
9/28/2010	10:59:53 AM	BCl3 valve closed
9/28/2010	10:59:53 AM	PH3 valve closed
9/28/2010	10:59:53 AM	SiCl4 pre valve closed
9/28/2010	10:59:53 AM	SiCl4 post valve closed
9/28/2010	10:59:53 AM	Bubbler valve closed
9/28/2010	10:59:53 AM	Main Vac valve opened
9/28/2010	10:59:53 AM	Bypass valve opened
9/28/2010	10:59:53 AM	Helium MFC set to  0.000000
9/28/2010	10:59:53 AM	H2 MFC set to  0.000000
9/28/2010	10:59:53 AM	BCl3 MFC set to  0.000000
9/28/2010	10:59:53 AM	PHl3 MFC set to  0.000000
9/28/2010	10:59:53 AM	SiCl4 MFC set to  0.000000
9/28/2010	10:59:53 AM	Bypass solenoid MFC set to  0.000000
9/28/2010	10:59:53 AM	Tube furnace set to 0
9/28/2010	11:00:53 AM	H2 valve closed
9/28/2010	11:00:53 AM	BCl3 valve closed
9/28/2010	11:00:53 AM	PH3 valve closed
9/28/2010	11:00:53 AM	SiCl4 pre valve closed
9/28/2010	11:00:53 AM	SiCl4 post valve closed
9/28/2010	11:00:53 AM	Bubbler valve closed
9/28/2010	11:00:53 AM	Helium valve opened
9/28/2010	11:00:53 AM	Main Vac valve opened
9/28/2010	11:00:53 AM	Bypass valve opened
9/28/2010	11:00:53 AM	Helium MFC set to  100.000000
9/28/2010	11:00:53 AM	H2 MFC set to  0.000000
9/28/2010	11:00:53 AM	BCl3 MFC set to  0.000000
9/28/2010	11:00:53 AM	PHl3 MFC set to  0.000000
9/28/2010	11:00:53 AM	SiCl4 MFC set to  0.000000
9/28/2010	11:00:53 AM	Bypass solenoid MFC set to  0.000000
9/28/2010	11:00:53 AM	Tube furnace set to 0
9/28/2010	11:01:53 AM	Helium valve closed
9/28/2010	11:01:53 AM	H2 valve closed
9/28/2010	11:01:53 AM	BCl3 valve closed
9/28/2010	11:01:53 AM	PH3 valve closed
9/28/2010	11:01:53 AM	SiCl4 pre valve closed
9/28/2010	11:01:53 AM	SiCl4 post valve closed
9/28/2010	11:01:53 AM	Bubbler valve closed
9/28/2010	11:01:53 AM	Main Vac valve opened
9/28/2010	11:01:53 AM	Bypass valve opened
9/28/2010	11:01:53 AM	Helium MFC set to  0.000000
9/28/2010	11:01:53 AM	H2 MFC set to  0.000000
9/28/2010	11:01:53 AM	BCl3 MFC set to  0.000000
9/28/2010	11:01:53 AM	PHl3 MFC set to  0.000000
9/28/2010	11:01:53 AM	SiCl4 MFC set to  0.000000
9/28/2010	11:01:53 AM	Bypass solenoid MFC set to  0.000000
9/28/2010	11:01:53 AM	Tube furnace set to 0
9/28/2010	11:02:53 AM	H2 valve closed
9/28/2010	11:02:53 AM	BCl3 valve closed
9/28/2010	11:02:53 AM	PH3 valve closed
9/28/2010	11:02:53 AM	SiCl4 pre valve closed
9/28/2010	11:02:53 AM	SiCl4 post valve closed
9/28/2010	11:02:53 AM	Bubbler valve closed
9/28/2010	11:02:53 AM	Helium valve opened
9/28/2010	11:02:53 AM	Main Vac valve opened
9/28/2010	11:02:53 AM	Bypass valve opened
9/28/2010	11:02:53 AM	Helium MFC set to  100.000000
9/28/2010	11:02:53 AM	H2 MFC set to  0.000000
9/28/2010	11:02:53 AM	BCl3 MFC set to  0.000000
9/28/2010	11:02:53 AM	PHl3 MFC set to  0.000000
9/28/2010	11:02:53 AM	SiCl4 MFC set to  0.000000
9/28/2010	11:02:53 AM	Bypass solenoid MFC set to  0.000000
9/28/2010	11:02:53 AM	Tube furnace set to 0
9/28/2010	11:03:53 AM	Helium valve closed
9/28/2010	11:03:53 AM	H2 valve closed
9/28/2010	11:03:53 AM	BCl3 valve closed
9/28/2010	11:03:53 AM	PH3 valve closed
9/28/2010	11:03:53 AM	SiCl4 pre valve closed
9/28/2010	11:03:53 AM	SiCl4 post valve closed
9/28/2010	11:03:53 AM	Bubbler valve closed
9/28/2010	11:03:53 AM	Main Vac valve opened
9/28/2010	11:03:53 AM	Bypass valve opened
9/28/2010	11:03:53 AM	Helium MFC set to  0.000000
9/28/2010	11:03:53 AM	H2 MFC set to  0.000000
9/28/2010	11:03:53 AM	BCl3 MFC set to  0.000000
9/28/2010	11:03:53 AM	PHl3 MFC set to  0.000000
9/28/2010	11:03:53 AM	SiCl4 MFC set to  0.000000
9/28/2010	11:03:53 AM	Bypass solenoid MFC set to  0.000000
9/28/2010	11:03:53 AM	Tube furnace set to 0
9/28/2010	11:04:54 AM	H2 valve closed
9/28/2010	11:04:54 AM	BCl3 valve closed
9/28/2010	11:04:54 AM	PH3 valve closed
9/28/2010	11:04:54 AM	SiCl4 pre valve closed
9/28/2010	11:04:54 AM	SiCl4 post valve closed
9/28/2010	11:04:54 AM	Bubbler valve closed
9/28/2010	11:04:54 AM	Helium valve opened
9/28/2010	11:04:54 AM	Main Vac valve opened
9/28/2010	11:04:54 AM	Bypass valve opened
9/28/2010	11:04:54 AM	Helium MFC set to  100.000000
9/28/2010	11:04:54 AM	H2 MFC set to  0.000000
9/28/2010	11:04:54 AM	BCl3 MFC set to  0.000000
9/28/2010	11:04:54 AM	PHl3 MFC set to  0.000000
9/28/2010	11:04:54 AM	SiCl4 MFC set to  0.000000
9/28/2010	11:04:54 AM	Bypass solenoid MFC set to  0.000000
9/28/2010	11:04:54 AM	Tube furnace set to 0
9/28/2010	11:05:54 AM	Helium valve closed
9/28/2010	11:05:54 AM	H2 valve closed
9/28/2010	11:05:54 AM	BCl3 valve closed
9/28/2010	11:05:54 AM	PH3 valve closed
9/28/2010	11:05:54 AM	SiCl4 pre valve closed
9/28/2010	11:05:54 AM	SiCl4 post valve closed
9/28/2010	11:05:54 AM	Bubbler valve closed
9/28/2010	11:05:54 AM	Main Vac valve opened
9/28/2010	11:05:54 AM	Bypass valve opened
9/28/2010	11:05:54 AM	Helium MFC set to  0.000000
9/28/2010	11:05:54 AM	H2 MFC set to  0.000000
9/28/2010	11:05:54 AM	BCl3 MFC set to  0.000000
9/28/2010	11:05:54 AM	PHl3 MFC set to  0.000000
9/28/2010	11:05:54 AM	SiCl4 MFC set to  0.000000
9/28/2010	11:05:54 AM	Bypass solenoid MFC set to  0.000000
9/28/2010	11:05:54 AM	Tube furnace set to 0
9/28/2010	11:06:54 AM	H2 valve closed
9/28/2010	11:06:54 AM	BCl3 valve closed
9/28/2010	11:06:54 AM	PH3 valve closed
9/28/2010	11:06:54 AM	SiCl4 pre valve closed
9/28/2010	11:06:54 AM	SiCl4 post valve closed
9/28/2010	11:06:54 AM	Bubbler valve closed
9/28/2010	11:06:54 AM	Helium valve opened
9/28/2010	11:06:54 AM	Main Vac valve opened
9/28/2010	11:06:54 AM	Bypass valve opened
9/28/2010	11:06:54 AM	Helium MFC set to  100.000000
9/28/2010	11:06:54 AM	H2 MFC set to  0.000000
9/28/2010	11:06:54 AM	BCl3 MFC set to  0.000000
9/28/2010	11:06:54 AM	PHl3 MFC set to  0.000000
9/28/2010	11:06:54 AM	SiCl4 MFC set to  0.000000
9/28/2010	11:06:54 AM	Bypass solenoid MFC set to  0.000000
9/28/2010	11:06:54 AM	Tube furnace set to 0
9/28/2010	11:07:54 AM	Helium valve closed
9/28/2010	11:07:54 AM	H2 valve closed
9/28/2010	11:07:54 AM	BCl3 valve closed
9/28/2010	11:07:54 AM	PH3 valve closed
9/28/2010	11:07:54 AM	SiCl4 pre valve closed
9/28/2010	11:07:54 AM	SiCl4 post valve closed
9/28/2010	11:07:54 AM	Bubbler valve closed
9/28/2010	11:07:54 AM	Main Vac valve opened
9/28/2010	11:07:54 AM	Bypass valve opened
9/28/2010	11:07:54 AM	Helium MFC set to  0.000000
9/28/2010	11:07:54 AM	H2 MFC set to  0.000000
9/28/2010	11:07:54 AM	BCl3 MFC set to  0.000000
9/28/2010	11:07:54 AM	PHl3 MFC set to  0.000000
9/28/2010	11:07:54 AM	SiCl4 MFC set to  0.000000
9/28/2010	11:07:54 AM	Bypass solenoid MFC set to  0.000000
9/28/2010	11:07:54 AM	Tube furnace set to 0
9/28/2010	11:08:54 AM	H2 valve closed
9/28/2010	11:08:54 AM	BCl3 valve closed
9/28/2010	11:08:54 AM	PH3 valve closed
9/28/2010	11:08:54 AM	SiCl4 pre valve closed
9/28/2010	11:08:54 AM	SiCl4 post valve closed
9/28/2010	11:08:54 AM	Bubbler valve closed
9/28/2010	11:08:54 AM	Helium valve opened
9/28/2010	11:08:54 AM	Main Vac valve opened
9/28/2010	11:08:54 AM	Bypass valve opened
9/28/2010	11:08:54 AM	Helium MFC set to  100.000000
9/28/2010	11:08:54 AM	H2 MFC set to  0.000000
9/28/2010	11:08:54 AM	BCl3 MFC set to  0.000000
9/28/2010	11:08:54 AM	PHl3 MFC set to  0.000000
9/28/2010	11:08:54 AM	SiCl4 MFC set to  0.000000
9/28/2010	11:08:54 AM	Bypass solenoid MFC set to  0.000000
9/28/2010	11:08:54 AM	Tube furnace set to 0
9/28/2010	11:09:54 AM	Helium valve closed
9/28/2010	11:09:54 AM	H2 valve closed
9/28/2010	11:09:54 AM	BCl3 valve closed
9/28/2010	11:09:54 AM	PH3 valve closed
9/28/2010	11:09:54 AM	SiCl4 pre valve closed
9/28/2010	11:09:54 AM	SiCl4 post valve closed
9/28/2010	11:09:55 AM	Bubbler valve closed
9/28/2010	11:09:55 AM	Main Vac valve opened
9/28/2010	11:09:55 AM	Bypass valve opened
9/28/2010	11:09:55 AM	Helium MFC set to  0.000000
9/28/2010	11:09:55 AM	H2 MFC set to  0.000000
9/28/2010	11:09:55 AM	BCl3 MFC set to  0.000000
9/28/2010	11:09:55 AM	PHl3 MFC set to  0.000000
9/28/2010	11:09:55 AM	SiCl4 MFC set to  0.000000
9/28/2010	11:09:55 AM	Bypass solenoid MFC set to  0.000000
9/28/2010	11:09:55 AM	Tube furnace set to 0
9/28/2010	11:09:56 AM	Run finished at 11:09 AM
9/28/2010	11:09:56 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/28/2010	11:11:02 AM	Bypass valve closed
9/28/2010	11:11:03 AM	Main Vac valve closed
9/28/2010	11:11:18 AM	Main Vac valve opened
9/28/2010	11:11:18 AM	Bypass valve opened
9/28/2010	1:48:42 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/28/2010	1:48:43 PM	Recipe started at 1:48 PM
9/28/2010	1:48:43 PM	H2 valve closed
9/28/2010	1:48:43 PM	BCl3 valve closed
9/28/2010	1:48:43 PM	PH3 valve closed
9/28/2010	1:48:43 PM	SiCl4 pre valve closed
9/28/2010	1:48:43 PM	SiCl4 post valve closed
9/28/2010	1:48:43 PM	Main Vac valve closed
9/28/2010	1:48:43 PM	Bypass valve closed
9/28/2010	1:48:43 PM	Bubbler valve closed
9/28/2010	1:48:43 PM	Helium valve opened
9/28/2010	1:48:43 PM	Helium MFC set to  500.000000
9/28/2010	1:48:43 PM	H2 MFC set to  0.000000
9/28/2010	1:48:43 PM	BCl3 MFC set to  0.000000
9/28/2010	1:48:43 PM	PHl3 MFC set to  0.000000
9/28/2010	1:48:43 PM	SiCl4 MFC set to  0.000000
9/28/2010	1:48:43 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	1:48:43 PM	Tube furnace set to 0
9/28/2010	1:50:02 PM	Helium valve closed
9/28/2010	1:50:02 PM	H2 valve closed
9/28/2010	1:50:02 PM	BCl3 valve closed
9/28/2010	1:50:02 PM	PH3 valve closed
9/28/2010	1:50:02 PM	SiCl4 pre valve closed
9/28/2010	1:50:02 PM	SiCl4 post valve closed
9/28/2010	1:50:02 PM	Main Vac valve closed
9/28/2010	1:50:03 PM	Bypass valve closed
9/28/2010	1:50:03 PM	Bubbler valve closed
9/28/2010	1:50:03 PM	Helium MFC set to  0.000000
9/28/2010	1:50:03 PM	H2 MFC set to  0.000000
9/28/2010	1:50:03 PM	BCl3 MFC set to  0.000000
9/28/2010	1:50:03 PM	PHl3 MFC set to  0.000000
9/28/2010	1:50:03 PM	SiCl4 MFC set to  0.000000
9/28/2010	1:50:03 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	1:50:03 PM	Tube furnace set to 0
9/28/2010	1:50:03 PM	Run finished at 1:50 PM
9/28/2010	1:50:03 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/28/2010	1:59:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/28/2010	1:59:34 PM	Recipe started at 1:59 PM
9/28/2010	1:59:34 PM	Helium valve closed
9/28/2010	1:59:34 PM	H2 valve closed
9/28/2010	1:59:34 PM	BCl3 valve closed
9/28/2010	1:59:34 PM	PH3 valve closed
9/28/2010	1:59:34 PM	SiCl4 pre valve closed
9/28/2010	1:59:34 PM	SiCl4 post valve closed
9/28/2010	1:59:34 PM	Main Vac valve closed
9/28/2010	1:59:34 PM	Bubbler valve closed
9/28/2010	1:59:34 PM	Bypass valve opened
9/28/2010	1:59:34 PM	Helium MFC set to  0.000000
9/28/2010	1:59:34 PM	H2 MFC set to  0.000000
9/28/2010	1:59:34 PM	BCl3 MFC set to  0.000000
9/28/2010	1:59:34 PM	PHl3 MFC set to  0.000000
9/28/2010	1:59:34 PM	SiCl4 MFC set to  0.000000
9/28/2010	1:59:34 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	1:59:34 PM	Tube furnace set to 0
9/28/2010	2:00:18 PM	Run aborted at 2:00 PM
9/28/2010	2:00:18 PM	Helium valve closed
9/28/2010	2:00:18 PM	H2 valve closed
9/28/2010	2:00:18 PM	BCl3 valve closed
9/28/2010	2:00:18 PM	PH3 valve closed
9/28/2010	2:00:18 PM	SiCl4 pre valve closed
9/28/2010	2:00:18 PM	SiCl4 post valve closed
9/28/2010	2:00:18 PM	Bypass valve closed
9/28/2010	2:00:18 PM	Main Vac valve closed
9/28/2010	2:00:18 PM	Bubbler valve closed
9/28/2010	2:00:18 PM	Helium MFC set to  0.000000
9/28/2010	2:00:18 PM	H2 MFC set to  0.000000
9/28/2010	2:00:18 PM	BCl3 MFC set to  0.000000
9/28/2010	2:00:18 PM	PHl3 MFC set to  0.000000
9/28/2010	2:00:18 PM	SiCl4 MFC set to  0.000000
9/28/2010	2:00:18 PM	Tube furnace set to 0
9/28/2010	2:00:18 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/28/2010	2:00:27 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/28/2010	2:00:27 PM	Recipe started at 2:00 PM
9/28/2010	2:00:27 PM	H2 valve closed
9/28/2010	2:00:27 PM	BCl3 valve closed
9/28/2010	2:00:27 PM	PH3 valve closed
9/28/2010	2:00:27 PM	SiCl4 pre valve closed
9/28/2010	2:00:27 PM	SiCl4 post valve closed
9/28/2010	2:00:27 PM	Main Vac valve closed
9/28/2010	2:00:27 PM	Bypass valve closed
9/28/2010	2:00:27 PM	Bubbler valve closed
9/28/2010	2:00:27 PM	Helium valve opened
9/28/2010	2:00:27 PM	Helium MFC set to  500.000000
9/28/2010	2:00:27 PM	H2 MFC set to  0.000000
9/28/2010	2:00:27 PM	BCl3 MFC set to  0.000000
9/28/2010	2:00:27 PM	PHl3 MFC set to  0.000000
9/28/2010	2:00:27 PM	SiCl4 MFC set to  0.000000
9/28/2010	2:00:27 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	2:00:27 PM	Tube furnace set to 0
9/28/2010	2:00:30 PM	Helium valve closed
9/28/2010	2:00:30 PM	H2 valve closed
9/28/2010	2:00:30 PM	BCl3 valve closed
9/28/2010	2:00:30 PM	PH3 valve closed
9/28/2010	2:00:30 PM	SiCl4 pre valve closed
9/28/2010	2:00:30 PM	SiCl4 post valve closed
9/28/2010	2:00:30 PM	Main Vac valve closed
9/28/2010	2:00:30 PM	Bypass valve closed
9/28/2010	2:00:30 PM	Bubbler valve closed
9/28/2010	2:00:30 PM	Helium MFC set to  0.000000
9/28/2010	2:00:30 PM	H2 MFC set to  0.000000
9/28/2010	2:00:30 PM	BCl3 MFC set to  0.000000
9/28/2010	2:00:30 PM	PHl3 MFC set to  0.000000
9/28/2010	2:00:30 PM	SiCl4 MFC set to  0.000000
9/28/2010	2:00:30 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	2:00:30 PM	Tube furnace set to 0
9/28/2010	2:00:30 PM	Run finished at 2:00 PM
9/28/2010	2:00:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/28/2010	2:04:43 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/28/2010	2:04:43 PM	Recipe started at 2:04 PM
9/28/2010	2:04:43 PM	Helium valve closed
9/28/2010	2:04:43 PM	H2 valve closed
9/28/2010	2:04:43 PM	BCl3 valve closed
9/28/2010	2:04:43 PM	PH3 valve closed
9/28/2010	2:04:43 PM	SiCl4 pre valve closed
9/28/2010	2:04:43 PM	SiCl4 post valve closed
9/28/2010	2:04:43 PM	Main Vac valve closed
9/28/2010	2:04:43 PM	Bubbler valve closed
9/28/2010	2:04:43 PM	Bypass valve opened
9/28/2010	2:04:43 PM	Helium MFC set to  0.000000
9/28/2010	2:04:43 PM	H2 MFC set to  0.000000
9/28/2010	2:04:43 PM	BCl3 MFC set to  0.000000
9/28/2010	2:04:43 PM	PHl3 MFC set to  0.000000
9/28/2010	2:04:43 PM	SiCl4 MFC set to  0.000000
9/28/2010	2:04:43 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	2:04:43 PM	Tube furnace set to 0
9/28/2010	2:05:30 PM	Helium valve closed
9/28/2010	2:05:30 PM	H2 valve closed
9/28/2010	2:05:30 PM	BCl3 valve closed
9/28/2010	2:05:30 PM	PH3 valve closed
9/28/2010	2:05:30 PM	SiCl4 pre valve closed
9/28/2010	2:05:30 PM	SiCl4 post valve closed
9/28/2010	2:05:30 PM	Bubbler valve closed
9/28/2010	2:05:30 PM	Main Vac valve opened
9/28/2010	2:05:30 PM	Bypass valve opened
9/28/2010	2:05:30 PM	Helium MFC set to  0.000000
9/28/2010	2:05:30 PM	H2 MFC set to  0.000000
9/28/2010	2:05:30 PM	BCl3 MFC set to  0.000000
9/28/2010	2:05:30 PM	PHl3 MFC set to  0.000000
9/28/2010	2:05:30 PM	SiCl4 MFC set to  0.000000
9/28/2010	2:05:30 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	2:05:30 PM	Tube furnace set to 0
9/28/2010	2:05:30 PM	Run finished at 2:05 PM
9/28/2010	2:05:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/28/2010	2:07:24 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/28/2010	2:07:36 PM	Recipe started at 2:07 PM
9/28/2010	2:07:36 PM	Helium valve closed
9/28/2010	2:07:36 PM	H2 valve closed
9/28/2010	2:07:36 PM	BCl3 valve closed
9/28/2010	2:07:36 PM	PH3 valve closed
9/28/2010	2:07:36 PM	SiCl4 pre valve closed
9/28/2010	2:07:36 PM	SiCl4 post valve closed
9/28/2010	2:07:36 PM	Main Vac valve closed
9/28/2010	2:07:36 PM	Bubbler valve closed
9/28/2010	2:07:36 PM	Bypass valve opened
9/28/2010	2:07:36 PM	Helium MFC set to  0.000000
9/28/2010	2:07:36 PM	H2 MFC set to  0.000000
9/28/2010	2:07:36 PM	BCl3 MFC set to  0.000000
9/28/2010	2:07:36 PM	PHl3 MFC set to  0.000000
9/28/2010	2:07:36 PM	SiCl4 MFC set to  0.000000
9/28/2010	2:07:36 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	2:07:36 PM	Tube furnace set to 0
9/28/2010	2:07:36 PM	Helium valve closed
9/28/2010	2:07:36 PM	H2 valve closed
9/28/2010	2:07:36 PM	BCl3 valve closed
9/28/2010	2:07:36 PM	PH3 valve closed
9/28/2010	2:07:36 PM	SiCl4 pre valve closed
9/28/2010	2:07:36 PM	SiCl4 post valve closed
9/28/2010	2:07:36 PM	Bubbler valve closed
9/28/2010	2:07:36 PM	Main Vac valve opened
9/28/2010	2:07:36 PM	Bypass valve opened
9/28/2010	2:07:36 PM	Helium MFC set to  0.000000
9/28/2010	2:07:36 PM	H2 MFC set to  0.000000
9/28/2010	2:07:36 PM	BCl3 MFC set to  0.000000
9/28/2010	2:07:36 PM	PHl3 MFC set to  0.000000
9/28/2010	2:07:36 PM	SiCl4 MFC set to  0.000000
9/28/2010	2:07:36 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	2:07:36 PM	Tube furnace set to 0
9/28/2010	2:08:36 PM	H2 valve closed
9/28/2010	2:08:36 PM	BCl3 valve closed
9/28/2010	2:08:36 PM	PH3 valve closed
9/28/2010	2:08:36 PM	SiCl4 pre valve closed
9/28/2010	2:08:36 PM	SiCl4 post valve closed
9/28/2010	2:08:36 PM	Bubbler valve closed
9/28/2010	2:08:36 PM	Helium valve opened
9/28/2010	2:08:36 PM	Main Vac valve opened
9/28/2010	2:08:36 PM	Bypass valve opened
9/28/2010	2:08:36 PM	Helium MFC set to  100.000000
9/28/2010	2:08:36 PM	H2 MFC set to  0.000000
9/28/2010	2:08:37 PM	BCl3 MFC set to  0.000000
9/28/2010	2:08:37 PM	PHl3 MFC set to  0.000000
9/28/2010	2:08:37 PM	SiCl4 MFC set to  0.000000
9/28/2010	2:08:37 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	2:08:37 PM	Tube furnace set to 0
9/28/2010	2:09:37 PM	Helium valve closed
9/28/2010	2:09:37 PM	H2 valve closed
9/28/2010	2:09:37 PM	BCl3 valve closed
9/28/2010	2:09:37 PM	PH3 valve closed
9/28/2010	2:09:37 PM	SiCl4 pre valve closed
9/28/2010	2:09:37 PM	SiCl4 post valve closed
9/28/2010	2:09:37 PM	Bubbler valve closed
9/28/2010	2:09:37 PM	Main Vac valve opened
9/28/2010	2:09:37 PM	Bypass valve opened
9/28/2010	2:09:37 PM	Helium MFC set to  0.000000
9/28/2010	2:09:37 PM	H2 MFC set to  0.000000
9/28/2010	2:09:37 PM	BCl3 MFC set to  0.000000
9/28/2010	2:09:37 PM	PHl3 MFC set to  0.000000
9/28/2010	2:09:37 PM	SiCl4 MFC set to  0.000000
9/28/2010	2:09:37 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	2:09:37 PM	Tube furnace set to 0
9/28/2010	2:10:37 PM	H2 valve closed
9/28/2010	2:10:37 PM	BCl3 valve closed
9/28/2010	2:10:37 PM	PH3 valve closed
9/28/2010	2:10:37 PM	SiCl4 pre valve closed
9/28/2010	2:10:37 PM	SiCl4 post valve closed
9/28/2010	2:10:37 PM	Bubbler valve closed
9/28/2010	2:10:37 PM	Helium valve opened
9/28/2010	2:10:37 PM	Main Vac valve opened
9/28/2010	2:10:37 PM	Bypass valve opened
9/28/2010	2:10:37 PM	Helium MFC set to  100.000000
9/28/2010	2:10:37 PM	H2 MFC set to  0.000000
9/28/2010	2:10:37 PM	BCl3 MFC set to  0.000000
9/28/2010	2:10:37 PM	PHl3 MFC set to  0.000000
9/28/2010	2:10:37 PM	SiCl4 MFC set to  0.000000
9/28/2010	2:10:37 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	2:10:37 PM	Tube furnace set to 0
9/28/2010	2:11:37 PM	Helium valve closed
9/28/2010	2:11:37 PM	H2 valve closed
9/28/2010	2:11:37 PM	BCl3 valve closed
9/28/2010	2:11:37 PM	PH3 valve closed
9/28/2010	2:11:37 PM	SiCl4 pre valve closed
9/28/2010	2:11:37 PM	SiCl4 post valve closed
9/28/2010	2:11:37 PM	Bubbler valve closed
9/28/2010	2:11:37 PM	Main Vac valve opened
9/28/2010	2:11:37 PM	Bypass valve opened
9/28/2010	2:11:37 PM	Helium MFC set to  0.000000
9/28/2010	2:11:37 PM	H2 MFC set to  0.000000
9/28/2010	2:11:37 PM	BCl3 MFC set to  0.000000
9/28/2010	2:11:37 PM	PHl3 MFC set to  0.000000
9/28/2010	2:11:37 PM	SiCl4 MFC set to  0.000000
9/28/2010	2:11:37 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	2:11:37 PM	Tube furnace set to 0
9/28/2010	2:12:37 PM	H2 valve closed
9/28/2010	2:12:37 PM	BCl3 valve closed
9/28/2010	2:12:37 PM	PH3 valve closed
9/28/2010	2:12:37 PM	SiCl4 pre valve closed
9/28/2010	2:12:37 PM	SiCl4 post valve closed
9/28/2010	2:12:37 PM	Bubbler valve closed
9/28/2010	2:12:37 PM	Helium valve opened
9/28/2010	2:12:37 PM	Main Vac valve opened
9/28/2010	2:12:37 PM	Bypass valve opened
9/28/2010	2:12:37 PM	Helium MFC set to  100.000000
9/28/2010	2:12:37 PM	H2 MFC set to  0.000000
9/28/2010	2:12:37 PM	BCl3 MFC set to  0.000000
9/28/2010	2:12:37 PM	PHl3 MFC set to  0.000000
9/28/2010	2:12:37 PM	SiCl4 MFC set to  0.000000
9/28/2010	2:12:37 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	2:12:37 PM	Tube furnace set to 0
9/28/2010	2:13:37 PM	Helium valve closed
9/28/2010	2:13:37 PM	H2 valve closed
9/28/2010	2:13:37 PM	BCl3 valve closed
9/28/2010	2:13:37 PM	PH3 valve closed
9/28/2010	2:13:37 PM	SiCl4 pre valve closed
9/28/2010	2:13:37 PM	SiCl4 post valve closed
9/28/2010	2:13:37 PM	Bubbler valve closed
9/28/2010	2:13:37 PM	Main Vac valve opened
9/28/2010	2:13:37 PM	Bypass valve opened
9/28/2010	2:13:37 PM	Helium MFC set to  0.000000
9/28/2010	2:13:37 PM	H2 MFC set to  0.000000
9/28/2010	2:13:37 PM	BCl3 MFC set to  0.000000
9/28/2010	2:13:37 PM	PHl3 MFC set to  0.000000
9/28/2010	2:13:37 PM	SiCl4 MFC set to  0.000000
9/28/2010	2:13:37 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	2:13:38 PM	Tube furnace set to 0
9/28/2010	2:14:38 PM	H2 valve closed
9/28/2010	2:14:38 PM	BCl3 valve closed
9/28/2010	2:14:38 PM	PH3 valve closed
9/28/2010	2:14:38 PM	SiCl4 pre valve closed
9/28/2010	2:14:38 PM	SiCl4 post valve closed
9/28/2010	2:14:38 PM	Bubbler valve closed
9/28/2010	2:14:38 PM	Helium valve opened
9/28/2010	2:14:38 PM	Main Vac valve opened
9/28/2010	2:14:38 PM	Bypass valve opened
9/28/2010	2:14:38 PM	Helium MFC set to  100.000000
9/28/2010	2:14:38 PM	H2 MFC set to  0.000000
9/28/2010	2:14:38 PM	BCl3 MFC set to  0.000000
9/28/2010	2:14:38 PM	PHl3 MFC set to  0.000000
9/28/2010	2:14:38 PM	SiCl4 MFC set to  0.000000
9/28/2010	2:14:38 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	2:14:38 PM	Tube furnace set to 0
9/28/2010	2:15:38 PM	Helium valve closed
9/28/2010	2:15:38 PM	H2 valve closed
9/28/2010	2:15:38 PM	BCl3 valve closed
9/28/2010	2:15:38 PM	PH3 valve closed
9/28/2010	2:15:38 PM	SiCl4 pre valve closed
9/28/2010	2:15:38 PM	SiCl4 post valve closed
9/28/2010	2:15:38 PM	Bubbler valve closed
9/28/2010	2:15:38 PM	Main Vac valve opened
9/28/2010	2:15:38 PM	Bypass valve opened
9/28/2010	2:15:38 PM	Helium MFC set to  0.000000
9/28/2010	2:15:38 PM	H2 MFC set to  0.000000
9/28/2010	2:15:38 PM	BCl3 MFC set to  0.000000
9/28/2010	2:15:38 PM	PHl3 MFC set to  0.000000
9/28/2010	2:15:38 PM	SiCl4 MFC set to  0.000000
9/28/2010	2:15:38 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	2:15:38 PM	Tube furnace set to 0
9/28/2010	2:16:38 PM	H2 valve closed
9/28/2010	2:16:38 PM	BCl3 valve closed
9/28/2010	2:16:38 PM	PH3 valve closed
9/28/2010	2:16:38 PM	SiCl4 pre valve closed
9/28/2010	2:16:38 PM	SiCl4 post valve closed
9/28/2010	2:16:38 PM	Bubbler valve closed
9/28/2010	2:16:38 PM	Helium valve opened
9/28/2010	2:16:38 PM	Main Vac valve opened
9/28/2010	2:16:38 PM	Bypass valve opened
9/28/2010	2:16:38 PM	Helium MFC set to  100.000000
9/28/2010	2:16:38 PM	H2 MFC set to  0.000000
9/28/2010	2:16:38 PM	BCl3 MFC set to  0.000000
9/28/2010	2:16:38 PM	PHl3 MFC set to  0.000000
9/28/2010	2:16:38 PM	SiCl4 MFC set to  0.000000
9/28/2010	2:16:38 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	2:16:38 PM	Tube furnace set to 0
9/28/2010	2:17:38 PM	Helium valve closed
9/28/2010	2:17:38 PM	H2 valve closed
9/28/2010	2:17:38 PM	BCl3 valve closed
9/28/2010	2:17:38 PM	PH3 valve closed
9/28/2010	2:17:38 PM	SiCl4 pre valve closed
9/28/2010	2:17:38 PM	SiCl4 post valve closed
9/28/2010	2:17:38 PM	Bubbler valve closed
9/28/2010	2:17:38 PM	Main Vac valve opened
9/28/2010	2:17:38 PM	Bypass valve opened
9/28/2010	2:17:38 PM	Helium MFC set to  0.000000
9/28/2010	2:17:38 PM	H2 MFC set to  0.000000
9/28/2010	2:17:38 PM	BCl3 MFC set to  0.000000
9/28/2010	2:17:38 PM	PHl3 MFC set to  0.000000
9/28/2010	2:17:38 PM	SiCl4 MFC set to  0.000000
9/28/2010	2:17:38 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	2:17:38 PM	Tube furnace set to 0
9/28/2010	2:18:38 PM	H2 valve closed
9/28/2010	2:18:38 PM	BCl3 valve closed
9/28/2010	2:18:38 PM	PH3 valve closed
9/28/2010	2:18:38 PM	SiCl4 pre valve closed
9/28/2010	2:18:38 PM	SiCl4 post valve closed
9/28/2010	2:18:38 PM	Bubbler valve closed
9/28/2010	2:18:38 PM	Helium valve opened
9/28/2010	2:18:38 PM	Main Vac valve opened
9/28/2010	2:18:38 PM	Bypass valve opened
9/28/2010	2:18:38 PM	Helium MFC set to  100.000000
9/28/2010	2:18:38 PM	H2 MFC set to  0.000000
9/28/2010	2:18:38 PM	BCl3 MFC set to  0.000000
9/28/2010	2:18:38 PM	PHl3 MFC set to  0.000000
9/28/2010	2:18:38 PM	SiCl4 MFC set to  0.000000
9/28/2010	2:18:38 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	2:18:39 PM	Tube furnace set to 0
9/28/2010	2:19:39 PM	Helium valve closed
9/28/2010	2:19:39 PM	H2 valve closed
9/28/2010	2:19:39 PM	BCl3 valve closed
9/28/2010	2:19:39 PM	PH3 valve closed
9/28/2010	2:19:39 PM	SiCl4 pre valve closed
9/28/2010	2:19:39 PM	SiCl4 post valve closed
9/28/2010	2:19:39 PM	Bubbler valve closed
9/28/2010	2:19:39 PM	Main Vac valve opened
9/28/2010	2:19:39 PM	Bypass valve opened
9/28/2010	2:19:39 PM	Helium MFC set to  0.000000
9/28/2010	2:19:39 PM	H2 MFC set to  0.000000
9/28/2010	2:19:39 PM	BCl3 MFC set to  0.000000
9/28/2010	2:19:39 PM	PHl3 MFC set to  0.000000
9/28/2010	2:19:39 PM	SiCl4 MFC set to  0.000000
9/28/2010	2:19:39 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	2:19:39 PM	Tube furnace set to 0
9/28/2010	2:20:39 PM	H2 valve closed
9/28/2010	2:20:39 PM	BCl3 valve closed
9/28/2010	2:20:39 PM	PH3 valve closed
9/28/2010	2:20:39 PM	SiCl4 pre valve closed
9/28/2010	2:20:39 PM	SiCl4 post valve closed
9/28/2010	2:20:39 PM	Bubbler valve closed
9/28/2010	2:20:39 PM	Helium valve opened
9/28/2010	2:20:39 PM	Main Vac valve opened
9/28/2010	2:20:39 PM	Bypass valve opened
9/28/2010	2:20:39 PM	Helium MFC set to  100.000000
9/28/2010	2:20:39 PM	H2 MFC set to  0.000000
9/28/2010	2:20:39 PM	BCl3 MFC set to  0.000000
9/28/2010	2:20:39 PM	PHl3 MFC set to  0.000000
9/28/2010	2:20:39 PM	SiCl4 MFC set to  0.000000
9/28/2010	2:20:39 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	2:20:39 PM	Tube furnace set to 0
9/28/2010	2:21:39 PM	Helium valve closed
9/28/2010	2:21:39 PM	H2 valve closed
9/28/2010	2:21:39 PM	BCl3 valve closed
9/28/2010	2:21:39 PM	PH3 valve closed
9/28/2010	2:21:39 PM	SiCl4 pre valve closed
9/28/2010	2:21:39 PM	SiCl4 post valve closed
9/28/2010	2:21:39 PM	Bubbler valve closed
9/28/2010	2:21:39 PM	Main Vac valve opened
9/28/2010	2:21:39 PM	Bypass valve opened
9/28/2010	2:21:39 PM	Helium MFC set to  0.000000
9/28/2010	2:21:39 PM	H2 MFC set to  0.000000
9/28/2010	2:21:39 PM	BCl3 MFC set to  0.000000
9/28/2010	2:21:39 PM	PHl3 MFC set to  0.000000
9/28/2010	2:21:39 PM	SiCl4 MFC set to  0.000000
9/28/2010	2:21:39 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	2:21:39 PM	Tube furnace set to 0
9/28/2010	2:22:39 PM	H2 valve closed
9/28/2010	2:22:39 PM	BCl3 valve closed
9/28/2010	2:22:39 PM	PH3 valve closed
9/28/2010	2:22:39 PM	SiCl4 pre valve closed
9/28/2010	2:22:39 PM	SiCl4 post valve closed
9/28/2010	2:22:39 PM	Bubbler valve closed
9/28/2010	2:22:39 PM	Helium valve opened
9/28/2010	2:22:39 PM	Main Vac valve opened
9/28/2010	2:22:39 PM	Bypass valve opened
9/28/2010	2:22:39 PM	Helium MFC set to  100.000000
9/28/2010	2:22:39 PM	H2 MFC set to  0.000000
9/28/2010	2:22:39 PM	BCl3 MFC set to  0.000000
9/28/2010	2:22:39 PM	PHl3 MFC set to  0.000000
9/28/2010	2:22:39 PM	SiCl4 MFC set to  0.000000
9/28/2010	2:22:39 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	2:22:39 PM	Tube furnace set to 0
9/28/2010	2:23:39 PM	Helium valve closed
9/28/2010	2:23:39 PM	H2 valve closed
9/28/2010	2:23:39 PM	BCl3 valve closed
9/28/2010	2:23:39 PM	PH3 valve closed
9/28/2010	2:23:39 PM	SiCl4 pre valve closed
9/28/2010	2:23:39 PM	SiCl4 post valve closed
9/28/2010	2:23:39 PM	Bubbler valve closed
9/28/2010	2:23:39 PM	Main Vac valve opened
9/28/2010	2:23:39 PM	Bypass valve opened
9/28/2010	2:23:39 PM	Helium MFC set to  0.000000
9/28/2010	2:23:39 PM	H2 MFC set to  0.000000
9/28/2010	2:23:39 PM	BCl3 MFC set to  0.000000
9/28/2010	2:23:39 PM	PHl3 MFC set to  0.000000
9/28/2010	2:23:39 PM	SiCl4 MFC set to  0.000000
9/28/2010	2:23:39 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	2:23:40 PM	Tube furnace set to 0
9/28/2010	2:24:40 PM	H2 valve closed
9/28/2010	2:24:40 PM	BCl3 valve closed
9/28/2010	2:24:40 PM	PH3 valve closed
9/28/2010	2:24:40 PM	SiCl4 pre valve closed
9/28/2010	2:24:40 PM	SiCl4 post valve closed
9/28/2010	2:24:40 PM	Bubbler valve closed
9/28/2010	2:24:40 PM	Helium valve opened
9/28/2010	2:24:40 PM	Main Vac valve opened
9/28/2010	2:24:40 PM	Bypass valve opened
9/28/2010	2:24:40 PM	Helium MFC set to  100.000000
9/28/2010	2:24:40 PM	H2 MFC set to  0.000000
9/28/2010	2:24:40 PM	BCl3 MFC set to  0.000000
9/28/2010	2:24:40 PM	PHl3 MFC set to  0.000000
9/28/2010	2:24:40 PM	SiCl4 MFC set to  0.000000
9/28/2010	2:24:40 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	2:24:40 PM	Tube furnace set to 0
9/28/2010	2:25:40 PM	Helium valve closed
9/28/2010	2:25:40 PM	H2 valve closed
9/28/2010	2:25:40 PM	BCl3 valve closed
9/28/2010	2:25:40 PM	PH3 valve closed
9/28/2010	2:25:40 PM	SiCl4 pre valve closed
9/28/2010	2:25:40 PM	SiCl4 post valve closed
9/28/2010	2:25:40 PM	Bubbler valve closed
9/28/2010	2:25:40 PM	Main Vac valve opened
9/28/2010	2:25:40 PM	Bypass valve opened
9/28/2010	2:25:40 PM	Helium MFC set to  0.000000
9/28/2010	2:25:40 PM	H2 MFC set to  0.000000
9/28/2010	2:25:40 PM	BCl3 MFC set to  0.000000
9/28/2010	2:25:40 PM	PHl3 MFC set to  0.000000
9/28/2010	2:25:40 PM	SiCl4 MFC set to  0.000000
9/28/2010	2:25:40 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	2:25:40 PM	Tube furnace set to 0
9/28/2010	2:26:40 PM	H2 valve closed
9/28/2010	2:26:40 PM	BCl3 valve closed
9/28/2010	2:26:40 PM	PH3 valve closed
9/28/2010	2:26:40 PM	SiCl4 pre valve closed
9/28/2010	2:26:40 PM	SiCl4 post valve closed
9/28/2010	2:26:40 PM	Bubbler valve closed
9/28/2010	2:26:40 PM	Helium valve opened
9/28/2010	2:26:40 PM	Main Vac valve opened
9/28/2010	2:26:40 PM	Bypass valve opened
9/28/2010	2:26:40 PM	Helium MFC set to  100.000000
9/28/2010	2:26:40 PM	H2 MFC set to  0.000000
9/28/2010	2:26:40 PM	BCl3 MFC set to  0.000000
9/28/2010	2:26:40 PM	PHl3 MFC set to  0.000000
9/28/2010	2:26:40 PM	SiCl4 MFC set to  0.000000
9/28/2010	2:26:40 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	2:26:40 PM	Tube furnace set to 0
9/28/2010	2:27:40 PM	Helium valve closed
9/28/2010	2:27:40 PM	H2 valve closed
9/28/2010	2:27:40 PM	BCl3 valve closed
9/28/2010	2:27:40 PM	PH3 valve closed
9/28/2010	2:27:40 PM	SiCl4 pre valve closed
9/28/2010	2:27:40 PM	SiCl4 post valve closed
9/28/2010	2:27:40 PM	Bubbler valve closed
9/28/2010	2:27:40 PM	Main Vac valve opened
9/28/2010	2:27:40 PM	Bypass valve opened
9/28/2010	2:27:40 PM	Helium MFC set to  0.000000
9/28/2010	2:27:40 PM	H2 MFC set to  0.000000
9/28/2010	2:27:40 PM	BCl3 MFC set to  0.000000
9/28/2010	2:27:40 PM	PHl3 MFC set to  0.000000
9/28/2010	2:27:40 PM	SiCl4 MFC set to  0.000000
9/28/2010	2:27:40 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	2:27:40 PM	Tube furnace set to 0
9/28/2010	2:27:41 PM	Run finished at 2:27 PM
9/28/2010	2:27:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/28/2010	2:29:09 PM	Bypass valve closed
9/28/2010	2:29:10 PM	Main Vac valve closed
9/28/2010	2:29:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/28/2010	2:30:02 PM	Recipe started at 2:29 PM
9/28/2010	2:30:02 PM	Helium valve closed
9/28/2010	2:30:02 PM	H2 valve closed
9/28/2010	2:30:02 PM	BCl3 valve closed
9/28/2010	2:30:02 PM	PH3 valve closed
9/28/2010	2:30:02 PM	SiCl4 pre valve closed
9/28/2010	2:30:02 PM	SiCl4 post valve closed
9/28/2010	2:30:02 PM	Main Vac valve closed
9/28/2010	2:30:02 PM	Bubbler valve closed
9/28/2010	2:30:02 PM	Bypass valve opened
9/28/2010	2:30:02 PM	Helium MFC set to  0.000000
9/28/2010	2:30:02 PM	H2 MFC set to  0.000000
9/28/2010	2:30:02 PM	BCl3 MFC set to  0.000000
9/28/2010	2:30:02 PM	PHl3 MFC set to  0.000000
9/28/2010	2:30:02 PM	SiCl4 MFC set to  0.000000
9/28/2010	2:30:02 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	2:30:02 PM	Tube furnace set to 0
9/28/2010	2:30:02 PM	Helium valve closed
9/28/2010	2:30:02 PM	H2 valve closed
9/28/2010	2:30:02 PM	BCl3 valve closed
9/28/2010	2:30:02 PM	PH3 valve closed
9/28/2010	2:30:02 PM	SiCl4 pre valve closed
9/28/2010	2:30:02 PM	SiCl4 post valve closed
9/28/2010	2:30:02 PM	Bubbler valve closed
9/28/2010	2:30:02 PM	Main Vac valve opened
9/28/2010	2:30:02 PM	Bypass valve opened
9/28/2010	2:30:02 PM	Helium MFC set to  0.000000
9/28/2010	2:30:02 PM	H2 MFC set to  0.000000
9/28/2010	2:30:02 PM	BCl3 MFC set to  0.000000
9/28/2010	2:30:02 PM	PHl3 MFC set to  0.000000
9/28/2010	2:30:02 PM	SiCl4 MFC set to  0.000000
9/28/2010	2:30:02 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	2:30:02 PM	Tube furnace set to 0
9/28/2010	2:31:02 PM	H2 valve closed
9/28/2010	2:31:02 PM	BCl3 valve closed
9/28/2010	2:31:02 PM	PH3 valve closed
9/28/2010	2:31:02 PM	SiCl4 pre valve closed
9/28/2010	2:31:02 PM	SiCl4 post valve closed
9/28/2010	2:31:02 PM	Bubbler valve closed
9/28/2010	2:31:02 PM	Helium valve opened
9/28/2010	2:31:02 PM	Main Vac valve opened
9/28/2010	2:31:02 PM	Bypass valve opened
9/28/2010	2:31:02 PM	Helium MFC set to  100.000000
9/28/2010	2:31:02 PM	H2 MFC set to  0.000000
9/28/2010	2:31:02 PM	BCl3 MFC set to  0.000000
9/28/2010	2:31:02 PM	PHl3 MFC set to  0.000000
9/28/2010	2:31:02 PM	SiCl4 MFC set to  0.000000
9/28/2010	2:31:02 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	2:31:03 PM	Tube furnace set to 0
9/28/2010	2:32:03 PM	Helium valve closed
9/28/2010	2:32:03 PM	H2 valve closed
9/28/2010	2:32:03 PM	BCl3 valve closed
9/28/2010	2:32:03 PM	PH3 valve closed
9/28/2010	2:32:03 PM	SiCl4 pre valve closed
9/28/2010	2:32:03 PM	SiCl4 post valve closed
9/28/2010	2:32:03 PM	Bubbler valve closed
9/28/2010	2:32:03 PM	Main Vac valve opened
9/28/2010	2:32:03 PM	Bypass valve opened
9/28/2010	2:32:03 PM	Helium MFC set to  0.000000
9/28/2010	2:32:03 PM	H2 MFC set to  0.000000
9/28/2010	2:32:03 PM	BCl3 MFC set to  0.000000
9/28/2010	2:32:03 PM	PHl3 MFC set to  0.000000
9/28/2010	2:32:03 PM	SiCl4 MFC set to  0.000000
9/28/2010	2:32:03 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	2:32:03 PM	Tube furnace set to 0
9/28/2010	2:33:03 PM	H2 valve closed
9/28/2010	2:33:03 PM	BCl3 valve closed
9/28/2010	2:33:03 PM	PH3 valve closed
9/28/2010	2:33:03 PM	SiCl4 pre valve closed
9/28/2010	2:33:03 PM	SiCl4 post valve closed
9/28/2010	2:33:03 PM	Bubbler valve closed
9/28/2010	2:33:03 PM	Helium valve opened
9/28/2010	2:33:03 PM	Main Vac valve opened
9/28/2010	2:33:03 PM	Bypass valve opened
9/28/2010	2:33:03 PM	Helium MFC set to  100.000000
9/28/2010	2:33:03 PM	H2 MFC set to  0.000000
9/28/2010	2:33:03 PM	BCl3 MFC set to  0.000000
9/28/2010	2:33:03 PM	PHl3 MFC set to  0.000000
9/28/2010	2:33:03 PM	SiCl4 MFC set to  0.000000
9/28/2010	2:33:03 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	2:33:03 PM	Tube furnace set to 0
9/28/2010	2:34:03 PM	Helium valve closed
9/28/2010	2:34:03 PM	H2 valve closed
9/28/2010	2:34:03 PM	BCl3 valve closed
9/28/2010	2:34:03 PM	PH3 valve closed
9/28/2010	2:34:03 PM	SiCl4 pre valve closed
9/28/2010	2:34:03 PM	SiCl4 post valve closed
9/28/2010	2:34:03 PM	Bubbler valve closed
9/28/2010	2:34:03 PM	Main Vac valve opened
9/28/2010	2:34:03 PM	Bypass valve opened
9/28/2010	2:34:03 PM	Helium MFC set to  0.000000
9/28/2010	2:34:03 PM	H2 MFC set to  0.000000
9/28/2010	2:34:03 PM	BCl3 MFC set to  0.000000
9/28/2010	2:34:03 PM	PHl3 MFC set to  0.000000
9/28/2010	2:34:03 PM	SiCl4 MFC set to  0.000000
9/28/2010	2:34:03 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	2:34:03 PM	Tube furnace set to 0
9/28/2010	2:35:03 PM	H2 valve closed
9/28/2010	2:35:03 PM	BCl3 valve closed
9/28/2010	2:35:03 PM	PH3 valve closed
9/28/2010	2:35:03 PM	SiCl4 pre valve closed
9/28/2010	2:35:03 PM	SiCl4 post valve closed
9/28/2010	2:35:03 PM	Bubbler valve closed
9/28/2010	2:35:03 PM	Helium valve opened
9/28/2010	2:35:03 PM	Main Vac valve opened
9/28/2010	2:35:03 PM	Bypass valve opened
9/28/2010	2:35:03 PM	Helium MFC set to  100.000000
9/28/2010	2:35:03 PM	H2 MFC set to  0.000000
9/28/2010	2:35:03 PM	BCl3 MFC set to  0.000000
9/28/2010	2:35:03 PM	PHl3 MFC set to  0.000000
9/28/2010	2:35:03 PM	SiCl4 MFC set to  0.000000
9/28/2010	2:35:03 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	2:35:03 PM	Tube furnace set to 0
9/28/2010	2:36:03 PM	Helium valve closed
9/28/2010	2:36:03 PM	H2 valve closed
9/28/2010	2:36:03 PM	BCl3 valve closed
9/28/2010	2:36:03 PM	PH3 valve closed
9/28/2010	2:36:03 PM	SiCl4 pre valve closed
9/28/2010	2:36:03 PM	SiCl4 post valve closed
9/28/2010	2:36:03 PM	Bubbler valve closed
9/28/2010	2:36:03 PM	Main Vac valve opened
9/28/2010	2:36:03 PM	Bypass valve opened
9/28/2010	2:36:03 PM	Helium MFC set to  0.000000
9/28/2010	2:36:03 PM	H2 MFC set to  0.000000
9/28/2010	2:36:03 PM	BCl3 MFC set to  0.000000
9/28/2010	2:36:03 PM	PHl3 MFC set to  0.000000
9/28/2010	2:36:03 PM	SiCl4 MFC set to  0.000000
9/28/2010	2:36:03 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	2:36:04 PM	Tube furnace set to 0
9/28/2010	2:37:04 PM	H2 valve closed
9/28/2010	2:37:04 PM	BCl3 valve closed
9/28/2010	2:37:04 PM	PH3 valve closed
9/28/2010	2:37:04 PM	SiCl4 pre valve closed
9/28/2010	2:37:04 PM	SiCl4 post valve closed
9/28/2010	2:37:04 PM	Bubbler valve closed
9/28/2010	2:37:04 PM	Helium valve opened
9/28/2010	2:37:04 PM	Main Vac valve opened
9/28/2010	2:37:04 PM	Bypass valve opened
9/28/2010	2:37:04 PM	Helium MFC set to  100.000000
9/28/2010	2:37:04 PM	H2 MFC set to  0.000000
9/28/2010	2:37:04 PM	BCl3 MFC set to  0.000000
9/28/2010	2:37:04 PM	PHl3 MFC set to  0.000000
9/28/2010	2:37:04 PM	SiCl4 MFC set to  0.000000
9/28/2010	2:37:04 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	2:37:04 PM	Tube furnace set to 0
9/28/2010	2:38:04 PM	Helium valve closed
9/28/2010	2:38:04 PM	H2 valve closed
9/28/2010	2:38:04 PM	BCl3 valve closed
9/28/2010	2:38:04 PM	PH3 valve closed
9/28/2010	2:38:04 PM	SiCl4 pre valve closed
9/28/2010	2:38:04 PM	SiCl4 post valve closed
9/28/2010	2:38:04 PM	Bubbler valve closed
9/28/2010	2:38:04 PM	Main Vac valve opened
9/28/2010	2:38:04 PM	Bypass valve opened
9/28/2010	2:38:04 PM	Helium MFC set to  0.000000
9/28/2010	2:38:04 PM	H2 MFC set to  0.000000
9/28/2010	2:38:04 PM	BCl3 MFC set to  0.000000
9/28/2010	2:38:04 PM	PHl3 MFC set to  0.000000
9/28/2010	2:38:04 PM	SiCl4 MFC set to  0.000000
9/28/2010	2:38:04 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	2:38:04 PM	Tube furnace set to 0
9/28/2010	2:39:04 PM	H2 valve closed
9/28/2010	2:39:04 PM	BCl3 valve closed
9/28/2010	2:39:04 PM	PH3 valve closed
9/28/2010	2:39:04 PM	SiCl4 pre valve closed
9/28/2010	2:39:04 PM	SiCl4 post valve closed
9/28/2010	2:39:04 PM	Bubbler valve closed
9/28/2010	2:39:04 PM	Helium valve opened
9/28/2010	2:39:04 PM	Main Vac valve opened
9/28/2010	2:39:04 PM	Bypass valve opened
9/28/2010	2:39:04 PM	Helium MFC set to  100.000000
9/28/2010	2:39:04 PM	H2 MFC set to  0.000000
9/28/2010	2:39:04 PM	BCl3 MFC set to  0.000000
9/28/2010	2:39:04 PM	PHl3 MFC set to  0.000000
9/28/2010	2:39:04 PM	SiCl4 MFC set to  0.000000
9/28/2010	2:39:04 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	2:39:04 PM	Tube furnace set to 0
9/28/2010	2:40:04 PM	Helium valve closed
9/28/2010	2:40:04 PM	H2 valve closed
9/28/2010	2:40:04 PM	BCl3 valve closed
9/28/2010	2:40:04 PM	PH3 valve closed
9/28/2010	2:40:04 PM	SiCl4 pre valve closed
9/28/2010	2:40:04 PM	SiCl4 post valve closed
9/28/2010	2:40:04 PM	Bubbler valve closed
9/28/2010	2:40:04 PM	Main Vac valve opened
9/28/2010	2:40:04 PM	Bypass valve opened
9/28/2010	2:40:04 PM	Helium MFC set to  0.000000
9/28/2010	2:40:04 PM	H2 MFC set to  0.000000
9/28/2010	2:40:04 PM	BCl3 MFC set to  0.000000
9/28/2010	2:40:04 PM	PHl3 MFC set to  0.000000
9/28/2010	2:40:04 PM	SiCl4 MFC set to  0.000000
9/28/2010	2:40:04 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	2:40:04 PM	Tube furnace set to 0
9/28/2010	2:41:04 PM	H2 valve closed
9/28/2010	2:41:04 PM	BCl3 valve closed
9/28/2010	2:41:04 PM	PH3 valve closed
9/28/2010	2:41:04 PM	SiCl4 pre valve closed
9/28/2010	2:41:04 PM	SiCl4 post valve closed
9/28/2010	2:41:04 PM	Bubbler valve closed
9/28/2010	2:41:04 PM	Helium valve opened
9/28/2010	2:41:04 PM	Main Vac valve opened
9/28/2010	2:41:04 PM	Bypass valve opened
9/28/2010	2:41:04 PM	Helium MFC set to  100.000000
9/28/2010	2:41:04 PM	H2 MFC set to  0.000000
9/28/2010	2:41:04 PM	BCl3 MFC set to  0.000000
9/28/2010	2:41:04 PM	PHl3 MFC set to  0.000000
9/28/2010	2:41:04 PM	SiCl4 MFC set to  0.000000
9/28/2010	2:41:04 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	2:41:05 PM	Tube furnace set to 0
9/28/2010	2:42:05 PM	Helium valve closed
9/28/2010	2:42:05 PM	H2 valve closed
9/28/2010	2:42:05 PM	BCl3 valve closed
9/28/2010	2:42:05 PM	PH3 valve closed
9/28/2010	2:42:05 PM	SiCl4 pre valve closed
9/28/2010	2:42:05 PM	SiCl4 post valve closed
9/28/2010	2:42:05 PM	Bubbler valve closed
9/28/2010	2:42:05 PM	Main Vac valve opened
9/28/2010	2:42:05 PM	Bypass valve opened
9/28/2010	2:42:05 PM	Helium MFC set to  0.000000
9/28/2010	2:42:05 PM	H2 MFC set to  0.000000
9/28/2010	2:42:05 PM	BCl3 MFC set to  0.000000
9/28/2010	2:42:05 PM	PHl3 MFC set to  0.000000
9/28/2010	2:42:05 PM	SiCl4 MFC set to  0.000000
9/28/2010	2:42:05 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	2:42:05 PM	Tube furnace set to 0
9/28/2010	2:43:05 PM	H2 valve closed
9/28/2010	2:43:05 PM	BCl3 valve closed
9/28/2010	2:43:05 PM	PH3 valve closed
9/28/2010	2:43:05 PM	SiCl4 pre valve closed
9/28/2010	2:43:05 PM	SiCl4 post valve closed
9/28/2010	2:43:05 PM	Bubbler valve closed
9/28/2010	2:43:05 PM	Helium valve opened
9/28/2010	2:43:05 PM	Main Vac valve opened
9/28/2010	2:43:05 PM	Bypass valve opened
9/28/2010	2:43:05 PM	Helium MFC set to  100.000000
9/28/2010	2:43:05 PM	H2 MFC set to  0.000000
9/28/2010	2:43:05 PM	BCl3 MFC set to  0.000000
9/28/2010	2:43:05 PM	PHl3 MFC set to  0.000000
9/28/2010	2:43:05 PM	SiCl4 MFC set to  0.000000
9/28/2010	2:43:05 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	2:43:05 PM	Tube furnace set to 0
9/28/2010	2:44:05 PM	Helium valve closed
9/28/2010	2:44:05 PM	H2 valve closed
9/28/2010	2:44:05 PM	BCl3 valve closed
9/28/2010	2:44:05 PM	PH3 valve closed
9/28/2010	2:44:05 PM	SiCl4 pre valve closed
9/28/2010	2:44:05 PM	SiCl4 post valve closed
9/28/2010	2:44:05 PM	Bubbler valve closed
9/28/2010	2:44:05 PM	Main Vac valve opened
9/28/2010	2:44:05 PM	Bypass valve opened
9/28/2010	2:44:05 PM	Helium MFC set to  0.000000
9/28/2010	2:44:05 PM	H2 MFC set to  0.000000
9/28/2010	2:44:05 PM	BCl3 MFC set to  0.000000
9/28/2010	2:44:05 PM	PHl3 MFC set to  0.000000
9/28/2010	2:44:05 PM	SiCl4 MFC set to  0.000000
9/28/2010	2:44:05 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	2:44:05 PM	Tube furnace set to 0
9/28/2010	2:45:05 PM	H2 valve closed
9/28/2010	2:45:05 PM	BCl3 valve closed
9/28/2010	2:45:05 PM	PH3 valve closed
9/28/2010	2:45:05 PM	SiCl4 pre valve closed
9/28/2010	2:45:05 PM	SiCl4 post valve closed
9/28/2010	2:45:05 PM	Bubbler valve closed
9/28/2010	2:45:05 PM	Helium valve opened
9/28/2010	2:45:05 PM	Main Vac valve opened
9/28/2010	2:45:05 PM	Bypass valve opened
9/28/2010	2:45:05 PM	Helium MFC set to  100.000000
9/28/2010	2:45:05 PM	H2 MFC set to  0.000000
9/28/2010	2:45:05 PM	BCl3 MFC set to  0.000000
9/28/2010	2:45:05 PM	PHl3 MFC set to  0.000000
9/28/2010	2:45:05 PM	SiCl4 MFC set to  0.000000
9/28/2010	2:45:05 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	2:45:05 PM	Tube furnace set to 0
9/28/2010	2:46:05 PM	Helium valve closed
9/28/2010	2:46:05 PM	H2 valve closed
9/28/2010	2:46:05 PM	BCl3 valve closed
9/28/2010	2:46:05 PM	PH3 valve closed
9/28/2010	2:46:05 PM	SiCl4 pre valve closed
9/28/2010	2:46:05 PM	SiCl4 post valve closed
9/28/2010	2:46:05 PM	Bubbler valve closed
9/28/2010	2:46:05 PM	Main Vac valve opened
9/28/2010	2:46:05 PM	Bypass valve opened
9/28/2010	2:46:05 PM	Helium MFC set to  0.000000
9/28/2010	2:46:05 PM	H2 MFC set to  0.000000
9/28/2010	2:46:05 PM	BCl3 MFC set to  0.000000
9/28/2010	2:46:05 PM	PHl3 MFC set to  0.000000
9/28/2010	2:46:05 PM	SiCl4 MFC set to  0.000000
9/28/2010	2:46:05 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	2:46:06 PM	Tube furnace set to 0
9/28/2010	2:47:06 PM	H2 valve closed
9/28/2010	2:47:06 PM	BCl3 valve closed
9/28/2010	2:47:06 PM	PH3 valve closed
9/28/2010	2:47:06 PM	SiCl4 pre valve closed
9/28/2010	2:47:06 PM	SiCl4 post valve closed
9/28/2010	2:47:06 PM	Bubbler valve closed
9/28/2010	2:47:06 PM	Helium valve opened
9/28/2010	2:47:06 PM	Main Vac valve opened
9/28/2010	2:47:06 PM	Bypass valve opened
9/28/2010	2:47:06 PM	Helium MFC set to  100.000000
9/28/2010	2:47:06 PM	H2 MFC set to  0.000000
9/28/2010	2:47:06 PM	BCl3 MFC set to  0.000000
9/28/2010	2:47:06 PM	PHl3 MFC set to  0.000000
9/28/2010	2:47:06 PM	SiCl4 MFC set to  0.000000
9/28/2010	2:47:06 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	2:47:06 PM	Tube furnace set to 0
9/28/2010	2:48:06 PM	Helium valve closed
9/28/2010	2:48:06 PM	H2 valve closed
9/28/2010	2:48:06 PM	BCl3 valve closed
9/28/2010	2:48:06 PM	PH3 valve closed
9/28/2010	2:48:06 PM	SiCl4 pre valve closed
9/28/2010	2:48:06 PM	SiCl4 post valve closed
9/28/2010	2:48:06 PM	Bubbler valve closed
9/28/2010	2:48:06 PM	Main Vac valve opened
9/28/2010	2:48:06 PM	Bypass valve opened
9/28/2010	2:48:06 PM	Helium MFC set to  0.000000
9/28/2010	2:48:06 PM	H2 MFC set to  0.000000
9/28/2010	2:48:06 PM	BCl3 MFC set to  0.000000
9/28/2010	2:48:06 PM	PHl3 MFC set to  0.000000
9/28/2010	2:48:06 PM	SiCl4 MFC set to  0.000000
9/28/2010	2:48:06 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	2:48:06 PM	Tube furnace set to 0
9/28/2010	2:49:06 PM	H2 valve closed
9/28/2010	2:49:06 PM	BCl3 valve closed
9/28/2010	2:49:06 PM	PH3 valve closed
9/28/2010	2:49:06 PM	SiCl4 pre valve closed
9/28/2010	2:49:06 PM	SiCl4 post valve closed
9/28/2010	2:49:06 PM	Bubbler valve closed
9/28/2010	2:49:06 PM	Helium valve opened
9/28/2010	2:49:06 PM	Main Vac valve opened
9/28/2010	2:49:06 PM	Bypass valve opened
9/28/2010	2:49:06 PM	Helium MFC set to  100.000000
9/28/2010	2:49:06 PM	H2 MFC set to  0.000000
9/28/2010	2:49:06 PM	BCl3 MFC set to  0.000000
9/28/2010	2:49:06 PM	PHl3 MFC set to  0.000000
9/28/2010	2:49:06 PM	SiCl4 MFC set to  0.000000
9/28/2010	2:49:06 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	2:49:06 PM	Tube furnace set to 0
9/28/2010	2:50:06 PM	Helium valve closed
9/28/2010	2:50:06 PM	H2 valve closed
9/28/2010	2:50:06 PM	BCl3 valve closed
9/28/2010	2:50:06 PM	PH3 valve closed
9/28/2010	2:50:06 PM	SiCl4 pre valve closed
9/28/2010	2:50:06 PM	SiCl4 post valve closed
9/28/2010	2:50:06 PM	Bubbler valve closed
9/28/2010	2:50:06 PM	Main Vac valve opened
9/28/2010	2:50:06 PM	Bypass valve opened
9/28/2010	2:50:06 PM	Helium MFC set to  0.000000
9/28/2010	2:50:06 PM	H2 MFC set to  0.000000
9/28/2010	2:50:06 PM	BCl3 MFC set to  0.000000
9/28/2010	2:50:06 PM	PHl3 MFC set to  0.000000
9/28/2010	2:50:06 PM	SiCl4 MFC set to  0.000000
9/28/2010	2:50:06 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	2:50:06 PM	Tube furnace set to 0
9/28/2010	2:50:07 PM	Run finished at 2:50 PM
9/28/2010	2:50:07 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/28/2010	2:57:51 PM	Recipe started at 2:57 PM
9/28/2010	2:57:51 PM	Helium valve closed
9/28/2010	2:57:51 PM	BCl3 valve closed
9/28/2010	2:57:51 PM	PH3 valve closed
9/28/2010	2:57:51 PM	SiCl4 pre valve closed
9/28/2010	2:57:51 PM	SiCl4 post valve closed
9/28/2010	2:57:51 PM	Main Vac valve closed
9/28/2010	2:57:51 PM	Bypass valve closed
9/28/2010	2:57:51 PM	Bubbler valve closed
9/28/2010	2:57:51 PM	H2 valve opened
9/28/2010	2:57:51 PM	Helium MFC set to  0.000000
9/28/2010	2:57:51 PM	H2 MFC set to  500.000000
9/28/2010	2:57:51 PM	BCl3 MFC set to  0.000000
9/28/2010	2:57:51 PM	PHl3 MFC set to  0.000000
9/28/2010	2:57:51 PM	SiCl4 MFC set to  0.000000
9/28/2010	2:57:51 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	2:57:51 PM	Tube furnace set to 0
9/28/2010	2:59:14 PM	Helium valve closed
9/28/2010	2:59:14 PM	BCl3 valve closed
9/28/2010	2:59:14 PM	PH3 valve closed
9/28/2010	2:59:14 PM	SiCl4 pre valve closed
9/28/2010	2:59:14 PM	SiCl4 post valve closed
9/28/2010	2:59:14 PM	Main Vac valve closed
9/28/2010	2:59:14 PM	Bypass valve closed
9/28/2010	2:59:14 PM	H2 valve opened
9/28/2010	2:59:14 PM	Bubbler valve opened
9/28/2010	2:59:14 PM	Helium MFC set to  0.000000
9/28/2010	2:59:14 PM	H2 MFC set to  500.000000
9/28/2010	2:59:14 PM	BCl3 MFC set to  0.000000
9/28/2010	2:59:14 PM	PHl3 MFC set to  0.000000
9/28/2010	2:59:14 PM	SiCl4 MFC set to  0.000000
9/28/2010	2:59:14 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	2:59:14 PM	Tube furnace set to 1000
9/28/2010	3:19:14 PM	Helium valve closed
9/28/2010	3:19:14 PM	BCl3 valve closed
9/28/2010	3:19:14 PM	PH3 valve closed
9/28/2010	3:19:14 PM	Main Vac valve closed
9/28/2010	3:19:14 PM	Bypass valve closed
9/28/2010	3:19:14 PM	H2 valve opened
9/28/2010	3:19:14 PM	SiCl4 pre valve opened
9/28/2010	3:19:14 PM	SiCl4 post valve opened
9/28/2010	3:19:14 PM	Bubbler valve opened
9/28/2010	3:19:14 PM	Helium MFC set to  0.000000
9/28/2010	3:19:14 PM	H2 MFC set to  500.000000
9/28/2010	3:19:14 PM	BCl3 MFC set to  0.000000
9/28/2010	3:19:14 PM	PHl3 MFC set to  0.000000
9/28/2010	3:19:14 PM	SiCl4 MFC set to  50.000000
9/28/2010	3:19:14 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	3:19:14 PM	Tube furnace set to 1000
9/28/2010	3:39:14 PM	H2 valve closed
9/28/2010	3:39:14 PM	BCl3 valve closed
9/28/2010	3:39:14 PM	PH3 valve closed
9/28/2010	3:39:14 PM	SiCl4 pre valve closed
9/28/2010	3:39:14 PM	SiCl4 post valve closed
9/28/2010	3:39:14 PM	Main Vac valve closed
9/28/2010	3:39:14 PM	Bypass valve closed
9/28/2010	3:39:14 PM	Helium valve opened
9/28/2010	3:39:14 PM	Bubbler valve opened
9/28/2010	3:39:14 PM	Helium MFC set to  500.000000
9/28/2010	3:39:14 PM	H2 MFC set to  0.000000
9/28/2010	3:39:14 PM	BCl3 MFC set to  0.000000
9/28/2010	3:39:14 PM	PHl3 MFC set to  0.000000
9/28/2010	3:39:14 PM	SiCl4 MFC set to  0.000000
9/28/2010	3:39:14 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	3:39:14 PM	Tube furnace set to 0
9/28/2010	3:59:14 PM	Helium valve closed
9/28/2010	3:59:14 PM	H2 valve closed
9/28/2010	3:59:14 PM	BCl3 valve closed
9/28/2010	3:59:14 PM	PH3 valve closed
9/28/2010	3:59:14 PM	SiCl4 pre valve closed
9/28/2010	3:59:14 PM	SiCl4 post valve closed
9/28/2010	3:59:14 PM	Main Vac valve closed
9/28/2010	3:59:14 PM	Bypass valve closed
9/28/2010	3:59:14 PM	Bubbler valve closed
9/28/2010	3:59:14 PM	Helium MFC set to  0.000000
9/28/2010	3:59:14 PM	H2 MFC set to  0.000000
9/28/2010	3:59:14 PM	BCl3 MFC set to  0.000000
9/28/2010	3:59:14 PM	PHl3 MFC set to  0.000000
9/28/2010	3:59:14 PM	SiCl4 MFC set to  0.000000
9/28/2010	3:59:14 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	3:59:14 PM	Tube furnace set to 0
9/28/2010	3:59:15 PM	Run finished at 3:59 PM
9/28/2010	4:15:04 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/28/2010	4:15:04 PM	Recipe started at 4:15 PM
9/28/2010	4:15:04 PM	H2 valve closed
9/28/2010	4:15:04 PM	BCl3 valve closed
9/28/2010	4:15:04 PM	PH3 valve closed
9/28/2010	4:15:04 PM	SiCl4 pre valve closed
9/28/2010	4:15:04 PM	SiCl4 post valve closed
9/28/2010	4:15:04 PM	Main Vac valve closed
9/28/2010	4:15:04 PM	Bypass valve closed
9/28/2010	4:15:04 PM	Bubbler valve closed
9/28/2010	4:15:04 PM	Helium valve opened
9/28/2010	4:15:04 PM	Helium MFC set to  500.000000
9/28/2010	4:15:04 PM	H2 MFC set to  0.000000
9/28/2010	4:15:04 PM	BCl3 MFC set to  0.000000
9/28/2010	4:15:04 PM	PHl3 MFC set to  0.000000
9/28/2010	4:15:04 PM	SiCl4 MFC set to  0.000000
9/28/2010	4:15:04 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	4:15:05 PM	Tube furnace set to 0
9/28/2010	4:15:11 PM	Helium valve closed
9/28/2010	4:15:11 PM	H2 valve closed
9/28/2010	4:15:11 PM	BCl3 valve closed
9/28/2010	4:15:11 PM	PH3 valve closed
9/28/2010	4:15:11 PM	SiCl4 pre valve closed
9/28/2010	4:15:11 PM	SiCl4 post valve closed
9/28/2010	4:15:11 PM	Main Vac valve closed
9/28/2010	4:15:11 PM	Bypass valve closed
9/28/2010	4:15:11 PM	Bubbler valve closed
9/28/2010	4:15:11 PM	Helium MFC set to  0.000000
9/28/2010	4:15:11 PM	H2 MFC set to  0.000000
9/28/2010	4:15:11 PM	BCl3 MFC set to  0.000000
9/28/2010	4:15:11 PM	PHl3 MFC set to  0.000000
9/28/2010	4:15:11 PM	SiCl4 MFC set to  0.000000
9/28/2010	4:15:11 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	4:15:11 PM	Tube furnace set to 0
9/28/2010	4:15:11 PM	Run finished at 4:15 PM
9/28/2010	4:15:11 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/28/2010	4:19:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/28/2010	4:19:51 PM	Recipe started at 4:19 PM
9/28/2010	4:19:51 PM	Helium valve closed
9/28/2010	4:19:51 PM	H2 valve closed
9/28/2010	4:19:51 PM	BCl3 valve closed
9/28/2010	4:19:51 PM	PH3 valve closed
9/28/2010	4:19:51 PM	SiCl4 pre valve closed
9/28/2010	4:19:51 PM	SiCl4 post valve closed
9/28/2010	4:19:51 PM	Main Vac valve closed
9/28/2010	4:19:51 PM	Bubbler valve closed
9/28/2010	4:19:51 PM	Bypass valve opened
9/28/2010	4:19:51 PM	Helium MFC set to  0.000000
9/28/2010	4:19:51 PM	H2 MFC set to  0.000000
9/28/2010	4:19:51 PM	BCl3 MFC set to  0.000000
9/28/2010	4:19:51 PM	PHl3 MFC set to  0.000000
9/28/2010	4:19:51 PM	SiCl4 MFC set to  0.000000
9/28/2010	4:19:51 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	4:19:51 PM	Tube furnace set to 0
9/28/2010	4:20:33 PM	Helium valve closed
9/28/2010	4:20:33 PM	H2 valve closed
9/28/2010	4:20:33 PM	BCl3 valve closed
9/28/2010	4:20:33 PM	PH3 valve closed
9/28/2010	4:20:33 PM	SiCl4 pre valve closed
9/28/2010	4:20:33 PM	SiCl4 post valve closed
9/28/2010	4:20:33 PM	Bubbler valve closed
9/28/2010	4:20:33 PM	Main Vac valve opened
9/28/2010	4:20:33 PM	Bypass valve opened
9/28/2010	4:20:33 PM	Helium MFC set to  0.000000
9/28/2010	4:20:33 PM	H2 MFC set to  0.000000
9/28/2010	4:20:33 PM	BCl3 MFC set to  0.000000
9/28/2010	4:20:33 PM	PHl3 MFC set to  0.000000
9/28/2010	4:20:33 PM	SiCl4 MFC set to  0.000000
9/28/2010	4:20:33 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	4:20:33 PM	Tube furnace set to 0
9/28/2010	4:20:33 PM	Run finished at 4:20 PM
9/28/2010	4:20:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/28/2010	4:21:33 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/28/2010	4:21:45 PM	Recipe started at 4:21 PM
9/28/2010	4:21:45 PM	Helium valve closed
9/28/2010	4:21:45 PM	H2 valve closed
9/28/2010	4:21:45 PM	BCl3 valve closed
9/28/2010	4:21:45 PM	PH3 valve closed
9/28/2010	4:21:45 PM	SiCl4 pre valve closed
9/28/2010	4:21:45 PM	SiCl4 post valve closed
9/28/2010	4:21:45 PM	Main Vac valve closed
9/28/2010	4:21:45 PM	Bubbler valve closed
9/28/2010	4:21:45 PM	Bypass valve opened
9/28/2010	4:21:45 PM	Helium MFC set to  0.000000
9/28/2010	4:21:45 PM	H2 MFC set to  0.000000
9/28/2010	4:21:45 PM	BCl3 MFC set to  0.000000
9/28/2010	4:21:45 PM	PHl3 MFC set to  0.000000
9/28/2010	4:21:45 PM	SiCl4 MFC set to  0.000000
9/28/2010	4:21:45 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	4:21:45 PM	Tube furnace set to 0
9/28/2010	4:21:46 PM	Helium valve closed
9/28/2010	4:21:46 PM	H2 valve closed
9/28/2010	4:21:46 PM	BCl3 valve closed
9/28/2010	4:21:46 PM	PH3 valve closed
9/28/2010	4:21:46 PM	SiCl4 pre valve closed
9/28/2010	4:21:46 PM	SiCl4 post valve closed
9/28/2010	4:21:46 PM	Bubbler valve closed
9/28/2010	4:21:46 PM	Main Vac valve opened
9/28/2010	4:21:46 PM	Bypass valve opened
9/28/2010	4:21:46 PM	Helium MFC set to  0.000000
9/28/2010	4:21:46 PM	H2 MFC set to  0.000000
9/28/2010	4:21:46 PM	BCl3 MFC set to  0.000000
9/28/2010	4:21:46 PM	PHl3 MFC set to  0.000000
9/28/2010	4:21:46 PM	SiCl4 MFC set to  0.000000
9/28/2010	4:21:46 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	4:21:46 PM	Tube furnace set to 0
9/28/2010	4:22:46 PM	H2 valve closed
9/28/2010	4:22:46 PM	BCl3 valve closed
9/28/2010	4:22:46 PM	PH3 valve closed
9/28/2010	4:22:46 PM	SiCl4 pre valve closed
9/28/2010	4:22:46 PM	SiCl4 post valve closed
9/28/2010	4:22:46 PM	Bubbler valve closed
9/28/2010	4:22:46 PM	Helium valve opened
9/28/2010	4:22:46 PM	Main Vac valve opened
9/28/2010	4:22:46 PM	Bypass valve opened
9/28/2010	4:22:46 PM	Helium MFC set to  100.000000
9/28/2010	4:22:46 PM	H2 MFC set to  0.000000
9/28/2010	4:22:46 PM	BCl3 MFC set to  0.000000
9/28/2010	4:22:46 PM	PHl3 MFC set to  0.000000
9/28/2010	4:22:46 PM	SiCl4 MFC set to  0.000000
9/28/2010	4:22:46 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	4:22:46 PM	Tube furnace set to 0
9/28/2010	4:23:46 PM	Helium valve closed
9/28/2010	4:23:46 PM	H2 valve closed
9/28/2010	4:23:46 PM	BCl3 valve closed
9/28/2010	4:23:46 PM	PH3 valve closed
9/28/2010	4:23:46 PM	SiCl4 pre valve closed
9/28/2010	4:23:46 PM	SiCl4 post valve closed
9/28/2010	4:23:46 PM	Bubbler valve closed
9/28/2010	4:23:46 PM	Main Vac valve opened
9/28/2010	4:23:46 PM	Bypass valve opened
9/28/2010	4:23:46 PM	Helium MFC set to  0.000000
9/28/2010	4:23:46 PM	H2 MFC set to  0.000000
9/28/2010	4:23:46 PM	BCl3 MFC set to  0.000000
9/28/2010	4:23:46 PM	PHl3 MFC set to  0.000000
9/28/2010	4:23:46 PM	SiCl4 MFC set to  0.000000
9/28/2010	4:23:46 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	4:23:46 PM	Tube furnace set to 0
9/28/2010	4:24:46 PM	H2 valve closed
9/28/2010	4:24:46 PM	BCl3 valve closed
9/28/2010	4:24:46 PM	PH3 valve closed
9/28/2010	4:24:46 PM	SiCl4 pre valve closed
9/28/2010	4:24:46 PM	SiCl4 post valve closed
9/28/2010	4:24:46 PM	Bubbler valve closed
9/28/2010	4:24:46 PM	Helium valve opened
9/28/2010	4:24:46 PM	Main Vac valve opened
9/28/2010	4:24:46 PM	Bypass valve opened
9/28/2010	4:24:46 PM	Helium MFC set to  100.000000
9/28/2010	4:24:46 PM	H2 MFC set to  0.000000
9/28/2010	4:24:46 PM	BCl3 MFC set to  0.000000
9/28/2010	4:24:46 PM	PHl3 MFC set to  0.000000
9/28/2010	4:24:46 PM	SiCl4 MFC set to  0.000000
9/28/2010	4:24:46 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	4:24:46 PM	Tube furnace set to 0
9/28/2010	4:25:46 PM	Helium valve closed
9/28/2010	4:25:46 PM	H2 valve closed
9/28/2010	4:25:46 PM	BCl3 valve closed
9/28/2010	4:25:46 PM	PH3 valve closed
9/28/2010	4:25:46 PM	SiCl4 pre valve closed
9/28/2010	4:25:46 PM	SiCl4 post valve closed
9/28/2010	4:25:46 PM	Bubbler valve closed
9/28/2010	4:25:46 PM	Main Vac valve opened
9/28/2010	4:25:46 PM	Bypass valve opened
9/28/2010	4:25:46 PM	Helium MFC set to  0.000000
9/28/2010	4:25:46 PM	H2 MFC set to  0.000000
9/28/2010	4:25:46 PM	BCl3 MFC set to  0.000000
9/28/2010	4:25:46 PM	PHl3 MFC set to  0.000000
9/28/2010	4:25:46 PM	SiCl4 MFC set to  0.000000
9/28/2010	4:25:46 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	4:25:47 PM	Tube furnace set to 0
9/28/2010	4:26:47 PM	H2 valve closed
9/28/2010	4:26:47 PM	BCl3 valve closed
9/28/2010	4:26:47 PM	PH3 valve closed
9/28/2010	4:26:47 PM	SiCl4 pre valve closed
9/28/2010	4:26:47 PM	SiCl4 post valve closed
9/28/2010	4:26:47 PM	Bubbler valve closed
9/28/2010	4:26:47 PM	Helium valve opened
9/28/2010	4:26:47 PM	Main Vac valve opened
9/28/2010	4:26:47 PM	Bypass valve opened
9/28/2010	4:26:47 PM	Helium MFC set to  100.000000
9/28/2010	4:26:47 PM	H2 MFC set to  0.000000
9/28/2010	4:26:47 PM	BCl3 MFC set to  0.000000
9/28/2010	4:26:47 PM	PHl3 MFC set to  0.000000
9/28/2010	4:26:47 PM	SiCl4 MFC set to  0.000000
9/28/2010	4:26:47 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	4:26:47 PM	Tube furnace set to 0
9/28/2010	4:27:47 PM	Helium valve closed
9/28/2010	4:27:47 PM	H2 valve closed
9/28/2010	4:27:47 PM	BCl3 valve closed
9/28/2010	4:27:47 PM	PH3 valve closed
9/28/2010	4:27:47 PM	SiCl4 pre valve closed
9/28/2010	4:27:47 PM	SiCl4 post valve closed
9/28/2010	4:27:47 PM	Bubbler valve closed
9/28/2010	4:27:47 PM	Main Vac valve opened
9/28/2010	4:27:47 PM	Bypass valve opened
9/28/2010	4:27:47 PM	Helium MFC set to  0.000000
9/28/2010	4:27:47 PM	H2 MFC set to  0.000000
9/28/2010	4:27:47 PM	BCl3 MFC set to  0.000000
9/28/2010	4:27:47 PM	PHl3 MFC set to  0.000000
9/28/2010	4:27:47 PM	SiCl4 MFC set to  0.000000
9/28/2010	4:27:47 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	4:27:47 PM	Tube furnace set to 0
9/28/2010	4:28:47 PM	H2 valve closed
9/28/2010	4:28:47 PM	BCl3 valve closed
9/28/2010	4:28:47 PM	PH3 valve closed
9/28/2010	4:28:47 PM	SiCl4 pre valve closed
9/28/2010	4:28:47 PM	SiCl4 post valve closed
9/28/2010	4:28:47 PM	Bubbler valve closed
9/28/2010	4:28:47 PM	Helium valve opened
9/28/2010	4:28:47 PM	Main Vac valve opened
9/28/2010	4:28:47 PM	Bypass valve opened
9/28/2010	4:28:47 PM	Helium MFC set to  100.000000
9/28/2010	4:28:47 PM	H2 MFC set to  0.000000
9/28/2010	4:28:47 PM	BCl3 MFC set to  0.000000
9/28/2010	4:28:47 PM	PHl3 MFC set to  0.000000
9/28/2010	4:28:47 PM	SiCl4 MFC set to  0.000000
9/28/2010	4:28:47 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	4:28:47 PM	Tube furnace set to 0
9/28/2010	4:29:47 PM	Helium valve closed
9/28/2010	4:29:47 PM	H2 valve closed
9/28/2010	4:29:47 PM	BCl3 valve closed
9/28/2010	4:29:47 PM	PH3 valve closed
9/28/2010	4:29:47 PM	SiCl4 pre valve closed
9/28/2010	4:29:47 PM	SiCl4 post valve closed
9/28/2010	4:29:47 PM	Bubbler valve closed
9/28/2010	4:29:47 PM	Main Vac valve opened
9/28/2010	4:29:47 PM	Bypass valve opened
9/28/2010	4:29:47 PM	Helium MFC set to  0.000000
9/28/2010	4:29:47 PM	H2 MFC set to  0.000000
9/28/2010	4:29:47 PM	BCl3 MFC set to  0.000000
9/28/2010	4:29:47 PM	PHl3 MFC set to  0.000000
9/28/2010	4:29:47 PM	SiCl4 MFC set to  0.000000
9/28/2010	4:29:47 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	4:29:47 PM	Tube furnace set to 0
9/28/2010	4:30:47 PM	H2 valve closed
9/28/2010	4:30:47 PM	BCl3 valve closed
9/28/2010	4:30:47 PM	PH3 valve closed
9/28/2010	4:30:47 PM	SiCl4 pre valve closed
9/28/2010	4:30:47 PM	SiCl4 post valve closed
9/28/2010	4:30:47 PM	Bubbler valve closed
9/28/2010	4:30:47 PM	Helium valve opened
9/28/2010	4:30:47 PM	Main Vac valve opened
9/28/2010	4:30:47 PM	Bypass valve opened
9/28/2010	4:30:47 PM	Helium MFC set to  100.000000
9/28/2010	4:30:47 PM	H2 MFC set to  0.000000
9/28/2010	4:30:47 PM	BCl3 MFC set to  0.000000
9/28/2010	4:30:47 PM	PHl3 MFC set to  0.000000
9/28/2010	4:30:47 PM	SiCl4 MFC set to  0.000000
9/28/2010	4:30:47 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	4:30:48 PM	Tube furnace set to 0
9/28/2010	4:31:48 PM	Helium valve closed
9/28/2010	4:31:48 PM	H2 valve closed
9/28/2010	4:31:48 PM	BCl3 valve closed
9/28/2010	4:31:48 PM	PH3 valve closed
9/28/2010	4:31:48 PM	SiCl4 pre valve closed
9/28/2010	4:31:48 PM	SiCl4 post valve closed
9/28/2010	4:31:48 PM	Bubbler valve closed
9/28/2010	4:31:48 PM	Main Vac valve opened
9/28/2010	4:31:48 PM	Bypass valve opened
9/28/2010	4:31:48 PM	Helium MFC set to  0.000000
9/28/2010	4:31:48 PM	H2 MFC set to  0.000000
9/28/2010	4:31:48 PM	BCl3 MFC set to  0.000000
9/28/2010	4:31:48 PM	PHl3 MFC set to  0.000000
9/28/2010	4:31:48 PM	SiCl4 MFC set to  0.000000
9/28/2010	4:31:48 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	4:31:48 PM	Tube furnace set to 0
9/28/2010	4:32:48 PM	H2 valve closed
9/28/2010	4:32:48 PM	BCl3 valve closed
9/28/2010	4:32:48 PM	PH3 valve closed
9/28/2010	4:32:48 PM	SiCl4 pre valve closed
9/28/2010	4:32:48 PM	SiCl4 post valve closed
9/28/2010	4:32:48 PM	Bubbler valve closed
9/28/2010	4:32:48 PM	Helium valve opened
9/28/2010	4:32:48 PM	Main Vac valve opened
9/28/2010	4:32:48 PM	Bypass valve opened
9/28/2010	4:32:48 PM	Helium MFC set to  100.000000
9/28/2010	4:32:48 PM	H2 MFC set to  0.000000
9/28/2010	4:32:48 PM	BCl3 MFC set to  0.000000
9/28/2010	4:32:48 PM	PHl3 MFC set to  0.000000
9/28/2010	4:32:48 PM	SiCl4 MFC set to  0.000000
9/28/2010	4:32:48 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	4:32:48 PM	Tube furnace set to 0
9/28/2010	4:33:48 PM	Helium valve closed
9/28/2010	4:33:48 PM	H2 valve closed
9/28/2010	4:33:48 PM	BCl3 valve closed
9/28/2010	4:33:48 PM	PH3 valve closed
9/28/2010	4:33:48 PM	SiCl4 pre valve closed
9/28/2010	4:33:48 PM	SiCl4 post valve closed
9/28/2010	4:33:48 PM	Bubbler valve closed
9/28/2010	4:33:48 PM	Main Vac valve opened
9/28/2010	4:33:48 PM	Bypass valve opened
9/28/2010	4:33:48 PM	Helium MFC set to  0.000000
9/28/2010	4:33:48 PM	H2 MFC set to  0.000000
9/28/2010	4:33:48 PM	BCl3 MFC set to  0.000000
9/28/2010	4:33:48 PM	PHl3 MFC set to  0.000000
9/28/2010	4:33:48 PM	SiCl4 MFC set to  0.000000
9/28/2010	4:33:48 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	4:33:48 PM	Tube furnace set to 0
9/28/2010	4:34:48 PM	H2 valve closed
9/28/2010	4:34:48 PM	BCl3 valve closed
9/28/2010	4:34:48 PM	PH3 valve closed
9/28/2010	4:34:48 PM	SiCl4 pre valve closed
9/28/2010	4:34:48 PM	SiCl4 post valve closed
9/28/2010	4:34:48 PM	Bubbler valve closed
9/28/2010	4:34:48 PM	Helium valve opened
9/28/2010	4:34:48 PM	Main Vac valve opened
9/28/2010	4:34:48 PM	Bypass valve opened
9/28/2010	4:34:48 PM	Helium MFC set to  100.000000
9/28/2010	4:34:48 PM	H2 MFC set to  0.000000
9/28/2010	4:34:48 PM	BCl3 MFC set to  0.000000
9/28/2010	4:34:48 PM	PHl3 MFC set to  0.000000
9/28/2010	4:34:48 PM	SiCl4 MFC set to  0.000000
9/28/2010	4:34:48 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	4:34:48 PM	Tube furnace set to 0
9/28/2010	4:35:48 PM	Helium valve closed
9/28/2010	4:35:48 PM	H2 valve closed
9/28/2010	4:35:48 PM	BCl3 valve closed
9/28/2010	4:35:48 PM	PH3 valve closed
9/28/2010	4:35:48 PM	SiCl4 pre valve closed
9/28/2010	4:35:48 PM	SiCl4 post valve closed
9/28/2010	4:35:48 PM	Bubbler valve closed
9/28/2010	4:35:48 PM	Main Vac valve opened
9/28/2010	4:35:48 PM	Bypass valve opened
9/28/2010	4:35:48 PM	Helium MFC set to  0.000000
9/28/2010	4:35:48 PM	H2 MFC set to  0.000000
9/28/2010	4:35:48 PM	BCl3 MFC set to  0.000000
9/28/2010	4:35:48 PM	PHl3 MFC set to  0.000000
9/28/2010	4:35:48 PM	SiCl4 MFC set to  0.000000
9/28/2010	4:35:48 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	4:35:49 PM	Tube furnace set to 0
9/28/2010	4:36:49 PM	H2 valve closed
9/28/2010	4:36:49 PM	BCl3 valve closed
9/28/2010	4:36:49 PM	PH3 valve closed
9/28/2010	4:36:49 PM	SiCl4 pre valve closed
9/28/2010	4:36:49 PM	SiCl4 post valve closed
9/28/2010	4:36:49 PM	Bubbler valve closed
9/28/2010	4:36:49 PM	Helium valve opened
9/28/2010	4:36:49 PM	Main Vac valve opened
9/28/2010	4:36:49 PM	Bypass valve opened
9/28/2010	4:36:49 PM	Helium MFC set to  100.000000
9/28/2010	4:36:49 PM	H2 MFC set to  0.000000
9/28/2010	4:36:49 PM	BCl3 MFC set to  0.000000
9/28/2010	4:36:49 PM	PHl3 MFC set to  0.000000
9/28/2010	4:36:49 PM	SiCl4 MFC set to  0.000000
9/28/2010	4:36:49 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	4:36:49 PM	Tube furnace set to 0
9/28/2010	4:37:49 PM	Helium valve closed
9/28/2010	4:37:49 PM	H2 valve closed
9/28/2010	4:37:49 PM	BCl3 valve closed
9/28/2010	4:37:49 PM	PH3 valve closed
9/28/2010	4:37:49 PM	SiCl4 pre valve closed
9/28/2010	4:37:49 PM	SiCl4 post valve closed
9/28/2010	4:37:49 PM	Bubbler valve closed
9/28/2010	4:37:49 PM	Main Vac valve opened
9/28/2010	4:37:49 PM	Bypass valve opened
9/28/2010	4:37:49 PM	Helium MFC set to  0.000000
9/28/2010	4:37:49 PM	H2 MFC set to  0.000000
9/28/2010	4:37:49 PM	BCl3 MFC set to  0.000000
9/28/2010	4:37:49 PM	PHl3 MFC set to  0.000000
9/28/2010	4:37:49 PM	SiCl4 MFC set to  0.000000
9/28/2010	4:37:49 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	4:37:49 PM	Tube furnace set to 0
9/28/2010	4:38:49 PM	H2 valve closed
9/28/2010	4:38:49 PM	BCl3 valve closed
9/28/2010	4:38:49 PM	PH3 valve closed
9/28/2010	4:38:49 PM	SiCl4 pre valve closed
9/28/2010	4:38:49 PM	SiCl4 post valve closed
9/28/2010	4:38:49 PM	Bubbler valve closed
9/28/2010	4:38:49 PM	Helium valve opened
9/28/2010	4:38:49 PM	Main Vac valve opened
9/28/2010	4:38:49 PM	Bypass valve opened
9/28/2010	4:38:49 PM	Helium MFC set to  100.000000
9/28/2010	4:38:49 PM	H2 MFC set to  0.000000
9/28/2010	4:38:49 PM	BCl3 MFC set to  0.000000
9/28/2010	4:38:49 PM	PHl3 MFC set to  0.000000
9/28/2010	4:38:49 PM	SiCl4 MFC set to  0.000000
9/28/2010	4:38:49 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	4:38:49 PM	Tube furnace set to 0
9/28/2010	4:39:49 PM	Helium valve closed
9/28/2010	4:39:49 PM	H2 valve closed
9/28/2010	4:39:49 PM	BCl3 valve closed
9/28/2010	4:39:49 PM	PH3 valve closed
9/28/2010	4:39:49 PM	SiCl4 pre valve closed
9/28/2010	4:39:49 PM	SiCl4 post valve closed
9/28/2010	4:39:49 PM	Bubbler valve closed
9/28/2010	4:39:49 PM	Main Vac valve opened
9/28/2010	4:39:49 PM	Bypass valve opened
9/28/2010	4:39:49 PM	Helium MFC set to  0.000000
9/28/2010	4:39:49 PM	H2 MFC set to  0.000000
9/28/2010	4:39:49 PM	BCl3 MFC set to  0.000000
9/28/2010	4:39:49 PM	PHl3 MFC set to  0.000000
9/28/2010	4:39:49 PM	SiCl4 MFC set to  0.000000
9/28/2010	4:39:49 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	4:39:49 PM	Tube furnace set to 0
9/28/2010	4:40:49 PM	H2 valve closed
9/28/2010	4:40:49 PM	BCl3 valve closed
9/28/2010	4:40:49 PM	PH3 valve closed
9/28/2010	4:40:49 PM	SiCl4 pre valve closed
9/28/2010	4:40:49 PM	SiCl4 post valve closed
9/28/2010	4:40:49 PM	Bubbler valve closed
9/28/2010	4:40:49 PM	Helium valve opened
9/28/2010	4:40:49 PM	Main Vac valve opened
9/28/2010	4:40:49 PM	Bypass valve opened
9/28/2010	4:40:49 PM	Helium MFC set to  100.000000
9/28/2010	4:40:49 PM	H2 MFC set to  0.000000
9/28/2010	4:40:49 PM	BCl3 MFC set to  0.000000
9/28/2010	4:40:49 PM	PHl3 MFC set to  0.000000
9/28/2010	4:40:49 PM	SiCl4 MFC set to  0.000000
9/28/2010	4:40:49 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	4:40:50 PM	Tube furnace set to 0
9/28/2010	4:41:50 PM	Helium valve closed
9/28/2010	4:41:50 PM	H2 valve closed
9/28/2010	4:41:50 PM	BCl3 valve closed
9/28/2010	4:41:50 PM	PH3 valve closed
9/28/2010	4:41:50 PM	SiCl4 pre valve closed
9/28/2010	4:41:50 PM	SiCl4 post valve closed
9/28/2010	4:41:50 PM	Bubbler valve closed
9/28/2010	4:41:50 PM	Main Vac valve opened
9/28/2010	4:41:50 PM	Bypass valve opened
9/28/2010	4:41:50 PM	Helium MFC set to  0.000000
9/28/2010	4:41:50 PM	H2 MFC set to  0.000000
9/28/2010	4:41:50 PM	BCl3 MFC set to  0.000000
9/28/2010	4:41:50 PM	PHl3 MFC set to  0.000000
9/28/2010	4:41:50 PM	SiCl4 MFC set to  0.000000
9/28/2010	4:41:50 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	4:41:50 PM	Tube furnace set to 0
9/28/2010	4:41:51 PM	Run finished at 4:41 PM
9/28/2010	4:41:51 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/28/2010	4:43:24 PM	Bypass valve closed
9/28/2010	4:43:24 PM	Main Vac valve closed
9/28/2010	4:43:46 PM	Bypass valve opened
9/28/2010	4:43:46 PM	Main Vac valve opened
9/28/2010	4:44:23 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/28/2010	4:44:35 PM	Recipe started at 4:44 PM
9/28/2010	4:44:35 PM	Helium valve closed
9/28/2010	4:44:35 PM	H2 valve closed
9/28/2010	4:44:35 PM	BCl3 valve closed
9/28/2010	4:44:35 PM	PH3 valve closed
9/28/2010	4:44:35 PM	SiCl4 pre valve closed
9/28/2010	4:44:35 PM	SiCl4 post valve closed
9/28/2010	4:44:35 PM	Main Vac valve closed
9/28/2010	4:44:35 PM	Bubbler valve closed
9/28/2010	4:44:35 PM	Bypass valve opened
9/28/2010	4:44:35 PM	Helium MFC set to  0.000000
9/28/2010	4:44:35 PM	H2 MFC set to  0.000000
9/28/2010	4:44:35 PM	BCl3 MFC set to  0.000000
9/28/2010	4:44:35 PM	PHl3 MFC set to  0.000000
9/28/2010	4:44:35 PM	SiCl4 MFC set to  0.000000
9/28/2010	4:44:35 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	4:44:35 PM	Tube furnace set to 0
9/28/2010	4:44:35 PM	Helium valve closed
9/28/2010	4:44:35 PM	H2 valve closed
9/28/2010	4:44:35 PM	BCl3 valve closed
9/28/2010	4:44:35 PM	PH3 valve closed
9/28/2010	4:44:35 PM	SiCl4 pre valve closed
9/28/2010	4:44:35 PM	SiCl4 post valve closed
9/28/2010	4:44:35 PM	Bubbler valve closed
9/28/2010	4:44:35 PM	Main Vac valve opened
9/28/2010	4:44:35 PM	Bypass valve opened
9/28/2010	4:44:35 PM	Helium MFC set to  0.000000
9/28/2010	4:44:35 PM	H2 MFC set to  0.000000
9/28/2010	4:44:35 PM	BCl3 MFC set to  0.000000
9/28/2010	4:44:35 PM	PHl3 MFC set to  0.000000
9/28/2010	4:44:35 PM	SiCl4 MFC set to  0.000000
9/28/2010	4:44:35 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	4:44:35 PM	Tube furnace set to 0
9/28/2010	4:45:35 PM	H2 valve closed
9/28/2010	4:45:35 PM	BCl3 valve closed
9/28/2010	4:45:35 PM	PH3 valve closed
9/28/2010	4:45:35 PM	SiCl4 pre valve closed
9/28/2010	4:45:35 PM	SiCl4 post valve closed
9/28/2010	4:45:35 PM	Bubbler valve closed
9/28/2010	4:45:35 PM	Helium valve opened
9/28/2010	4:45:35 PM	Main Vac valve opened
9/28/2010	4:45:35 PM	Bypass valve opened
9/28/2010	4:45:35 PM	Helium MFC set to  100.000000
9/28/2010	4:45:35 PM	H2 MFC set to  0.000000
9/28/2010	4:45:35 PM	BCl3 MFC set to  0.000000
9/28/2010	4:45:35 PM	PHl3 MFC set to  0.000000
9/28/2010	4:45:35 PM	SiCl4 MFC set to  0.000000
9/28/2010	4:45:35 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	4:45:36 PM	Tube furnace set to 0
9/28/2010	4:46:36 PM	Helium valve closed
9/28/2010	4:46:36 PM	H2 valve closed
9/28/2010	4:46:36 PM	BCl3 valve closed
9/28/2010	4:46:36 PM	PH3 valve closed
9/28/2010	4:46:36 PM	SiCl4 pre valve closed
9/28/2010	4:46:36 PM	SiCl4 post valve closed
9/28/2010	4:46:36 PM	Bubbler valve closed
9/28/2010	4:46:36 PM	Main Vac valve opened
9/28/2010	4:46:36 PM	Bypass valve opened
9/28/2010	4:46:36 PM	Helium MFC set to  0.000000
9/28/2010	4:46:36 PM	H2 MFC set to  0.000000
9/28/2010	4:46:36 PM	BCl3 MFC set to  0.000000
9/28/2010	4:46:36 PM	PHl3 MFC set to  0.000000
9/28/2010	4:46:36 PM	SiCl4 MFC set to  0.000000
9/28/2010	4:46:36 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	4:46:36 PM	Tube furnace set to 0
9/28/2010	4:47:36 PM	H2 valve closed
9/28/2010	4:47:36 PM	BCl3 valve closed
9/28/2010	4:47:36 PM	PH3 valve closed
9/28/2010	4:47:36 PM	SiCl4 pre valve closed
9/28/2010	4:47:36 PM	SiCl4 post valve closed
9/28/2010	4:47:36 PM	Bubbler valve closed
9/28/2010	4:47:36 PM	Helium valve opened
9/28/2010	4:47:36 PM	Main Vac valve opened
9/28/2010	4:47:36 PM	Bypass valve opened
9/28/2010	4:47:36 PM	Helium MFC set to  100.000000
9/28/2010	4:47:36 PM	H2 MFC set to  0.000000
9/28/2010	4:47:36 PM	BCl3 MFC set to  0.000000
9/28/2010	4:47:36 PM	PHl3 MFC set to  0.000000
9/28/2010	4:47:36 PM	SiCl4 MFC set to  0.000000
9/28/2010	4:47:36 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	4:47:36 PM	Tube furnace set to 0
9/28/2010	4:48:36 PM	Helium valve closed
9/28/2010	4:48:36 PM	H2 valve closed
9/28/2010	4:48:36 PM	BCl3 valve closed
9/28/2010	4:48:36 PM	PH3 valve closed
9/28/2010	4:48:36 PM	SiCl4 pre valve closed
9/28/2010	4:48:36 PM	SiCl4 post valve closed
9/28/2010	4:48:36 PM	Bubbler valve closed
9/28/2010	4:48:36 PM	Main Vac valve opened
9/28/2010	4:48:36 PM	Bypass valve opened
9/28/2010	4:48:36 PM	Helium MFC set to  0.000000
9/28/2010	4:48:36 PM	H2 MFC set to  0.000000
9/28/2010	4:48:36 PM	BCl3 MFC set to  0.000000
9/28/2010	4:48:36 PM	PHl3 MFC set to  0.000000
9/28/2010	4:48:36 PM	SiCl4 MFC set to  0.000000
9/28/2010	4:48:36 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	4:48:36 PM	Tube furnace set to 0
9/28/2010	4:49:36 PM	H2 valve closed
9/28/2010	4:49:36 PM	BCl3 valve closed
9/28/2010	4:49:36 PM	PH3 valve closed
9/28/2010	4:49:36 PM	SiCl4 pre valve closed
9/28/2010	4:49:36 PM	SiCl4 post valve closed
9/28/2010	4:49:36 PM	Bubbler valve closed
9/28/2010	4:49:36 PM	Helium valve opened
9/28/2010	4:49:36 PM	Main Vac valve opened
9/28/2010	4:49:36 PM	Bypass valve opened
9/28/2010	4:49:36 PM	Helium MFC set to  100.000000
9/28/2010	4:49:36 PM	H2 MFC set to  0.000000
9/28/2010	4:49:36 PM	BCl3 MFC set to  0.000000
9/28/2010	4:49:36 PM	PHl3 MFC set to  0.000000
9/28/2010	4:49:36 PM	SiCl4 MFC set to  0.000000
9/28/2010	4:49:36 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	4:49:36 PM	Tube furnace set to 0
9/28/2010	4:50:36 PM	Helium valve closed
9/28/2010	4:50:36 PM	H2 valve closed
9/28/2010	4:50:36 PM	BCl3 valve closed
9/28/2010	4:50:36 PM	PH3 valve closed
9/28/2010	4:50:36 PM	SiCl4 pre valve closed
9/28/2010	4:50:36 PM	SiCl4 post valve closed
9/28/2010	4:50:36 PM	Bubbler valve closed
9/28/2010	4:50:36 PM	Main Vac valve opened
9/28/2010	4:50:36 PM	Bypass valve opened
9/28/2010	4:50:36 PM	Helium MFC set to  0.000000
9/28/2010	4:50:36 PM	H2 MFC set to  0.000000
9/28/2010	4:50:36 PM	BCl3 MFC set to  0.000000
9/28/2010	4:50:36 PM	PHl3 MFC set to  0.000000
9/28/2010	4:50:36 PM	SiCl4 MFC set to  0.000000
9/28/2010	4:50:36 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	4:50:37 PM	Tube furnace set to 0
9/28/2010	4:51:37 PM	H2 valve closed
9/28/2010	4:51:37 PM	BCl3 valve closed
9/28/2010	4:51:37 PM	PH3 valve closed
9/28/2010	4:51:37 PM	SiCl4 pre valve closed
9/28/2010	4:51:37 PM	SiCl4 post valve closed
9/28/2010	4:51:37 PM	Bubbler valve closed
9/28/2010	4:51:37 PM	Helium valve opened
9/28/2010	4:51:37 PM	Main Vac valve opened
9/28/2010	4:51:37 PM	Bypass valve opened
9/28/2010	4:51:37 PM	Helium MFC set to  100.000000
9/28/2010	4:51:37 PM	H2 MFC set to  0.000000
9/28/2010	4:51:37 PM	BCl3 MFC set to  0.000000
9/28/2010	4:51:37 PM	PHl3 MFC set to  0.000000
9/28/2010	4:51:37 PM	SiCl4 MFC set to  0.000000
9/28/2010	4:51:37 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	4:51:37 PM	Tube furnace set to 0
9/28/2010	4:52:37 PM	Helium valve closed
9/28/2010	4:52:37 PM	H2 valve closed
9/28/2010	4:52:37 PM	BCl3 valve closed
9/28/2010	4:52:37 PM	PH3 valve closed
9/28/2010	4:52:37 PM	SiCl4 pre valve closed
9/28/2010	4:52:37 PM	SiCl4 post valve closed
9/28/2010	4:52:37 PM	Bubbler valve closed
9/28/2010	4:52:37 PM	Main Vac valve opened
9/28/2010	4:52:37 PM	Bypass valve opened
9/28/2010	4:52:37 PM	Helium MFC set to  0.000000
9/28/2010	4:52:37 PM	H2 MFC set to  0.000000
9/28/2010	4:52:37 PM	BCl3 MFC set to  0.000000
9/28/2010	4:52:37 PM	PHl3 MFC set to  0.000000
9/28/2010	4:52:37 PM	SiCl4 MFC set to  0.000000
9/28/2010	4:52:37 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	4:52:37 PM	Tube furnace set to 0
9/28/2010	4:53:37 PM	H2 valve closed
9/28/2010	4:53:37 PM	BCl3 valve closed
9/28/2010	4:53:37 PM	PH3 valve closed
9/28/2010	4:53:37 PM	SiCl4 pre valve closed
9/28/2010	4:53:37 PM	SiCl4 post valve closed
9/28/2010	4:53:37 PM	Bubbler valve closed
9/28/2010	4:53:37 PM	Helium valve opened
9/28/2010	4:53:37 PM	Main Vac valve opened
9/28/2010	4:53:37 PM	Bypass valve opened
9/28/2010	4:53:37 PM	Helium MFC set to  100.000000
9/28/2010	4:53:37 PM	H2 MFC set to  0.000000
9/28/2010	4:53:37 PM	BCl3 MFC set to  0.000000
9/28/2010	4:53:37 PM	PHl3 MFC set to  0.000000
9/28/2010	4:53:37 PM	SiCl4 MFC set to  0.000000
9/28/2010	4:53:37 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	4:53:37 PM	Tube furnace set to 0
9/28/2010	4:54:37 PM	Helium valve closed
9/28/2010	4:54:37 PM	H2 valve closed
9/28/2010	4:54:37 PM	BCl3 valve closed
9/28/2010	4:54:37 PM	PH3 valve closed
9/28/2010	4:54:37 PM	SiCl4 pre valve closed
9/28/2010	4:54:37 PM	SiCl4 post valve closed
9/28/2010	4:54:37 PM	Bubbler valve closed
9/28/2010	4:54:37 PM	Main Vac valve opened
9/28/2010	4:54:37 PM	Bypass valve opened
9/28/2010	4:54:37 PM	Helium MFC set to  0.000000
9/28/2010	4:54:37 PM	H2 MFC set to  0.000000
9/28/2010	4:54:37 PM	BCl3 MFC set to  0.000000
9/28/2010	4:54:37 PM	PHl3 MFC set to  0.000000
9/28/2010	4:54:37 PM	SiCl4 MFC set to  0.000000
9/28/2010	4:54:37 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	4:54:37 PM	Tube furnace set to 0
9/28/2010	4:55:37 PM	H2 valve closed
9/28/2010	4:55:37 PM	BCl3 valve closed
9/28/2010	4:55:37 PM	PH3 valve closed
9/28/2010	4:55:37 PM	SiCl4 pre valve closed
9/28/2010	4:55:37 PM	SiCl4 post valve closed
9/28/2010	4:55:37 PM	Bubbler valve closed
9/28/2010	4:55:37 PM	Helium valve opened
9/28/2010	4:55:37 PM	Main Vac valve opened
9/28/2010	4:55:37 PM	Bypass valve opened
9/28/2010	4:55:37 PM	Helium MFC set to  100.000000
9/28/2010	4:55:37 PM	H2 MFC set to  0.000000
9/28/2010	4:55:37 PM	BCl3 MFC set to  0.000000
9/28/2010	4:55:37 PM	PHl3 MFC set to  0.000000
9/28/2010	4:55:37 PM	SiCl4 MFC set to  0.000000
9/28/2010	4:55:37 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	4:55:38 PM	Tube furnace set to 0
9/28/2010	4:56:38 PM	Helium valve closed
9/28/2010	4:56:38 PM	H2 valve closed
9/28/2010	4:56:38 PM	BCl3 valve closed
9/28/2010	4:56:38 PM	PH3 valve closed
9/28/2010	4:56:38 PM	SiCl4 pre valve closed
9/28/2010	4:56:38 PM	SiCl4 post valve closed
9/28/2010	4:56:38 PM	Bubbler valve closed
9/28/2010	4:56:38 PM	Main Vac valve opened
9/28/2010	4:56:38 PM	Bypass valve opened
9/28/2010	4:56:38 PM	Helium MFC set to  0.000000
9/28/2010	4:56:38 PM	H2 MFC set to  0.000000
9/28/2010	4:56:38 PM	BCl3 MFC set to  0.000000
9/28/2010	4:56:38 PM	PHl3 MFC set to  0.000000
9/28/2010	4:56:38 PM	SiCl4 MFC set to  0.000000
9/28/2010	4:56:38 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	4:56:38 PM	Tube furnace set to 0
9/28/2010	4:57:38 PM	H2 valve closed
9/28/2010	4:57:38 PM	BCl3 valve closed
9/28/2010	4:57:38 PM	PH3 valve closed
9/28/2010	4:57:38 PM	SiCl4 pre valve closed
9/28/2010	4:57:38 PM	SiCl4 post valve closed
9/28/2010	4:57:38 PM	Bubbler valve closed
9/28/2010	4:57:38 PM	Helium valve opened
9/28/2010	4:57:38 PM	Main Vac valve opened
9/28/2010	4:57:38 PM	Bypass valve opened
9/28/2010	4:57:38 PM	Helium MFC set to  100.000000
9/28/2010	4:57:38 PM	H2 MFC set to  0.000000
9/28/2010	4:57:38 PM	BCl3 MFC set to  0.000000
9/28/2010	4:57:38 PM	PHl3 MFC set to  0.000000
9/28/2010	4:57:38 PM	SiCl4 MFC set to  0.000000
9/28/2010	4:57:38 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	4:57:38 PM	Tube furnace set to 0
9/28/2010	4:58:38 PM	Helium valve closed
9/28/2010	4:58:38 PM	H2 valve closed
9/28/2010	4:58:38 PM	BCl3 valve closed
9/28/2010	4:58:38 PM	PH3 valve closed
9/28/2010	4:58:38 PM	SiCl4 pre valve closed
9/28/2010	4:58:38 PM	SiCl4 post valve closed
9/28/2010	4:58:38 PM	Bubbler valve closed
9/28/2010	4:58:38 PM	Main Vac valve opened
9/28/2010	4:58:38 PM	Bypass valve opened
9/28/2010	4:58:38 PM	Helium MFC set to  0.000000
9/28/2010	4:58:38 PM	H2 MFC set to  0.000000
9/28/2010	4:58:38 PM	BCl3 MFC set to  0.000000
9/28/2010	4:58:38 PM	PHl3 MFC set to  0.000000
9/28/2010	4:58:38 PM	SiCl4 MFC set to  0.000000
9/28/2010	4:58:38 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	4:58:38 PM	Tube furnace set to 0
9/28/2010	4:59:38 PM	H2 valve closed
9/28/2010	4:59:38 PM	BCl3 valve closed
9/28/2010	4:59:38 PM	PH3 valve closed
9/28/2010	4:59:38 PM	SiCl4 pre valve closed
9/28/2010	4:59:38 PM	SiCl4 post valve closed
9/28/2010	4:59:38 PM	Bubbler valve closed
9/28/2010	4:59:38 PM	Helium valve opened
9/28/2010	4:59:38 PM	Main Vac valve opened
9/28/2010	4:59:38 PM	Bypass valve opened
9/28/2010	4:59:38 PM	Helium MFC set to  100.000000
9/28/2010	4:59:38 PM	H2 MFC set to  0.000000
9/28/2010	4:59:38 PM	BCl3 MFC set to  0.000000
9/28/2010	4:59:38 PM	PHl3 MFC set to  0.000000
9/28/2010	4:59:38 PM	SiCl4 MFC set to  0.000000
9/28/2010	4:59:38 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	4:59:38 PM	Tube furnace set to 0
9/28/2010	5:00:38 PM	Helium valve closed
9/28/2010	5:00:38 PM	H2 valve closed
9/28/2010	5:00:38 PM	BCl3 valve closed
9/28/2010	5:00:38 PM	PH3 valve closed
9/28/2010	5:00:38 PM	SiCl4 pre valve closed
9/28/2010	5:00:38 PM	SiCl4 post valve closed
9/28/2010	5:00:38 PM	Bubbler valve closed
9/28/2010	5:00:38 PM	Main Vac valve opened
9/28/2010	5:00:38 PM	Bypass valve opened
9/28/2010	5:00:38 PM	Helium MFC set to  0.000000
9/28/2010	5:00:38 PM	H2 MFC set to  0.000000
9/28/2010	5:00:38 PM	BCl3 MFC set to  0.000000
9/28/2010	5:00:38 PM	PHl3 MFC set to  0.000000
9/28/2010	5:00:38 PM	SiCl4 MFC set to  0.000000
9/28/2010	5:00:38 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	5:00:39 PM	Tube furnace set to 0
9/28/2010	5:01:39 PM	H2 valve closed
9/28/2010	5:01:39 PM	BCl3 valve closed
9/28/2010	5:01:39 PM	PH3 valve closed
9/28/2010	5:01:39 PM	SiCl4 pre valve closed
9/28/2010	5:01:39 PM	SiCl4 post valve closed
9/28/2010	5:01:39 PM	Bubbler valve closed
9/28/2010	5:01:39 PM	Helium valve opened
9/28/2010	5:01:39 PM	Main Vac valve opened
9/28/2010	5:01:39 PM	Bypass valve opened
9/28/2010	5:01:39 PM	Helium MFC set to  100.000000
9/28/2010	5:01:39 PM	H2 MFC set to  0.000000
9/28/2010	5:01:39 PM	BCl3 MFC set to  0.000000
9/28/2010	5:01:39 PM	PHl3 MFC set to  0.000000
9/28/2010	5:01:39 PM	SiCl4 MFC set to  0.000000
9/28/2010	5:01:39 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	5:01:39 PM	Tube furnace set to 0
9/28/2010	5:02:39 PM	Helium valve closed
9/28/2010	5:02:39 PM	H2 valve closed
9/28/2010	5:02:39 PM	BCl3 valve closed
9/28/2010	5:02:39 PM	PH3 valve closed
9/28/2010	5:02:39 PM	SiCl4 pre valve closed
9/28/2010	5:02:39 PM	SiCl4 post valve closed
9/28/2010	5:02:39 PM	Bubbler valve closed
9/28/2010	5:02:39 PM	Main Vac valve opened
9/28/2010	5:02:39 PM	Bypass valve opened
9/28/2010	5:02:39 PM	Helium MFC set to  0.000000
9/28/2010	5:02:39 PM	H2 MFC set to  0.000000
9/28/2010	5:02:39 PM	BCl3 MFC set to  0.000000
9/28/2010	5:02:39 PM	PHl3 MFC set to  0.000000
9/28/2010	5:02:39 PM	SiCl4 MFC set to  0.000000
9/28/2010	5:02:39 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	5:02:39 PM	Tube furnace set to 0
9/28/2010	5:03:39 PM	H2 valve closed
9/28/2010	5:03:39 PM	BCl3 valve closed
9/28/2010	5:03:39 PM	PH3 valve closed
9/28/2010	5:03:39 PM	SiCl4 pre valve closed
9/28/2010	5:03:39 PM	SiCl4 post valve closed
9/28/2010	5:03:39 PM	Bubbler valve closed
9/28/2010	5:03:39 PM	Helium valve opened
9/28/2010	5:03:39 PM	Main Vac valve opened
9/28/2010	5:03:39 PM	Bypass valve opened
9/28/2010	5:03:39 PM	Helium MFC set to  100.000000
9/28/2010	5:03:39 PM	H2 MFC set to  0.000000
9/28/2010	5:03:39 PM	BCl3 MFC set to  0.000000
9/28/2010	5:03:39 PM	PHl3 MFC set to  0.000000
9/28/2010	5:03:39 PM	SiCl4 MFC set to  0.000000
9/28/2010	5:03:39 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	5:03:39 PM	Tube furnace set to 0
9/28/2010	5:04:39 PM	Helium valve closed
9/28/2010	5:04:39 PM	H2 valve closed
9/28/2010	5:04:39 PM	BCl3 valve closed
9/28/2010	5:04:39 PM	PH3 valve closed
9/28/2010	5:04:39 PM	SiCl4 pre valve closed
9/28/2010	5:04:39 PM	SiCl4 post valve closed
9/28/2010	5:04:39 PM	Bubbler valve closed
9/28/2010	5:04:39 PM	Main Vac valve opened
9/28/2010	5:04:39 PM	Bypass valve opened
9/28/2010	5:04:39 PM	Helium MFC set to  0.000000
9/28/2010	5:04:39 PM	H2 MFC set to  0.000000
9/28/2010	5:04:39 PM	BCl3 MFC set to  0.000000
9/28/2010	5:04:39 PM	PHl3 MFC set to  0.000000
9/28/2010	5:04:39 PM	SiCl4 MFC set to  0.000000
9/28/2010	5:04:39 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	5:04:40 PM	Tube furnace set to 0
9/28/2010	5:04:41 PM	Run finished at 5:04 PM
9/28/2010	5:04:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/28/2010	5:06:30 PM	Recipe started at 5:06 PM
9/28/2010	5:06:30 PM	Helium valve closed
9/28/2010	5:06:30 PM	BCl3 valve closed
9/28/2010	5:06:30 PM	PH3 valve closed
9/28/2010	5:06:30 PM	SiCl4 pre valve closed
9/28/2010	5:06:30 PM	SiCl4 post valve closed
9/28/2010	5:06:30 PM	Main Vac valve closed
9/28/2010	5:06:30 PM	Bypass valve closed
9/28/2010	5:06:30 PM	Bubbler valve closed
9/28/2010	5:06:30 PM	H2 valve opened
9/28/2010	5:06:30 PM	Helium MFC set to  0.000000
9/28/2010	5:06:30 PM	H2 MFC set to  500.000000
9/28/2010	5:06:30 PM	BCl3 MFC set to  0.000000
9/28/2010	5:06:30 PM	PHl3 MFC set to  0.000000
9/28/2010	5:06:30 PM	SiCl4 MFC set to  0.000000
9/28/2010	5:06:30 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	5:06:30 PM	Tube furnace set to 0
9/28/2010	5:07:48 PM	Helium valve closed
9/28/2010	5:07:48 PM	BCl3 valve closed
9/28/2010	5:07:48 PM	PH3 valve closed
9/28/2010	5:07:48 PM	SiCl4 pre valve closed
9/28/2010	5:07:48 PM	SiCl4 post valve closed
9/28/2010	5:07:48 PM	Main Vac valve closed
9/28/2010	5:07:48 PM	Bypass valve closed
9/28/2010	5:07:48 PM	H2 valve opened
9/28/2010	5:07:48 PM	Bubbler valve opened
9/28/2010	5:07:48 PM	Helium MFC set to  0.000000
9/28/2010	5:07:48 PM	H2 MFC set to  500.000000
9/28/2010	5:07:48 PM	BCl3 MFC set to  0.000000
9/28/2010	5:07:48 PM	PHl3 MFC set to  0.000000
9/28/2010	5:07:48 PM	SiCl4 MFC set to  0.000000
9/28/2010	5:07:48 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	5:07:48 PM	Tube furnace set to 1000
9/28/2010	5:27:48 PM	Helium valve closed
9/28/2010	5:27:48 PM	BCl3 valve closed
9/28/2010	5:27:48 PM	PH3 valve closed
9/28/2010	5:27:48 PM	Main Vac valve closed
9/28/2010	5:27:48 PM	Bypass valve closed
9/28/2010	5:27:48 PM	H2 valve opened
9/28/2010	5:27:48 PM	SiCl4 pre valve opened
9/28/2010	5:27:48 PM	SiCl4 post valve opened
9/28/2010	5:27:48 PM	Bubbler valve opened
9/28/2010	5:27:48 PM	Helium MFC set to  0.000000
9/28/2010	5:27:48 PM	H2 MFC set to  500.000000
9/28/2010	5:27:48 PM	BCl3 MFC set to  0.000000
9/28/2010	5:27:48 PM	PHl3 MFC set to  0.000000
9/28/2010	5:27:48 PM	SiCl4 MFC set to  50.000000
9/28/2010	5:27:48 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	5:27:48 PM	Tube furnace set to 1000
9/28/2010	5:47:48 PM	H2 valve closed
9/28/2010	5:47:48 PM	BCl3 valve closed
9/28/2010	5:47:48 PM	PH3 valve closed
9/28/2010	5:47:48 PM	SiCl4 pre valve closed
9/28/2010	5:47:48 PM	SiCl4 post valve closed
9/28/2010	5:47:48 PM	Main Vac valve closed
9/28/2010	5:47:48 PM	Bypass valve closed
9/28/2010	5:47:48 PM	Helium valve opened
9/28/2010	5:47:48 PM	Bubbler valve opened
9/28/2010	5:47:48 PM	Helium MFC set to  500.000000
9/28/2010	5:47:48 PM	H2 MFC set to  0.000000
9/28/2010	5:47:48 PM	BCl3 MFC set to  0.000000
9/28/2010	5:47:48 PM	PHl3 MFC set to  0.000000
9/28/2010	5:47:48 PM	SiCl4 MFC set to  0.000000
9/28/2010	5:47:48 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	5:47:48 PM	Tube furnace set to 0
9/28/2010	6:07:48 PM	Helium valve closed
9/28/2010	6:07:48 PM	H2 valve closed
9/28/2010	6:07:48 PM	BCl3 valve closed
9/28/2010	6:07:48 PM	PH3 valve closed
9/28/2010	6:07:48 PM	SiCl4 pre valve closed
9/28/2010	6:07:48 PM	SiCl4 post valve closed
9/28/2010	6:07:48 PM	Main Vac valve closed
9/28/2010	6:07:48 PM	Bypass valve closed
9/28/2010	6:07:48 PM	Bubbler valve closed
9/28/2010	6:07:48 PM	Helium MFC set to  0.000000
9/28/2010	6:07:48 PM	H2 MFC set to  0.000000
9/28/2010	6:07:48 PM	BCl3 MFC set to  0.000000
9/28/2010	6:07:48 PM	PHl3 MFC set to  0.000000
9/28/2010	6:07:48 PM	SiCl4 MFC set to  0.000000
9/28/2010	6:07:48 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	6:07:49 PM	Tube furnace set to 0
9/28/2010	6:07:49 PM	Run finished at 6:07 PM
9/28/2010	6:27:59 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/28/2010	6:28:00 PM	Recipe started at 6:28 PM
9/28/2010	6:28:00 PM	H2 valve closed
9/28/2010	6:28:00 PM	BCl3 valve closed
9/28/2010	6:28:00 PM	PH3 valve closed
9/28/2010	6:28:00 PM	SiCl4 pre valve closed
9/28/2010	6:28:00 PM	SiCl4 post valve closed
9/28/2010	6:28:00 PM	Main Vac valve closed
9/28/2010	6:28:00 PM	Bypass valve closed
9/28/2010	6:28:00 PM	Bubbler valve closed
9/28/2010	6:28:00 PM	Helium valve opened
9/28/2010	6:28:00 PM	Helium MFC set to  500.000000
9/28/2010	6:28:00 PM	H2 MFC set to  0.000000
9/28/2010	6:28:00 PM	BCl3 MFC set to  0.000000
9/28/2010	6:28:00 PM	PHl3 MFC set to  0.000000
9/28/2010	6:28:00 PM	SiCl4 MFC set to  0.000000
9/28/2010	6:28:00 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	6:28:00 PM	Tube furnace set to 0
9/28/2010	6:28:08 PM	Helium valve closed
9/28/2010	6:28:08 PM	H2 valve closed
9/28/2010	6:28:08 PM	BCl3 valve closed
9/28/2010	6:28:08 PM	PH3 valve closed
9/28/2010	6:28:08 PM	SiCl4 pre valve closed
9/28/2010	6:28:08 PM	SiCl4 post valve closed
9/28/2010	6:28:08 PM	Main Vac valve closed
9/28/2010	6:28:08 PM	Bypass valve closed
9/28/2010	6:28:08 PM	Bubbler valve closed
9/28/2010	6:28:08 PM	Helium MFC set to  0.000000
9/28/2010	6:28:08 PM	H2 MFC set to  0.000000
9/28/2010	6:28:08 PM	BCl3 MFC set to  0.000000
9/28/2010	6:28:08 PM	PHl3 MFC set to  0.000000
9/28/2010	6:28:08 PM	SiCl4 MFC set to  0.000000
9/28/2010	6:28:08 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	6:28:08 PM	Tube furnace set to 0
9/28/2010	6:28:08 PM	Run finished at 6:28 PM
9/28/2010	6:28:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/28/2010	6:33:14 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/28/2010	6:33:15 PM	Recipe started at 6:33 PM
9/28/2010	6:33:15 PM	Helium valve closed
9/28/2010	6:33:15 PM	H2 valve closed
9/28/2010	6:33:15 PM	BCl3 valve closed
9/28/2010	6:33:15 PM	PH3 valve closed
9/28/2010	6:33:15 PM	SiCl4 pre valve closed
9/28/2010	6:33:15 PM	SiCl4 post valve closed
9/28/2010	6:33:15 PM	Main Vac valve closed
9/28/2010	6:33:15 PM	Bubbler valve closed
9/28/2010	6:33:15 PM	Bypass valve opened
9/28/2010	6:33:15 PM	Helium MFC set to  0.000000
9/28/2010	6:33:15 PM	H2 MFC set to  0.000000
9/28/2010	6:33:15 PM	BCl3 MFC set to  0.000000
9/28/2010	6:33:15 PM	PHl3 MFC set to  0.000000
9/28/2010	6:33:15 PM	SiCl4 MFC set to  0.000000
9/28/2010	6:33:15 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	6:33:15 PM	Tube furnace set to 0
9/28/2010	6:33:57 PM	Helium valve closed
9/28/2010	6:33:57 PM	H2 valve closed
9/28/2010	6:33:57 PM	BCl3 valve closed
9/28/2010	6:33:57 PM	PH3 valve closed
9/28/2010	6:33:57 PM	SiCl4 pre valve closed
9/28/2010	6:33:57 PM	SiCl4 post valve closed
9/28/2010	6:33:57 PM	Bubbler valve closed
9/28/2010	6:33:57 PM	Main Vac valve opened
9/28/2010	6:33:57 PM	Bypass valve opened
9/28/2010	6:33:57 PM	Helium MFC set to  0.000000
9/28/2010	6:33:57 PM	H2 MFC set to  0.000000
9/28/2010	6:33:57 PM	BCl3 MFC set to  0.000000
9/28/2010	6:33:57 PM	PHl3 MFC set to  0.000000
9/28/2010	6:33:57 PM	SiCl4 MFC set to  0.000000
9/28/2010	6:33:57 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	6:33:57 PM	Tube furnace set to 0
9/28/2010	6:33:58 PM	Run finished at 6:33 PM
9/28/2010	6:33:58 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/28/2010	6:35:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/28/2010	6:35:28 PM	Recipe started at 6:35 PM
9/28/2010	6:35:28 PM	Helium valve closed
9/28/2010	6:35:28 PM	H2 valve closed
9/28/2010	6:35:28 PM	BCl3 valve closed
9/28/2010	6:35:28 PM	PH3 valve closed
9/28/2010	6:35:28 PM	SiCl4 pre valve closed
9/28/2010	6:35:28 PM	SiCl4 post valve closed
9/28/2010	6:35:28 PM	Main Vac valve closed
9/28/2010	6:35:28 PM	Bubbler valve closed
9/28/2010	6:35:28 PM	Bypass valve opened
9/28/2010	6:35:28 PM	Helium MFC set to  0.000000
9/28/2010	6:35:28 PM	H2 MFC set to  0.000000
9/28/2010	6:35:28 PM	BCl3 MFC set to  0.000000
9/28/2010	6:35:28 PM	PHl3 MFC set to  0.000000
9/28/2010	6:35:28 PM	SiCl4 MFC set to  0.000000
9/28/2010	6:35:28 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	6:35:28 PM	Tube furnace set to 0
9/28/2010	6:35:28 PM	Helium valve closed
9/28/2010	6:35:28 PM	H2 valve closed
9/28/2010	6:35:28 PM	BCl3 valve closed
9/28/2010	6:35:28 PM	PH3 valve closed
9/28/2010	6:35:28 PM	SiCl4 pre valve closed
9/28/2010	6:35:28 PM	SiCl4 post valve closed
9/28/2010	6:35:28 PM	Bubbler valve closed
9/28/2010	6:35:28 PM	Main Vac valve opened
9/28/2010	6:35:28 PM	Bypass valve opened
9/28/2010	6:35:28 PM	Helium MFC set to  0.000000
9/28/2010	6:35:28 PM	H2 MFC set to  0.000000
9/28/2010	6:35:28 PM	BCl3 MFC set to  0.000000
9/28/2010	6:35:28 PM	PHl3 MFC set to  0.000000
9/28/2010	6:35:28 PM	SiCl4 MFC set to  0.000000
9/28/2010	6:35:28 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	6:35:28 PM	Tube furnace set to 0
9/28/2010	6:36:28 PM	H2 valve closed
9/28/2010	6:36:28 PM	BCl3 valve closed
9/28/2010	6:36:28 PM	PH3 valve closed
9/28/2010	6:36:28 PM	SiCl4 pre valve closed
9/28/2010	6:36:28 PM	SiCl4 post valve closed
9/28/2010	6:36:28 PM	Bubbler valve closed
9/28/2010	6:36:28 PM	Helium valve opened
9/28/2010	6:36:29 PM	Main Vac valve opened
9/28/2010	6:36:29 PM	Bypass valve opened
9/28/2010	6:36:29 PM	Helium MFC set to  100.000000
9/28/2010	6:36:29 PM	H2 MFC set to  0.000000
9/28/2010	6:36:29 PM	BCl3 MFC set to  0.000000
9/28/2010	6:36:29 PM	PHl3 MFC set to  0.000000
9/28/2010	6:36:29 PM	SiCl4 MFC set to  0.000000
9/28/2010	6:36:29 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	6:36:29 PM	Tube furnace set to 0
9/28/2010	6:37:29 PM	Helium valve closed
9/28/2010	6:37:29 PM	H2 valve closed
9/28/2010	6:37:29 PM	BCl3 valve closed
9/28/2010	6:37:29 PM	PH3 valve closed
9/28/2010	6:37:29 PM	SiCl4 pre valve closed
9/28/2010	6:37:29 PM	SiCl4 post valve closed
9/28/2010	6:37:29 PM	Bubbler valve closed
9/28/2010	6:37:29 PM	Main Vac valve opened
9/28/2010	6:37:29 PM	Bypass valve opened
9/28/2010	6:37:29 PM	Helium MFC set to  0.000000
9/28/2010	6:37:29 PM	H2 MFC set to  0.000000
9/28/2010	6:37:29 PM	BCl3 MFC set to  0.000000
9/28/2010	6:37:29 PM	PHl3 MFC set to  0.000000
9/28/2010	6:37:29 PM	SiCl4 MFC set to  0.000000
9/28/2010	6:37:29 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	6:37:29 PM	Tube furnace set to 0
9/28/2010	6:38:29 PM	H2 valve closed
9/28/2010	6:38:29 PM	BCl3 valve closed
9/28/2010	6:38:29 PM	PH3 valve closed
9/28/2010	6:38:29 PM	SiCl4 pre valve closed
9/28/2010	6:38:29 PM	SiCl4 post valve closed
9/28/2010	6:38:29 PM	Bubbler valve closed
9/28/2010	6:38:29 PM	Helium valve opened
9/28/2010	6:38:29 PM	Main Vac valve opened
9/28/2010	6:38:29 PM	Bypass valve opened
9/28/2010	6:38:29 PM	Helium MFC set to  100.000000
9/28/2010	6:38:29 PM	H2 MFC set to  0.000000
9/28/2010	6:38:29 PM	BCl3 MFC set to  0.000000
9/28/2010	6:38:29 PM	PHl3 MFC set to  0.000000
9/28/2010	6:38:29 PM	SiCl4 MFC set to  0.000000
9/28/2010	6:38:29 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	6:38:29 PM	Tube furnace set to 0
9/28/2010	6:39:29 PM	Helium valve closed
9/28/2010	6:39:29 PM	H2 valve closed
9/28/2010	6:39:29 PM	BCl3 valve closed
9/28/2010	6:39:29 PM	PH3 valve closed
9/28/2010	6:39:29 PM	SiCl4 pre valve closed
9/28/2010	6:39:29 PM	SiCl4 post valve closed
9/28/2010	6:39:29 PM	Bubbler valve closed
9/28/2010	6:39:29 PM	Main Vac valve opened
9/28/2010	6:39:29 PM	Bypass valve opened
9/28/2010	6:39:29 PM	Helium MFC set to  0.000000
9/28/2010	6:39:29 PM	H2 MFC set to  0.000000
9/28/2010	6:39:29 PM	BCl3 MFC set to  0.000000
9/28/2010	6:39:29 PM	PHl3 MFC set to  0.000000
9/28/2010	6:39:29 PM	SiCl4 MFC set to  0.000000
9/28/2010	6:39:29 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	6:39:29 PM	Tube furnace set to 0
9/28/2010	6:40:29 PM	H2 valve closed
9/28/2010	6:40:29 PM	BCl3 valve closed
9/28/2010	6:40:29 PM	PH3 valve closed
9/28/2010	6:40:29 PM	SiCl4 pre valve closed
9/28/2010	6:40:29 PM	SiCl4 post valve closed
9/28/2010	6:40:29 PM	Bubbler valve closed
9/28/2010	6:40:29 PM	Helium valve opened
9/28/2010	6:40:29 PM	Main Vac valve opened
9/28/2010	6:40:29 PM	Bypass valve opened
9/28/2010	6:40:29 PM	Helium MFC set to  100.000000
9/28/2010	6:40:29 PM	H2 MFC set to  0.000000
9/28/2010	6:40:29 PM	BCl3 MFC set to  0.000000
9/28/2010	6:40:29 PM	PHl3 MFC set to  0.000000
9/28/2010	6:40:29 PM	SiCl4 MFC set to  0.000000
9/28/2010	6:40:29 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	6:40:29 PM	Tube furnace set to 0
9/28/2010	6:41:29 PM	Helium valve closed
9/28/2010	6:41:29 PM	H2 valve closed
9/28/2010	6:41:29 PM	BCl3 valve closed
9/28/2010	6:41:29 PM	PH3 valve closed
9/28/2010	6:41:29 PM	SiCl4 pre valve closed
9/28/2010	6:41:29 PM	SiCl4 post valve closed
9/28/2010	6:41:29 PM	Bubbler valve closed
9/28/2010	6:41:29 PM	Main Vac valve opened
9/28/2010	6:41:29 PM	Bypass valve opened
9/28/2010	6:41:29 PM	Helium MFC set to  0.000000
9/28/2010	6:41:29 PM	H2 MFC set to  0.000000
9/28/2010	6:41:29 PM	BCl3 MFC set to  0.000000
9/28/2010	6:41:29 PM	PHl3 MFC set to  0.000000
9/28/2010	6:41:29 PM	SiCl4 MFC set to  0.000000
9/28/2010	6:41:29 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	6:41:30 PM	Tube furnace set to 0
9/28/2010	6:42:30 PM	H2 valve closed
9/28/2010	6:42:30 PM	BCl3 valve closed
9/28/2010	6:42:30 PM	PH3 valve closed
9/28/2010	6:42:30 PM	SiCl4 pre valve closed
9/28/2010	6:42:30 PM	SiCl4 post valve closed
9/28/2010	6:42:30 PM	Bubbler valve closed
9/28/2010	6:42:30 PM	Helium valve opened
9/28/2010	6:42:30 PM	Main Vac valve opened
9/28/2010	6:42:30 PM	Bypass valve opened
9/28/2010	6:42:30 PM	Helium MFC set to  100.000000
9/28/2010	6:42:30 PM	H2 MFC set to  0.000000
9/28/2010	6:42:30 PM	BCl3 MFC set to  0.000000
9/28/2010	6:42:30 PM	PHl3 MFC set to  0.000000
9/28/2010	6:42:30 PM	SiCl4 MFC set to  0.000000
9/28/2010	6:42:30 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	6:42:30 PM	Tube furnace set to 0
9/28/2010	6:43:30 PM	Helium valve closed
9/28/2010	6:43:30 PM	H2 valve closed
9/28/2010	6:43:30 PM	BCl3 valve closed
9/28/2010	6:43:30 PM	PH3 valve closed
9/28/2010	6:43:30 PM	SiCl4 pre valve closed
9/28/2010	6:43:30 PM	SiCl4 post valve closed
9/28/2010	6:43:30 PM	Bubbler valve closed
9/28/2010	6:43:30 PM	Main Vac valve opened
9/28/2010	6:43:30 PM	Bypass valve opened
9/28/2010	6:43:30 PM	Helium MFC set to  0.000000
9/28/2010	6:43:30 PM	H2 MFC set to  0.000000
9/28/2010	6:43:30 PM	BCl3 MFC set to  0.000000
9/28/2010	6:43:30 PM	PHl3 MFC set to  0.000000
9/28/2010	6:43:30 PM	SiCl4 MFC set to  0.000000
9/28/2010	6:43:30 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	6:43:30 PM	Tube furnace set to 0
9/28/2010	6:44:30 PM	H2 valve closed
9/28/2010	6:44:30 PM	BCl3 valve closed
9/28/2010	6:44:30 PM	PH3 valve closed
9/28/2010	6:44:30 PM	SiCl4 pre valve closed
9/28/2010	6:44:30 PM	SiCl4 post valve closed
9/28/2010	6:44:30 PM	Bubbler valve closed
9/28/2010	6:44:30 PM	Helium valve opened
9/28/2010	6:44:30 PM	Main Vac valve opened
9/28/2010	6:44:30 PM	Bypass valve opened
9/28/2010	6:44:30 PM	Helium MFC set to  100.000000
9/28/2010	6:44:30 PM	H2 MFC set to  0.000000
9/28/2010	6:44:30 PM	BCl3 MFC set to  0.000000
9/28/2010	6:44:30 PM	PHl3 MFC set to  0.000000
9/28/2010	6:44:30 PM	SiCl4 MFC set to  0.000000
9/28/2010	6:44:30 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	6:44:30 PM	Tube furnace set to 0
9/28/2010	6:45:30 PM	Helium valve closed
9/28/2010	6:45:30 PM	H2 valve closed
9/28/2010	6:45:30 PM	BCl3 valve closed
9/28/2010	6:45:30 PM	PH3 valve closed
9/28/2010	6:45:30 PM	SiCl4 pre valve closed
9/28/2010	6:45:30 PM	SiCl4 post valve closed
9/28/2010	6:45:30 PM	Bubbler valve closed
9/28/2010	6:45:30 PM	Main Vac valve opened
9/28/2010	6:45:30 PM	Bypass valve opened
9/28/2010	6:45:30 PM	Helium MFC set to  0.000000
9/28/2010	6:45:30 PM	H2 MFC set to  0.000000
9/28/2010	6:45:30 PM	BCl3 MFC set to  0.000000
9/28/2010	6:45:30 PM	PHl3 MFC set to  0.000000
9/28/2010	6:45:30 PM	SiCl4 MFC set to  0.000000
9/28/2010	6:45:30 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	6:45:30 PM	Tube furnace set to 0
9/28/2010	6:46:30 PM	H2 valve closed
9/28/2010	6:46:30 PM	BCl3 valve closed
9/28/2010	6:46:30 PM	PH3 valve closed
9/28/2010	6:46:30 PM	SiCl4 pre valve closed
9/28/2010	6:46:30 PM	SiCl4 post valve closed
9/28/2010	6:46:30 PM	Bubbler valve closed
9/28/2010	6:46:30 PM	Helium valve opened
9/28/2010	6:46:30 PM	Main Vac valve opened
9/28/2010	6:46:30 PM	Bypass valve opened
9/28/2010	6:46:30 PM	Helium MFC set to  100.000000
9/28/2010	6:46:30 PM	H2 MFC set to  0.000000
9/28/2010	6:46:30 PM	BCl3 MFC set to  0.000000
9/28/2010	6:46:30 PM	PHl3 MFC set to  0.000000
9/28/2010	6:46:30 PM	SiCl4 MFC set to  0.000000
9/28/2010	6:46:30 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	6:46:31 PM	Tube furnace set to 0
9/28/2010	6:47:31 PM	Helium valve closed
9/28/2010	6:47:31 PM	H2 valve closed
9/28/2010	6:47:31 PM	BCl3 valve closed
9/28/2010	6:47:31 PM	PH3 valve closed
9/28/2010	6:47:31 PM	SiCl4 pre valve closed
9/28/2010	6:47:31 PM	SiCl4 post valve closed
9/28/2010	6:47:31 PM	Bubbler valve closed
9/28/2010	6:47:31 PM	Main Vac valve opened
9/28/2010	6:47:31 PM	Bypass valve opened
9/28/2010	6:47:31 PM	Helium MFC set to  0.000000
9/28/2010	6:47:31 PM	H2 MFC set to  0.000000
9/28/2010	6:47:31 PM	BCl3 MFC set to  0.000000
9/28/2010	6:47:31 PM	PHl3 MFC set to  0.000000
9/28/2010	6:47:31 PM	SiCl4 MFC set to  0.000000
9/28/2010	6:47:31 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	6:47:31 PM	Tube furnace set to 0
9/28/2010	6:48:31 PM	H2 valve closed
9/28/2010	6:48:31 PM	BCl3 valve closed
9/28/2010	6:48:31 PM	PH3 valve closed
9/28/2010	6:48:31 PM	SiCl4 pre valve closed
9/28/2010	6:48:31 PM	SiCl4 post valve closed
9/28/2010	6:48:31 PM	Bubbler valve closed
9/28/2010	6:48:31 PM	Helium valve opened
9/28/2010	6:48:31 PM	Main Vac valve opened
9/28/2010	6:48:31 PM	Bypass valve opened
9/28/2010	6:48:31 PM	Helium MFC set to  100.000000
9/28/2010	6:48:31 PM	H2 MFC set to  0.000000
9/28/2010	6:48:31 PM	BCl3 MFC set to  0.000000
9/28/2010	6:48:31 PM	PHl3 MFC set to  0.000000
9/28/2010	6:48:31 PM	SiCl4 MFC set to  0.000000
9/28/2010	6:48:31 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	6:48:31 PM	Tube furnace set to 0
9/28/2010	6:49:31 PM	Helium valve closed
9/28/2010	6:49:31 PM	H2 valve closed
9/28/2010	6:49:31 PM	BCl3 valve closed
9/28/2010	6:49:31 PM	PH3 valve closed
9/28/2010	6:49:31 PM	SiCl4 pre valve closed
9/28/2010	6:49:31 PM	SiCl4 post valve closed
9/28/2010	6:49:31 PM	Bubbler valve closed
9/28/2010	6:49:31 PM	Main Vac valve opened
9/28/2010	6:49:31 PM	Bypass valve opened
9/28/2010	6:49:31 PM	Helium MFC set to  0.000000
9/28/2010	6:49:31 PM	H2 MFC set to  0.000000
9/28/2010	6:49:31 PM	BCl3 MFC set to  0.000000
9/28/2010	6:49:31 PM	PHl3 MFC set to  0.000000
9/28/2010	6:49:31 PM	SiCl4 MFC set to  0.000000
9/28/2010	6:49:31 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	6:49:31 PM	Tube furnace set to 0
9/28/2010	6:50:31 PM	H2 valve closed
9/28/2010	6:50:31 PM	BCl3 valve closed
9/28/2010	6:50:31 PM	PH3 valve closed
9/28/2010	6:50:31 PM	SiCl4 pre valve closed
9/28/2010	6:50:31 PM	SiCl4 post valve closed
9/28/2010	6:50:31 PM	Bubbler valve closed
9/28/2010	6:50:31 PM	Helium valve opened
9/28/2010	6:50:31 PM	Main Vac valve opened
9/28/2010	6:50:31 PM	Bypass valve opened
9/28/2010	6:50:31 PM	Helium MFC set to  100.000000
9/28/2010	6:50:31 PM	H2 MFC set to  0.000000
9/28/2010	6:50:31 PM	BCl3 MFC set to  0.000000
9/28/2010	6:50:31 PM	PHl3 MFC set to  0.000000
9/28/2010	6:50:31 PM	SiCl4 MFC set to  0.000000
9/28/2010	6:50:31 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	6:50:31 PM	Tube furnace set to 0
9/28/2010	6:51:31 PM	Helium valve closed
9/28/2010	6:51:31 PM	H2 valve closed
9/28/2010	6:51:31 PM	BCl3 valve closed
9/28/2010	6:51:31 PM	PH3 valve closed
9/28/2010	6:51:31 PM	SiCl4 pre valve closed
9/28/2010	6:51:31 PM	SiCl4 post valve closed
9/28/2010	6:51:31 PM	Bubbler valve closed
9/28/2010	6:51:31 PM	Main Vac valve opened
9/28/2010	6:51:31 PM	Bypass valve opened
9/28/2010	6:51:31 PM	Helium MFC set to  0.000000
9/28/2010	6:51:31 PM	H2 MFC set to  0.000000
9/28/2010	6:51:31 PM	BCl3 MFC set to  0.000000
9/28/2010	6:51:31 PM	PHl3 MFC set to  0.000000
9/28/2010	6:51:31 PM	SiCl4 MFC set to  0.000000
9/28/2010	6:51:31 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	6:51:32 PM	Tube furnace set to 0
9/28/2010	6:52:32 PM	H2 valve closed
9/28/2010	6:52:32 PM	BCl3 valve closed
9/28/2010	6:52:32 PM	PH3 valve closed
9/28/2010	6:52:32 PM	SiCl4 pre valve closed
9/28/2010	6:52:32 PM	SiCl4 post valve closed
9/28/2010	6:52:32 PM	Bubbler valve closed
9/28/2010	6:52:32 PM	Helium valve opened
9/28/2010	6:52:32 PM	Main Vac valve opened
9/28/2010	6:52:32 PM	Bypass valve opened
9/28/2010	6:52:32 PM	Helium MFC set to  100.000000
9/28/2010	6:52:32 PM	H2 MFC set to  0.000000
9/28/2010	6:52:32 PM	BCl3 MFC set to  0.000000
9/28/2010	6:52:32 PM	PHl3 MFC set to  0.000000
9/28/2010	6:52:32 PM	SiCl4 MFC set to  0.000000
9/28/2010	6:52:32 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	6:52:32 PM	Tube furnace set to 0
9/28/2010	6:53:32 PM	Helium valve closed
9/28/2010	6:53:32 PM	H2 valve closed
9/28/2010	6:53:32 PM	BCl3 valve closed
9/28/2010	6:53:32 PM	PH3 valve closed
9/28/2010	6:53:32 PM	SiCl4 pre valve closed
9/28/2010	6:53:32 PM	SiCl4 post valve closed
9/28/2010	6:53:32 PM	Bubbler valve closed
9/28/2010	6:53:32 PM	Main Vac valve opened
9/28/2010	6:53:32 PM	Bypass valve opened
9/28/2010	6:53:32 PM	Helium MFC set to  0.000000
9/28/2010	6:53:32 PM	H2 MFC set to  0.000000
9/28/2010	6:53:32 PM	BCl3 MFC set to  0.000000
9/28/2010	6:53:32 PM	PHl3 MFC set to  0.000000
9/28/2010	6:53:32 PM	SiCl4 MFC set to  0.000000
9/28/2010	6:53:32 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	6:53:32 PM	Tube furnace set to 0
9/28/2010	6:54:32 PM	H2 valve closed
9/28/2010	6:54:32 PM	BCl3 valve closed
9/28/2010	6:54:32 PM	PH3 valve closed
9/28/2010	6:54:32 PM	SiCl4 pre valve closed
9/28/2010	6:54:32 PM	SiCl4 post valve closed
9/28/2010	6:54:32 PM	Bubbler valve closed
9/28/2010	6:54:32 PM	Helium valve opened
9/28/2010	6:54:32 PM	Main Vac valve opened
9/28/2010	6:54:32 PM	Bypass valve opened
9/28/2010	6:54:32 PM	Helium MFC set to  100.000000
9/28/2010	6:54:32 PM	H2 MFC set to  0.000000
9/28/2010	6:54:32 PM	BCl3 MFC set to  0.000000
9/28/2010	6:54:32 PM	PHl3 MFC set to  0.000000
9/28/2010	6:54:32 PM	SiCl4 MFC set to  0.000000
9/28/2010	6:54:32 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	6:54:32 PM	Tube furnace set to 0
9/28/2010	6:55:32 PM	Helium valve closed
9/28/2010	6:55:32 PM	H2 valve closed
9/28/2010	6:55:32 PM	BCl3 valve closed
9/28/2010	6:55:32 PM	PH3 valve closed
9/28/2010	6:55:32 PM	SiCl4 pre valve closed
9/28/2010	6:55:32 PM	SiCl4 post valve closed
9/28/2010	6:55:32 PM	Bubbler valve closed
9/28/2010	6:55:32 PM	Main Vac valve opened
9/28/2010	6:55:32 PM	Bypass valve opened
9/28/2010	6:55:32 PM	Helium MFC set to  0.000000
9/28/2010	6:55:32 PM	H2 MFC set to  0.000000
9/28/2010	6:55:32 PM	BCl3 MFC set to  0.000000
9/28/2010	6:55:32 PM	PHl3 MFC set to  0.000000
9/28/2010	6:55:32 PM	SiCl4 MFC set to  0.000000
9/28/2010	6:55:32 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	6:55:32 PM	Tube furnace set to 0
9/28/2010	6:55:33 PM	Run finished at 6:55 PM
9/28/2010	6:55:33 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/28/2010	6:59:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/28/2010	6:59:28 PM	Recipe started at 6:59 PM
9/28/2010	6:59:28 PM	Helium valve closed
9/28/2010	6:59:28 PM	H2 valve closed
9/28/2010	6:59:28 PM	BCl3 valve closed
9/28/2010	6:59:28 PM	PH3 valve closed
9/28/2010	6:59:28 PM	SiCl4 pre valve closed
9/28/2010	6:59:28 PM	SiCl4 post valve closed
9/28/2010	6:59:28 PM	Main Vac valve closed
9/28/2010	6:59:28 PM	Bubbler valve closed
9/28/2010	6:59:28 PM	Bypass valve opened
9/28/2010	6:59:28 PM	Helium MFC set to  0.000000
9/28/2010	6:59:28 PM	H2 MFC set to  0.000000
9/28/2010	6:59:28 PM	BCl3 MFC set to  0.000000
9/28/2010	6:59:28 PM	PHl3 MFC set to  0.000000
9/28/2010	6:59:28 PM	SiCl4 MFC set to  0.000000
9/28/2010	6:59:28 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	6:59:28 PM	Tube furnace set to 0
9/28/2010	6:59:28 PM	Helium valve closed
9/28/2010	6:59:28 PM	H2 valve closed
9/28/2010	6:59:28 PM	BCl3 valve closed
9/28/2010	6:59:28 PM	PH3 valve closed
9/28/2010	6:59:28 PM	SiCl4 pre valve closed
9/28/2010	6:59:28 PM	SiCl4 post valve closed
9/28/2010	6:59:28 PM	Bubbler valve closed
9/28/2010	6:59:28 PM	Main Vac valve opened
9/28/2010	6:59:29 PM	Bypass valve opened
9/28/2010	6:59:29 PM	Helium MFC set to  0.000000
9/28/2010	6:59:29 PM	H2 MFC set to  0.000000
9/28/2010	6:59:29 PM	BCl3 MFC set to  0.000000
9/28/2010	6:59:29 PM	PHl3 MFC set to  0.000000
9/28/2010	6:59:29 PM	SiCl4 MFC set to  0.000000
9/28/2010	6:59:29 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	6:59:29 PM	Tube furnace set to 0
9/28/2010	7:00:29 PM	H2 valve closed
9/28/2010	7:00:29 PM	BCl3 valve closed
9/28/2010	7:00:29 PM	PH3 valve closed
9/28/2010	7:00:29 PM	SiCl4 pre valve closed
9/28/2010	7:00:29 PM	SiCl4 post valve closed
9/28/2010	7:00:29 PM	Bubbler valve closed
9/28/2010	7:00:29 PM	Helium valve opened
9/28/2010	7:00:29 PM	Main Vac valve opened
9/28/2010	7:00:29 PM	Bypass valve opened
9/28/2010	7:00:29 PM	Helium MFC set to  100.000000
9/28/2010	7:00:29 PM	H2 MFC set to  0.000000
9/28/2010	7:00:29 PM	BCl3 MFC set to  0.000000
9/28/2010	7:00:29 PM	PHl3 MFC set to  0.000000
9/28/2010	7:00:29 PM	SiCl4 MFC set to  0.000000
9/28/2010	7:00:29 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	7:00:29 PM	Tube furnace set to 0
9/28/2010	7:01:29 PM	Helium valve closed
9/28/2010	7:01:29 PM	H2 valve closed
9/28/2010	7:01:29 PM	BCl3 valve closed
9/28/2010	7:01:29 PM	PH3 valve closed
9/28/2010	7:01:29 PM	SiCl4 pre valve closed
9/28/2010	7:01:29 PM	SiCl4 post valve closed
9/28/2010	7:01:29 PM	Bubbler valve closed
9/28/2010	7:01:29 PM	Main Vac valve opened
9/28/2010	7:01:29 PM	Bypass valve opened
9/28/2010	7:01:29 PM	Helium MFC set to  0.000000
9/28/2010	7:01:29 PM	H2 MFC set to  0.000000
9/28/2010	7:01:29 PM	BCl3 MFC set to  0.000000
9/28/2010	7:01:29 PM	PHl3 MFC set to  0.000000
9/28/2010	7:01:29 PM	SiCl4 MFC set to  0.000000
9/28/2010	7:01:29 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	7:01:29 PM	Tube furnace set to 0
9/28/2010	7:02:29 PM	H2 valve closed
9/28/2010	7:02:29 PM	BCl3 valve closed
9/28/2010	7:02:29 PM	PH3 valve closed
9/28/2010	7:02:29 PM	SiCl4 pre valve closed
9/28/2010	7:02:29 PM	SiCl4 post valve closed
9/28/2010	7:02:29 PM	Bubbler valve closed
9/28/2010	7:02:29 PM	Helium valve opened
9/28/2010	7:02:29 PM	Main Vac valve opened
9/28/2010	7:02:29 PM	Bypass valve opened
9/28/2010	7:02:29 PM	Helium MFC set to  100.000000
9/28/2010	7:02:29 PM	H2 MFC set to  0.000000
9/28/2010	7:02:29 PM	BCl3 MFC set to  0.000000
9/28/2010	7:02:29 PM	PHl3 MFC set to  0.000000
9/28/2010	7:02:29 PM	SiCl4 MFC set to  0.000000
9/28/2010	7:02:29 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	7:02:29 PM	Tube furnace set to 0
9/28/2010	7:03:29 PM	Helium valve closed
9/28/2010	7:03:29 PM	H2 valve closed
9/28/2010	7:03:29 PM	BCl3 valve closed
9/28/2010	7:03:29 PM	PH3 valve closed
9/28/2010	7:03:29 PM	SiCl4 pre valve closed
9/28/2010	7:03:29 PM	SiCl4 post valve closed
9/28/2010	7:03:29 PM	Bubbler valve closed
9/28/2010	7:03:29 PM	Main Vac valve opened
9/28/2010	7:03:29 PM	Bypass valve opened
9/28/2010	7:03:29 PM	Helium MFC set to  0.000000
9/28/2010	7:03:29 PM	H2 MFC set to  0.000000
9/28/2010	7:03:29 PM	BCl3 MFC set to  0.000000
9/28/2010	7:03:29 PM	PHl3 MFC set to  0.000000
9/28/2010	7:03:29 PM	SiCl4 MFC set to  0.000000
9/28/2010	7:03:29 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	7:03:29 PM	Tube furnace set to 0
9/28/2010	7:04:29 PM	H2 valve closed
9/28/2010	7:04:29 PM	BCl3 valve closed
9/28/2010	7:04:29 PM	PH3 valve closed
9/28/2010	7:04:29 PM	SiCl4 pre valve closed
9/28/2010	7:04:29 PM	SiCl4 post valve closed
9/28/2010	7:04:29 PM	Bubbler valve closed
9/28/2010	7:04:29 PM	Helium valve opened
9/28/2010	7:04:29 PM	Main Vac valve opened
9/28/2010	7:04:29 PM	Bypass valve opened
9/28/2010	7:04:29 PM	Helium MFC set to  100.000000
9/28/2010	7:04:29 PM	H2 MFC set to  0.000000
9/28/2010	7:04:29 PM	BCl3 MFC set to  0.000000
9/28/2010	7:04:29 PM	PHl3 MFC set to  0.000000
9/28/2010	7:04:29 PM	SiCl4 MFC set to  0.000000
9/28/2010	7:04:29 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	7:04:30 PM	Tube furnace set to 0
9/28/2010	7:05:30 PM	Helium valve closed
9/28/2010	7:05:30 PM	H2 valve closed
9/28/2010	7:05:30 PM	BCl3 valve closed
9/28/2010	7:05:30 PM	PH3 valve closed
9/28/2010	7:05:30 PM	SiCl4 pre valve closed
9/28/2010	7:05:30 PM	SiCl4 post valve closed
9/28/2010	7:05:30 PM	Bubbler valve closed
9/28/2010	7:05:30 PM	Main Vac valve opened
9/28/2010	7:05:30 PM	Bypass valve opened
9/28/2010	7:05:30 PM	Helium MFC set to  0.000000
9/28/2010	7:05:30 PM	H2 MFC set to  0.000000
9/28/2010	7:05:30 PM	BCl3 MFC set to  0.000000
9/28/2010	7:05:30 PM	PHl3 MFC set to  0.000000
9/28/2010	7:05:30 PM	SiCl4 MFC set to  0.000000
9/28/2010	7:05:30 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	7:05:30 PM	Tube furnace set to 0
9/28/2010	7:06:30 PM	H2 valve closed
9/28/2010	7:06:30 PM	BCl3 valve closed
9/28/2010	7:06:30 PM	PH3 valve closed
9/28/2010	7:06:30 PM	SiCl4 pre valve closed
9/28/2010	7:06:30 PM	SiCl4 post valve closed
9/28/2010	7:06:30 PM	Bubbler valve closed
9/28/2010	7:06:30 PM	Helium valve opened
9/28/2010	7:06:30 PM	Main Vac valve opened
9/28/2010	7:06:30 PM	Bypass valve opened
9/28/2010	7:06:30 PM	Helium MFC set to  100.000000
9/28/2010	7:06:30 PM	H2 MFC set to  0.000000
9/28/2010	7:06:30 PM	BCl3 MFC set to  0.000000
9/28/2010	7:06:30 PM	PHl3 MFC set to  0.000000
9/28/2010	7:06:30 PM	SiCl4 MFC set to  0.000000
9/28/2010	7:06:30 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	7:06:30 PM	Tube furnace set to 0
9/28/2010	7:07:30 PM	Helium valve closed
9/28/2010	7:07:30 PM	H2 valve closed
9/28/2010	7:07:30 PM	BCl3 valve closed
9/28/2010	7:07:30 PM	PH3 valve closed
9/28/2010	7:07:30 PM	SiCl4 pre valve closed
9/28/2010	7:07:30 PM	SiCl4 post valve closed
9/28/2010	7:07:30 PM	Bubbler valve closed
9/28/2010	7:07:30 PM	Main Vac valve opened
9/28/2010	7:07:30 PM	Bypass valve opened
9/28/2010	7:07:30 PM	Helium MFC set to  0.000000
9/28/2010	7:07:30 PM	H2 MFC set to  0.000000
9/28/2010	7:07:30 PM	BCl3 MFC set to  0.000000
9/28/2010	7:07:30 PM	PHl3 MFC set to  0.000000
9/28/2010	7:07:30 PM	SiCl4 MFC set to  0.000000
9/28/2010	7:07:30 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	7:07:30 PM	Tube furnace set to 0
9/28/2010	7:08:30 PM	H2 valve closed
9/28/2010	7:08:30 PM	BCl3 valve closed
9/28/2010	7:08:30 PM	PH3 valve closed
9/28/2010	7:08:30 PM	SiCl4 pre valve closed
9/28/2010	7:08:30 PM	SiCl4 post valve closed
9/28/2010	7:08:30 PM	Bubbler valve closed
9/28/2010	7:08:30 PM	Helium valve opened
9/28/2010	7:08:30 PM	Main Vac valve opened
9/28/2010	7:08:30 PM	Bypass valve opened
9/28/2010	7:08:30 PM	Helium MFC set to  100.000000
9/28/2010	7:08:30 PM	H2 MFC set to  0.000000
9/28/2010	7:08:30 PM	BCl3 MFC set to  0.000000
9/28/2010	7:08:30 PM	PHl3 MFC set to  0.000000
9/28/2010	7:08:30 PM	SiCl4 MFC set to  0.000000
9/28/2010	7:08:30 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	7:08:30 PM	Tube furnace set to 0
9/28/2010	7:09:30 PM	Helium valve closed
9/28/2010	7:09:30 PM	H2 valve closed
9/28/2010	7:09:30 PM	BCl3 valve closed
9/28/2010	7:09:30 PM	PH3 valve closed
9/28/2010	7:09:30 PM	SiCl4 pre valve closed
9/28/2010	7:09:30 PM	SiCl4 post valve closed
9/28/2010	7:09:30 PM	Bubbler valve closed
9/28/2010	7:09:30 PM	Main Vac valve opened
9/28/2010	7:09:30 PM	Bypass valve opened
9/28/2010	7:09:30 PM	Helium MFC set to  0.000000
9/28/2010	7:09:30 PM	H2 MFC set to  0.000000
9/28/2010	7:09:30 PM	BCl3 MFC set to  0.000000
9/28/2010	7:09:30 PM	PHl3 MFC set to  0.000000
9/28/2010	7:09:30 PM	SiCl4 MFC set to  0.000000
9/28/2010	7:09:30 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	7:09:31 PM	Tube furnace set to 0
9/28/2010	7:10:31 PM	H2 valve closed
9/28/2010	7:10:31 PM	BCl3 valve closed
9/28/2010	7:10:31 PM	PH3 valve closed
9/28/2010	7:10:31 PM	SiCl4 pre valve closed
9/28/2010	7:10:31 PM	SiCl4 post valve closed
9/28/2010	7:10:31 PM	Bubbler valve closed
9/28/2010	7:10:31 PM	Helium valve opened
9/28/2010	7:10:31 PM	Main Vac valve opened
9/28/2010	7:10:31 PM	Bypass valve opened
9/28/2010	7:10:31 PM	Helium MFC set to  100.000000
9/28/2010	7:10:31 PM	H2 MFC set to  0.000000
9/28/2010	7:10:31 PM	BCl3 MFC set to  0.000000
9/28/2010	7:10:31 PM	PHl3 MFC set to  0.000000
9/28/2010	7:10:31 PM	SiCl4 MFC set to  0.000000
9/28/2010	7:10:31 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	7:10:31 PM	Tube furnace set to 0
9/28/2010	7:11:31 PM	Helium valve closed
9/28/2010	7:11:31 PM	H2 valve closed
9/28/2010	7:11:31 PM	BCl3 valve closed
9/28/2010	7:11:31 PM	PH3 valve closed
9/28/2010	7:11:31 PM	SiCl4 pre valve closed
9/28/2010	7:11:31 PM	SiCl4 post valve closed
9/28/2010	7:11:31 PM	Bubbler valve closed
9/28/2010	7:11:31 PM	Main Vac valve opened
9/28/2010	7:11:31 PM	Bypass valve opened
9/28/2010	7:11:31 PM	Helium MFC set to  0.000000
9/28/2010	7:11:31 PM	H2 MFC set to  0.000000
9/28/2010	7:11:31 PM	BCl3 MFC set to  0.000000
9/28/2010	7:11:31 PM	PHl3 MFC set to  0.000000
9/28/2010	7:11:31 PM	SiCl4 MFC set to  0.000000
9/28/2010	7:11:31 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	7:11:31 PM	Tube furnace set to 0
9/28/2010	7:12:31 PM	H2 valve closed
9/28/2010	7:12:31 PM	BCl3 valve closed
9/28/2010	7:12:31 PM	PH3 valve closed
9/28/2010	7:12:31 PM	SiCl4 pre valve closed
9/28/2010	7:12:31 PM	SiCl4 post valve closed
9/28/2010	7:12:31 PM	Bubbler valve closed
9/28/2010	7:12:31 PM	Helium valve opened
9/28/2010	7:12:31 PM	Main Vac valve opened
9/28/2010	7:12:31 PM	Bypass valve opened
9/28/2010	7:12:31 PM	Helium MFC set to  100.000000
9/28/2010	7:12:31 PM	H2 MFC set to  0.000000
9/28/2010	7:12:31 PM	BCl3 MFC set to  0.000000
9/28/2010	7:12:31 PM	PHl3 MFC set to  0.000000
9/28/2010	7:12:31 PM	SiCl4 MFC set to  0.000000
9/28/2010	7:12:31 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	7:12:31 PM	Tube furnace set to 0
9/28/2010	7:13:31 PM	Helium valve closed
9/28/2010	7:13:31 PM	H2 valve closed
9/28/2010	7:13:31 PM	BCl3 valve closed
9/28/2010	7:13:31 PM	PH3 valve closed
9/28/2010	7:13:31 PM	SiCl4 pre valve closed
9/28/2010	7:13:31 PM	SiCl4 post valve closed
9/28/2010	7:13:31 PM	Bubbler valve closed
9/28/2010	7:13:31 PM	Main Vac valve opened
9/28/2010	7:13:31 PM	Bypass valve opened
9/28/2010	7:13:31 PM	Helium MFC set to  0.000000
9/28/2010	7:13:31 PM	H2 MFC set to  0.000000
9/28/2010	7:13:31 PM	BCl3 MFC set to  0.000000
9/28/2010	7:13:31 PM	PHl3 MFC set to  0.000000
9/28/2010	7:13:31 PM	SiCl4 MFC set to  0.000000
9/28/2010	7:13:31 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	7:13:31 PM	Tube furnace set to 0
9/28/2010	7:14:31 PM	H2 valve closed
9/28/2010	7:14:31 PM	BCl3 valve closed
9/28/2010	7:14:31 PM	PH3 valve closed
9/28/2010	7:14:31 PM	SiCl4 pre valve closed
9/28/2010	7:14:31 PM	SiCl4 post valve closed
9/28/2010	7:14:31 PM	Bubbler valve closed
9/28/2010	7:14:31 PM	Helium valve opened
9/28/2010	7:14:31 PM	Main Vac valve opened
9/28/2010	7:14:31 PM	Bypass valve opened
9/28/2010	7:14:31 PM	Helium MFC set to  100.000000
9/28/2010	7:14:31 PM	H2 MFC set to  0.000000
9/28/2010	7:14:31 PM	BCl3 MFC set to  0.000000
9/28/2010	7:14:31 PM	PHl3 MFC set to  0.000000
9/28/2010	7:14:31 PM	SiCl4 MFC set to  0.000000
9/28/2010	7:14:31 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	7:14:32 PM	Tube furnace set to 0
9/28/2010	7:15:32 PM	Helium valve closed
9/28/2010	7:15:32 PM	H2 valve closed
9/28/2010	7:15:32 PM	BCl3 valve closed
9/28/2010	7:15:32 PM	PH3 valve closed
9/28/2010	7:15:32 PM	SiCl4 pre valve closed
9/28/2010	7:15:32 PM	SiCl4 post valve closed
9/28/2010	7:15:32 PM	Bubbler valve closed
9/28/2010	7:15:32 PM	Main Vac valve opened
9/28/2010	7:15:32 PM	Bypass valve opened
9/28/2010	7:15:32 PM	Helium MFC set to  0.000000
9/28/2010	7:15:32 PM	H2 MFC set to  0.000000
9/28/2010	7:15:32 PM	BCl3 MFC set to  0.000000
9/28/2010	7:15:32 PM	PHl3 MFC set to  0.000000
9/28/2010	7:15:32 PM	SiCl4 MFC set to  0.000000
9/28/2010	7:15:32 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	7:15:32 PM	Tube furnace set to 0
9/28/2010	7:16:32 PM	H2 valve closed
9/28/2010	7:16:32 PM	BCl3 valve closed
9/28/2010	7:16:32 PM	PH3 valve closed
9/28/2010	7:16:32 PM	SiCl4 pre valve closed
9/28/2010	7:16:32 PM	SiCl4 post valve closed
9/28/2010	7:16:32 PM	Bubbler valve closed
9/28/2010	7:16:32 PM	Helium valve opened
9/28/2010	7:16:32 PM	Main Vac valve opened
9/28/2010	7:16:32 PM	Bypass valve opened
9/28/2010	7:16:32 PM	Helium MFC set to  100.000000
9/28/2010	7:16:32 PM	H2 MFC set to  0.000000
9/28/2010	7:16:32 PM	BCl3 MFC set to  0.000000
9/28/2010	7:16:32 PM	PHl3 MFC set to  0.000000
9/28/2010	7:16:32 PM	SiCl4 MFC set to  0.000000
9/28/2010	7:16:32 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	7:16:32 PM	Tube furnace set to 0
9/28/2010	7:17:32 PM	Helium valve closed
9/28/2010	7:17:32 PM	H2 valve closed
9/28/2010	7:17:32 PM	BCl3 valve closed
9/28/2010	7:17:32 PM	PH3 valve closed
9/28/2010	7:17:32 PM	SiCl4 pre valve closed
9/28/2010	7:17:32 PM	SiCl4 post valve closed
9/28/2010	7:17:32 PM	Bubbler valve closed
9/28/2010	7:17:32 PM	Main Vac valve opened
9/28/2010	7:17:32 PM	Bypass valve opened
9/28/2010	7:17:32 PM	Helium MFC set to  0.000000
9/28/2010	7:17:32 PM	H2 MFC set to  0.000000
9/28/2010	7:17:32 PM	BCl3 MFC set to  0.000000
9/28/2010	7:17:32 PM	PHl3 MFC set to  0.000000
9/28/2010	7:17:32 PM	SiCl4 MFC set to  0.000000
9/28/2010	7:17:32 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	7:17:32 PM	Tube furnace set to 0
9/28/2010	7:18:32 PM	H2 valve closed
9/28/2010	7:18:32 PM	BCl3 valve closed
9/28/2010	7:18:32 PM	PH3 valve closed
9/28/2010	7:18:32 PM	SiCl4 pre valve closed
9/28/2010	7:18:32 PM	SiCl4 post valve closed
9/28/2010	7:18:32 PM	Bubbler valve closed
9/28/2010	7:18:32 PM	Helium valve opened
9/28/2010	7:18:32 PM	Main Vac valve opened
9/28/2010	7:18:32 PM	Bypass valve opened
9/28/2010	7:18:32 PM	Helium MFC set to  100.000000
9/28/2010	7:18:32 PM	H2 MFC set to  0.000000
9/28/2010	7:18:32 PM	BCl3 MFC set to  0.000000
9/28/2010	7:18:32 PM	PHl3 MFC set to  0.000000
9/28/2010	7:18:32 PM	SiCl4 MFC set to  0.000000
9/28/2010	7:18:32 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	7:18:32 PM	Tube furnace set to 0
9/28/2010	7:19:32 PM	Helium valve closed
9/28/2010	7:19:32 PM	H2 valve closed
9/28/2010	7:19:32 PM	BCl3 valve closed
9/28/2010	7:19:32 PM	PH3 valve closed
9/28/2010	7:19:32 PM	SiCl4 pre valve closed
9/28/2010	7:19:32 PM	SiCl4 post valve closed
9/28/2010	7:19:32 PM	Bubbler valve closed
9/28/2010	7:19:32 PM	Main Vac valve opened
9/28/2010	7:19:32 PM	Bypass valve opened
9/28/2010	7:19:32 PM	Helium MFC set to  0.000000
9/28/2010	7:19:32 PM	H2 MFC set to  0.000000
9/28/2010	7:19:32 PM	BCl3 MFC set to  0.000000
9/28/2010	7:19:32 PM	PHl3 MFC set to  0.000000
9/28/2010	7:19:32 PM	SiCl4 MFC set to  0.000000
9/28/2010	7:19:32 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	7:19:33 PM	Tube furnace set to 0
9/28/2010	7:19:34 PM	Run finished at 7:19 PM
9/28/2010	7:19:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/28/2010	7:20:58 PM	Recipe started at 7:20 PM
9/28/2010	7:20:58 PM	Helium valve closed
9/28/2010	7:20:58 PM	BCl3 valve closed
9/28/2010	7:20:58 PM	PH3 valve closed
9/28/2010	7:20:58 PM	SiCl4 pre valve closed
9/28/2010	7:20:58 PM	SiCl4 post valve closed
9/28/2010	7:20:58 PM	Main Vac valve closed
9/28/2010	7:20:58 PM	Bypass valve closed
9/28/2010	7:20:58 PM	Bubbler valve closed
9/28/2010	7:20:58 PM	H2 valve opened
9/28/2010	7:20:58 PM	Helium MFC set to  0.000000
9/28/2010	7:20:58 PM	H2 MFC set to  500.000000
9/28/2010	7:20:58 PM	BCl3 MFC set to  0.000000
9/28/2010	7:20:58 PM	PHl3 MFC set to  0.000000
9/28/2010	7:20:58 PM	SiCl4 MFC set to  0.000000
9/28/2010	7:20:58 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	7:20:59 PM	Tube furnace set to 0
9/28/2010	7:22:17 PM	Helium valve closed
9/28/2010	7:22:17 PM	BCl3 valve closed
9/28/2010	7:22:17 PM	PH3 valve closed
9/28/2010	7:22:17 PM	SiCl4 pre valve closed
9/28/2010	7:22:17 PM	SiCl4 post valve closed
9/28/2010	7:22:17 PM	Main Vac valve closed
9/28/2010	7:22:17 PM	Bypass valve closed
9/28/2010	7:22:17 PM	H2 valve opened
9/28/2010	7:22:17 PM	Bubbler valve opened
9/28/2010	7:22:17 PM	Helium MFC set to  0.000000
9/28/2010	7:22:17 PM	H2 MFC set to  500.000000
9/28/2010	7:22:17 PM	BCl3 MFC set to  0.000000
9/28/2010	7:22:17 PM	PHl3 MFC set to  0.000000
9/28/2010	7:22:17 PM	SiCl4 MFC set to  0.000000
9/28/2010	7:22:17 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	7:22:17 PM	Tube furnace set to 1000
9/28/2010	7:42:17 PM	Helium valve closed
9/28/2010	7:42:17 PM	BCl3 valve closed
9/28/2010	7:42:17 PM	PH3 valve closed
9/28/2010	7:42:17 PM	Main Vac valve closed
9/28/2010	7:42:17 PM	Bypass valve closed
9/28/2010	7:42:17 PM	H2 valve opened
9/28/2010	7:42:17 PM	SiCl4 pre valve opened
9/28/2010	7:42:17 PM	SiCl4 post valve opened
9/28/2010	7:42:17 PM	Bubbler valve opened
9/28/2010	7:42:17 PM	Helium MFC set to  0.000000
9/28/2010	7:42:17 PM	H2 MFC set to  500.000000
9/28/2010	7:42:17 PM	BCl3 MFC set to  0.000000
9/28/2010	7:42:17 PM	PHl3 MFC set to  0.000000
9/28/2010	7:42:17 PM	SiCl4 MFC set to  50.000000
9/28/2010	7:42:17 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	7:42:17 PM	Tube furnace set to 1000
9/28/2010	8:02:17 PM	H2 valve closed
9/28/2010	8:02:17 PM	BCl3 valve closed
9/28/2010	8:02:17 PM	PH3 valve closed
9/28/2010	8:02:17 PM	SiCl4 pre valve closed
9/28/2010	8:02:17 PM	SiCl4 post valve closed
9/28/2010	8:02:17 PM	Main Vac valve closed
9/28/2010	8:02:17 PM	Bypass valve closed
9/28/2010	8:02:17 PM	Helium valve opened
9/28/2010	8:02:17 PM	Bubbler valve opened
9/28/2010	8:02:17 PM	Helium MFC set to  500.000000
9/28/2010	8:02:17 PM	H2 MFC set to  0.000000
9/28/2010	8:02:17 PM	BCl3 MFC set to  0.000000
9/28/2010	8:02:17 PM	PHl3 MFC set to  0.000000
9/28/2010	8:02:17 PM	SiCl4 MFC set to  0.000000
9/28/2010	8:02:17 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	8:02:17 PM	Tube furnace set to 0
9/28/2010	8:22:17 PM	Helium valve closed
9/28/2010	8:22:17 PM	H2 valve closed
9/28/2010	8:22:17 PM	BCl3 valve closed
9/28/2010	8:22:17 PM	PH3 valve closed
9/28/2010	8:22:17 PM	SiCl4 pre valve closed
9/28/2010	8:22:17 PM	SiCl4 post valve closed
9/28/2010	8:22:17 PM	Main Vac valve closed
9/28/2010	8:22:17 PM	Bypass valve closed
9/28/2010	8:22:17 PM	Bubbler valve closed
9/28/2010	8:22:17 PM	Helium MFC set to  0.000000
9/28/2010	8:22:17 PM	H2 MFC set to  0.000000
9/28/2010	8:22:17 PM	BCl3 MFC set to  0.000000
9/28/2010	8:22:17 PM	PHl3 MFC set to  0.000000
9/28/2010	8:22:17 PM	SiCl4 MFC set to  0.000000
9/28/2010	8:22:17 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	8:22:17 PM	Tube furnace set to 0
9/28/2010	8:22:17 PM	Run finished at 8:22 PM
9/28/2010	8:38:00 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/28/2010	8:38:00 PM	Recipe started at 8:38 PM
9/28/2010	8:38:00 PM	H2 valve closed
9/28/2010	8:38:00 PM	BCl3 valve closed
9/28/2010	8:38:00 PM	PH3 valve closed
9/28/2010	8:38:00 PM	SiCl4 pre valve closed
9/28/2010	8:38:00 PM	SiCl4 post valve closed
9/28/2010	8:38:00 PM	Main Vac valve closed
9/28/2010	8:38:00 PM	Bypass valve closed
9/28/2010	8:38:00 PM	Bubbler valve closed
9/28/2010	8:38:00 PM	Helium valve opened
9/28/2010	8:38:00 PM	Helium MFC set to  500.000000
9/28/2010	8:38:00 PM	H2 MFC set to  0.000000
9/28/2010	8:38:00 PM	BCl3 MFC set to  0.000000
9/28/2010	8:38:00 PM	PHl3 MFC set to  0.000000
9/28/2010	8:38:00 PM	SiCl4 MFC set to  0.000000
9/28/2010	8:38:00 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	8:38:01 PM	Tube furnace set to 0
9/28/2010	8:38:07 PM	Helium valve closed
9/28/2010	8:38:07 PM	H2 valve closed
9/28/2010	8:38:07 PM	BCl3 valve closed
9/28/2010	8:38:07 PM	PH3 valve closed
9/28/2010	8:38:07 PM	SiCl4 pre valve closed
9/28/2010	8:38:07 PM	SiCl4 post valve closed
9/28/2010	8:38:07 PM	Main Vac valve closed
9/28/2010	8:38:07 PM	Bypass valve closed
9/28/2010	8:38:07 PM	Bubbler valve closed
9/28/2010	8:38:07 PM	Helium MFC set to  0.000000
9/28/2010	8:38:07 PM	H2 MFC set to  0.000000
9/28/2010	8:38:07 PM	BCl3 MFC set to  0.000000
9/28/2010	8:38:07 PM	PHl3 MFC set to  0.000000
9/28/2010	8:38:07 PM	SiCl4 MFC set to  0.000000
9/28/2010	8:38:07 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	8:38:07 PM	Tube furnace set to 0
9/28/2010	8:38:08 PM	Run finished at 8:38 PM
9/28/2010	8:38:08 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/28/2010	8:41:47 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/28/2010	8:41:48 PM	Recipe started at 8:41 PM
9/28/2010	8:41:48 PM	Helium valve closed
9/28/2010	8:41:48 PM	H2 valve closed
9/28/2010	8:41:48 PM	BCl3 valve closed
9/28/2010	8:41:48 PM	PH3 valve closed
9/28/2010	8:41:48 PM	SiCl4 pre valve closed
9/28/2010	8:41:48 PM	SiCl4 post valve closed
9/28/2010	8:41:48 PM	Main Vac valve closed
9/28/2010	8:41:48 PM	Bubbler valve closed
9/28/2010	8:41:48 PM	Bypass valve opened
9/28/2010	8:41:48 PM	Helium MFC set to  0.000000
9/28/2010	8:41:48 PM	H2 MFC set to  0.000000
9/28/2010	8:41:48 PM	BCl3 MFC set to  0.000000
9/28/2010	8:41:48 PM	PHl3 MFC set to  0.000000
9/28/2010	8:41:48 PM	SiCl4 MFC set to  0.000000
9/28/2010	8:41:48 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	8:41:48 PM	Tube furnace set to 0
9/28/2010	8:42:31 PM	Helium valve closed
9/28/2010	8:42:31 PM	H2 valve closed
9/28/2010	8:42:31 PM	BCl3 valve closed
9/28/2010	8:42:31 PM	PH3 valve closed
9/28/2010	8:42:31 PM	SiCl4 pre valve closed
9/28/2010	8:42:31 PM	SiCl4 post valve closed
9/28/2010	8:42:31 PM	Bubbler valve closed
9/28/2010	8:42:31 PM	Main Vac valve opened
9/28/2010	8:42:31 PM	Bypass valve opened
9/28/2010	8:42:31 PM	Helium MFC set to  0.000000
9/28/2010	8:42:31 PM	H2 MFC set to  0.000000
9/28/2010	8:42:31 PM	BCl3 MFC set to  0.000000
9/28/2010	8:42:31 PM	PHl3 MFC set to  0.000000
9/28/2010	8:42:31 PM	SiCl4 MFC set to  0.000000
9/28/2010	8:42:31 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	8:42:31 PM	Tube furnace set to 0
9/28/2010	8:42:32 PM	Run finished at 8:42 PM
9/28/2010	8:42:32 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/28/2010	8:43:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/28/2010	8:43:51 PM	Recipe started at 8:43 PM
9/28/2010	8:43:51 PM	Helium valve closed
9/28/2010	8:43:51 PM	H2 valve closed
9/28/2010	8:43:51 PM	BCl3 valve closed
9/28/2010	8:43:51 PM	PH3 valve closed
9/28/2010	8:43:51 PM	SiCl4 pre valve closed
9/28/2010	8:43:51 PM	SiCl4 post valve closed
9/28/2010	8:43:51 PM	Main Vac valve closed
9/28/2010	8:43:51 PM	Bubbler valve closed
9/28/2010	8:43:51 PM	Bypass valve opened
9/28/2010	8:43:51 PM	Helium MFC set to  0.000000
9/28/2010	8:43:51 PM	H2 MFC set to  0.000000
9/28/2010	8:43:51 PM	BCl3 MFC set to  0.000000
9/28/2010	8:43:51 PM	PHl3 MFC set to  0.000000
9/28/2010	8:43:51 PM	SiCl4 MFC set to  0.000000
9/28/2010	8:43:51 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	8:43:51 PM	Tube furnace set to 0
9/28/2010	8:43:51 PM	Helium valve closed
9/28/2010	8:43:51 PM	H2 valve closed
9/28/2010	8:43:51 PM	BCl3 valve closed
9/28/2010	8:43:51 PM	PH3 valve closed
9/28/2010	8:43:51 PM	SiCl4 pre valve closed
9/28/2010	8:43:51 PM	SiCl4 post valve closed
9/28/2010	8:43:51 PM	Bubbler valve closed
9/28/2010	8:43:51 PM	Main Vac valve opened
9/28/2010	8:43:51 PM	Bypass valve opened
9/28/2010	8:43:51 PM	Helium MFC set to  0.000000
9/28/2010	8:43:51 PM	H2 MFC set to  0.000000
9/28/2010	8:43:51 PM	BCl3 MFC set to  0.000000
9/28/2010	8:43:51 PM	PHl3 MFC set to  0.000000
9/28/2010	8:43:51 PM	SiCl4 MFC set to  0.000000
9/28/2010	8:43:51 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	8:43:52 PM	Tube furnace set to 0
9/28/2010	8:44:52 PM	H2 valve closed
9/28/2010	8:44:52 PM	BCl3 valve closed
9/28/2010	8:44:52 PM	PH3 valve closed
9/28/2010	8:44:52 PM	SiCl4 pre valve closed
9/28/2010	8:44:52 PM	SiCl4 post valve closed
9/28/2010	8:44:52 PM	Bubbler valve closed
9/28/2010	8:44:52 PM	Helium valve opened
9/28/2010	8:44:52 PM	Main Vac valve opened
9/28/2010	8:44:52 PM	Bypass valve opened
9/28/2010	8:44:52 PM	Helium MFC set to  100.000000
9/28/2010	8:44:52 PM	H2 MFC set to  0.000000
9/28/2010	8:44:52 PM	BCl3 MFC set to  0.000000
9/28/2010	8:44:52 PM	PHl3 MFC set to  0.000000
9/28/2010	8:44:52 PM	SiCl4 MFC set to  0.000000
9/28/2010	8:44:52 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	8:44:52 PM	Tube furnace set to 0
9/28/2010	8:45:52 PM	Helium valve closed
9/28/2010	8:45:52 PM	H2 valve closed
9/28/2010	8:45:52 PM	BCl3 valve closed
9/28/2010	8:45:52 PM	PH3 valve closed
9/28/2010	8:45:52 PM	SiCl4 pre valve closed
9/28/2010	8:45:52 PM	SiCl4 post valve closed
9/28/2010	8:45:52 PM	Bubbler valve closed
9/28/2010	8:45:52 PM	Main Vac valve opened
9/28/2010	8:45:52 PM	Bypass valve opened
9/28/2010	8:45:52 PM	Helium MFC set to  0.000000
9/28/2010	8:45:52 PM	H2 MFC set to  0.000000
9/28/2010	8:45:52 PM	BCl3 MFC set to  0.000000
9/28/2010	8:45:52 PM	PHl3 MFC set to  0.000000
9/28/2010	8:45:52 PM	SiCl4 MFC set to  0.000000
9/28/2010	8:45:52 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	8:45:52 PM	Tube furnace set to 0
9/28/2010	8:46:52 PM	H2 valve closed
9/28/2010	8:46:52 PM	BCl3 valve closed
9/28/2010	8:46:52 PM	PH3 valve closed
9/28/2010	8:46:52 PM	SiCl4 pre valve closed
9/28/2010	8:46:52 PM	SiCl4 post valve closed
9/28/2010	8:46:52 PM	Bubbler valve closed
9/28/2010	8:46:52 PM	Helium valve opened
9/28/2010	8:46:52 PM	Main Vac valve opened
9/28/2010	8:46:52 PM	Bypass valve opened
9/28/2010	8:46:52 PM	Helium MFC set to  100.000000
9/28/2010	8:46:52 PM	H2 MFC set to  0.000000
9/28/2010	8:46:52 PM	BCl3 MFC set to  0.000000
9/28/2010	8:46:52 PM	PHl3 MFC set to  0.000000
9/28/2010	8:46:52 PM	SiCl4 MFC set to  0.000000
9/28/2010	8:46:52 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	8:46:52 PM	Tube furnace set to 0
9/28/2010	8:47:52 PM	Helium valve closed
9/28/2010	8:47:52 PM	H2 valve closed
9/28/2010	8:47:52 PM	BCl3 valve closed
9/28/2010	8:47:52 PM	PH3 valve closed
9/28/2010	8:47:52 PM	SiCl4 pre valve closed
9/28/2010	8:47:52 PM	SiCl4 post valve closed
9/28/2010	8:47:52 PM	Bubbler valve closed
9/28/2010	8:47:52 PM	Main Vac valve opened
9/28/2010	8:47:52 PM	Bypass valve opened
9/28/2010	8:47:52 PM	Helium MFC set to  0.000000
9/28/2010	8:47:52 PM	H2 MFC set to  0.000000
9/28/2010	8:47:52 PM	BCl3 MFC set to  0.000000
9/28/2010	8:47:52 PM	PHl3 MFC set to  0.000000
9/28/2010	8:47:52 PM	SiCl4 MFC set to  0.000000
9/28/2010	8:47:52 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	8:47:52 PM	Tube furnace set to 0
9/28/2010	8:48:52 PM	H2 valve closed
9/28/2010	8:48:52 PM	BCl3 valve closed
9/28/2010	8:48:52 PM	PH3 valve closed
9/28/2010	8:48:52 PM	SiCl4 pre valve closed
9/28/2010	8:48:52 PM	SiCl4 post valve closed
9/28/2010	8:48:52 PM	Bubbler valve closed
9/28/2010	8:48:52 PM	Helium valve opened
9/28/2010	8:48:52 PM	Main Vac valve opened
9/28/2010	8:48:52 PM	Bypass valve opened
9/28/2010	8:48:52 PM	Helium MFC set to  100.000000
9/28/2010	8:48:52 PM	H2 MFC set to  0.000000
9/28/2010	8:48:52 PM	BCl3 MFC set to  0.000000
9/28/2010	8:48:52 PM	PHl3 MFC set to  0.000000
9/28/2010	8:48:52 PM	SiCl4 MFC set to  0.000000
9/28/2010	8:48:52 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	8:48:53 PM	Tube furnace set to 0
9/28/2010	8:49:53 PM	Helium valve closed
9/28/2010	8:49:53 PM	H2 valve closed
9/28/2010	8:49:53 PM	BCl3 valve closed
9/28/2010	8:49:53 PM	PH3 valve closed
9/28/2010	8:49:53 PM	SiCl4 pre valve closed
9/28/2010	8:49:53 PM	SiCl4 post valve closed
9/28/2010	8:49:53 PM	Bubbler valve closed
9/28/2010	8:49:53 PM	Main Vac valve opened
9/28/2010	8:49:53 PM	Bypass valve opened
9/28/2010	8:49:53 PM	Helium MFC set to  0.000000
9/28/2010	8:49:53 PM	H2 MFC set to  0.000000
9/28/2010	8:49:53 PM	BCl3 MFC set to  0.000000
9/28/2010	8:49:53 PM	PHl3 MFC set to  0.000000
9/28/2010	8:49:53 PM	SiCl4 MFC set to  0.000000
9/28/2010	8:49:53 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	8:49:53 PM	Tube furnace set to 0
9/28/2010	8:50:53 PM	H2 valve closed
9/28/2010	8:50:53 PM	BCl3 valve closed
9/28/2010	8:50:53 PM	PH3 valve closed
9/28/2010	8:50:53 PM	SiCl4 pre valve closed
9/28/2010	8:50:53 PM	SiCl4 post valve closed
9/28/2010	8:50:53 PM	Bubbler valve closed
9/28/2010	8:50:53 PM	Helium valve opened
9/28/2010	8:50:53 PM	Main Vac valve opened
9/28/2010	8:50:53 PM	Bypass valve opened
9/28/2010	8:50:53 PM	Helium MFC set to  100.000000
9/28/2010	8:50:53 PM	H2 MFC set to  0.000000
9/28/2010	8:50:53 PM	BCl3 MFC set to  0.000000
9/28/2010	8:50:53 PM	PHl3 MFC set to  0.000000
9/28/2010	8:50:53 PM	SiCl4 MFC set to  0.000000
9/28/2010	8:50:53 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	8:50:53 PM	Tube furnace set to 0
9/28/2010	8:51:53 PM	Helium valve closed
9/28/2010	8:51:53 PM	H2 valve closed
9/28/2010	8:51:53 PM	BCl3 valve closed
9/28/2010	8:51:53 PM	PH3 valve closed
9/28/2010	8:51:53 PM	SiCl4 pre valve closed
9/28/2010	8:51:53 PM	SiCl4 post valve closed
9/28/2010	8:51:53 PM	Bubbler valve closed
9/28/2010	8:51:53 PM	Main Vac valve opened
9/28/2010	8:51:53 PM	Bypass valve opened
9/28/2010	8:51:53 PM	Helium MFC set to  0.000000
9/28/2010	8:51:53 PM	H2 MFC set to  0.000000
9/28/2010	8:51:53 PM	BCl3 MFC set to  0.000000
9/28/2010	8:51:53 PM	PHl3 MFC set to  0.000000
9/28/2010	8:51:53 PM	SiCl4 MFC set to  0.000000
9/28/2010	8:51:53 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	8:51:53 PM	Tube furnace set to 0
9/28/2010	8:52:53 PM	H2 valve closed
9/28/2010	8:52:53 PM	BCl3 valve closed
9/28/2010	8:52:53 PM	PH3 valve closed
9/28/2010	8:52:53 PM	SiCl4 pre valve closed
9/28/2010	8:52:53 PM	SiCl4 post valve closed
9/28/2010	8:52:53 PM	Bubbler valve closed
9/28/2010	8:52:53 PM	Helium valve opened
9/28/2010	8:52:53 PM	Main Vac valve opened
9/28/2010	8:52:53 PM	Bypass valve opened
9/28/2010	8:52:53 PM	Helium MFC set to  100.000000
9/28/2010	8:52:53 PM	H2 MFC set to  0.000000
9/28/2010	8:52:53 PM	BCl3 MFC set to  0.000000
9/28/2010	8:52:53 PM	PHl3 MFC set to  0.000000
9/28/2010	8:52:53 PM	SiCl4 MFC set to  0.000000
9/28/2010	8:52:53 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	8:52:53 PM	Tube furnace set to 0
9/28/2010	8:53:53 PM	Helium valve closed
9/28/2010	8:53:53 PM	H2 valve closed
9/28/2010	8:53:53 PM	BCl3 valve closed
9/28/2010	8:53:53 PM	PH3 valve closed
9/28/2010	8:53:53 PM	SiCl4 pre valve closed
9/28/2010	8:53:53 PM	SiCl4 post valve closed
9/28/2010	8:53:53 PM	Bubbler valve closed
9/28/2010	8:53:53 PM	Main Vac valve opened
9/28/2010	8:53:53 PM	Bypass valve opened
9/28/2010	8:53:53 PM	Helium MFC set to  0.000000
9/28/2010	8:53:53 PM	H2 MFC set to  0.000000
9/28/2010	8:53:53 PM	BCl3 MFC set to  0.000000
9/28/2010	8:53:53 PM	PHl3 MFC set to  0.000000
9/28/2010	8:53:53 PM	SiCl4 MFC set to  0.000000
9/28/2010	8:53:53 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	8:53:54 PM	Tube furnace set to 0
9/28/2010	8:54:54 PM	H2 valve closed
9/28/2010	8:54:54 PM	BCl3 valve closed
9/28/2010	8:54:54 PM	PH3 valve closed
9/28/2010	8:54:54 PM	SiCl4 pre valve closed
9/28/2010	8:54:54 PM	SiCl4 post valve closed
9/28/2010	8:54:54 PM	Bubbler valve closed
9/28/2010	8:54:54 PM	Helium valve opened
9/28/2010	8:54:54 PM	Main Vac valve opened
9/28/2010	8:54:54 PM	Bypass valve opened
9/28/2010	8:54:54 PM	Helium MFC set to  100.000000
9/28/2010	8:54:54 PM	H2 MFC set to  0.000000
9/28/2010	8:54:54 PM	BCl3 MFC set to  0.000000
9/28/2010	8:54:54 PM	PHl3 MFC set to  0.000000
9/28/2010	8:54:54 PM	SiCl4 MFC set to  0.000000
9/28/2010	8:54:54 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	8:54:54 PM	Tube furnace set to 0
9/28/2010	8:55:54 PM	Helium valve closed
9/28/2010	8:55:54 PM	H2 valve closed
9/28/2010	8:55:54 PM	BCl3 valve closed
9/28/2010	8:55:54 PM	PH3 valve closed
9/28/2010	8:55:54 PM	SiCl4 pre valve closed
9/28/2010	8:55:54 PM	SiCl4 post valve closed
9/28/2010	8:55:54 PM	Bubbler valve closed
9/28/2010	8:55:54 PM	Main Vac valve opened
9/28/2010	8:55:54 PM	Bypass valve opened
9/28/2010	8:55:54 PM	Helium MFC set to  0.000000
9/28/2010	8:55:54 PM	H2 MFC set to  0.000000
9/28/2010	8:55:54 PM	BCl3 MFC set to  0.000000
9/28/2010	8:55:54 PM	PHl3 MFC set to  0.000000
9/28/2010	8:55:54 PM	SiCl4 MFC set to  0.000000
9/28/2010	8:55:54 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	8:55:54 PM	Tube furnace set to 0
9/28/2010	8:56:54 PM	H2 valve closed
9/28/2010	8:56:54 PM	BCl3 valve closed
9/28/2010	8:56:54 PM	PH3 valve closed
9/28/2010	8:56:54 PM	SiCl4 pre valve closed
9/28/2010	8:56:54 PM	SiCl4 post valve closed
9/28/2010	8:56:54 PM	Bubbler valve closed
9/28/2010	8:56:54 PM	Helium valve opened
9/28/2010	8:56:54 PM	Main Vac valve opened
9/28/2010	8:56:54 PM	Bypass valve opened
9/28/2010	8:56:54 PM	Helium MFC set to  100.000000
9/28/2010	8:56:54 PM	H2 MFC set to  0.000000
9/28/2010	8:56:54 PM	BCl3 MFC set to  0.000000
9/28/2010	8:56:54 PM	PHl3 MFC set to  0.000000
9/28/2010	8:56:54 PM	SiCl4 MFC set to  0.000000
9/28/2010	8:56:54 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	8:56:54 PM	Tube furnace set to 0
9/28/2010	8:57:54 PM	Helium valve closed
9/28/2010	8:57:54 PM	H2 valve closed
9/28/2010	8:57:54 PM	BCl3 valve closed
9/28/2010	8:57:54 PM	PH3 valve closed
9/28/2010	8:57:54 PM	SiCl4 pre valve closed
9/28/2010	8:57:54 PM	SiCl4 post valve closed
9/28/2010	8:57:54 PM	Bubbler valve closed
9/28/2010	8:57:54 PM	Main Vac valve opened
9/28/2010	8:57:54 PM	Bypass valve opened
9/28/2010	8:57:54 PM	Helium MFC set to  0.000000
9/28/2010	8:57:54 PM	H2 MFC set to  0.000000
9/28/2010	8:57:54 PM	BCl3 MFC set to  0.000000
9/28/2010	8:57:54 PM	PHl3 MFC set to  0.000000
9/28/2010	8:57:54 PM	SiCl4 MFC set to  0.000000
9/28/2010	8:57:54 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	8:57:54 PM	Tube furnace set to 0
9/28/2010	8:58:54 PM	H2 valve closed
9/28/2010	8:58:54 PM	BCl3 valve closed
9/28/2010	8:58:54 PM	PH3 valve closed
9/28/2010	8:58:54 PM	SiCl4 pre valve closed
9/28/2010	8:58:54 PM	SiCl4 post valve closed
9/28/2010	8:58:54 PM	Bubbler valve closed
9/28/2010	8:58:54 PM	Helium valve opened
9/28/2010	8:58:54 PM	Main Vac valve opened
9/28/2010	8:58:54 PM	Bypass valve opened
9/28/2010	8:58:54 PM	Helium MFC set to  100.000000
9/28/2010	8:58:54 PM	H2 MFC set to  0.000000
9/28/2010	8:58:54 PM	BCl3 MFC set to  0.000000
9/28/2010	8:58:54 PM	PHl3 MFC set to  0.000000
9/28/2010	8:58:54 PM	SiCl4 MFC set to  0.000000
9/28/2010	8:58:54 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	8:58:55 PM	Tube furnace set to 0
9/28/2010	8:59:55 PM	Helium valve closed
9/28/2010	8:59:55 PM	H2 valve closed
9/28/2010	8:59:55 PM	BCl3 valve closed
9/28/2010	8:59:55 PM	PH3 valve closed
9/28/2010	8:59:55 PM	SiCl4 pre valve closed
9/28/2010	8:59:55 PM	SiCl4 post valve closed
9/28/2010	8:59:55 PM	Bubbler valve closed
9/28/2010	8:59:55 PM	Main Vac valve opened
9/28/2010	8:59:55 PM	Bypass valve opened
9/28/2010	8:59:55 PM	Helium MFC set to  0.000000
9/28/2010	8:59:55 PM	H2 MFC set to  0.000000
9/28/2010	8:59:55 PM	BCl3 MFC set to  0.000000
9/28/2010	8:59:55 PM	PHl3 MFC set to  0.000000
9/28/2010	8:59:55 PM	SiCl4 MFC set to  0.000000
9/28/2010	8:59:55 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	8:59:55 PM	Tube furnace set to 0
9/28/2010	9:00:55 PM	H2 valve closed
9/28/2010	9:00:55 PM	BCl3 valve closed
9/28/2010	9:00:55 PM	PH3 valve closed
9/28/2010	9:00:55 PM	SiCl4 pre valve closed
9/28/2010	9:00:55 PM	SiCl4 post valve closed
9/28/2010	9:00:55 PM	Bubbler valve closed
9/28/2010	9:00:55 PM	Helium valve opened
9/28/2010	9:00:55 PM	Main Vac valve opened
9/28/2010	9:00:55 PM	Bypass valve opened
9/28/2010	9:00:55 PM	Helium MFC set to  100.000000
9/28/2010	9:00:55 PM	H2 MFC set to  0.000000
9/28/2010	9:00:55 PM	BCl3 MFC set to  0.000000
9/28/2010	9:00:55 PM	PHl3 MFC set to  0.000000
9/28/2010	9:00:55 PM	SiCl4 MFC set to  0.000000
9/28/2010	9:00:55 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	9:00:55 PM	Tube furnace set to 0
9/28/2010	9:01:55 PM	Helium valve closed
9/28/2010	9:01:55 PM	H2 valve closed
9/28/2010	9:01:55 PM	BCl3 valve closed
9/28/2010	9:01:55 PM	PH3 valve closed
9/28/2010	9:01:55 PM	SiCl4 pre valve closed
9/28/2010	9:01:55 PM	SiCl4 post valve closed
9/28/2010	9:01:55 PM	Bubbler valve closed
9/28/2010	9:01:55 PM	Main Vac valve opened
9/28/2010	9:01:55 PM	Bypass valve opened
9/28/2010	9:01:55 PM	Helium MFC set to  0.000000
9/28/2010	9:01:55 PM	H2 MFC set to  0.000000
9/28/2010	9:01:55 PM	BCl3 MFC set to  0.000000
9/28/2010	9:01:55 PM	PHl3 MFC set to  0.000000
9/28/2010	9:01:55 PM	SiCl4 MFC set to  0.000000
9/28/2010	9:01:55 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	9:01:55 PM	Tube furnace set to 0
9/28/2010	9:02:55 PM	H2 valve closed
9/28/2010	9:02:55 PM	BCl3 valve closed
9/28/2010	9:02:55 PM	PH3 valve closed
9/28/2010	9:02:55 PM	SiCl4 pre valve closed
9/28/2010	9:02:55 PM	SiCl4 post valve closed
9/28/2010	9:02:55 PM	Bubbler valve closed
9/28/2010	9:02:55 PM	Helium valve opened
9/28/2010	9:02:55 PM	Main Vac valve opened
9/28/2010	9:02:55 PM	Bypass valve opened
9/28/2010	9:02:55 PM	Helium MFC set to  100.000000
9/28/2010	9:02:55 PM	H2 MFC set to  0.000000
9/28/2010	9:02:55 PM	BCl3 MFC set to  0.000000
9/28/2010	9:02:55 PM	PHl3 MFC set to  0.000000
9/28/2010	9:02:55 PM	SiCl4 MFC set to  0.000000
9/28/2010	9:02:55 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	9:02:55 PM	Tube furnace set to 0
9/28/2010	9:03:55 PM	Helium valve closed
9/28/2010	9:03:55 PM	H2 valve closed
9/28/2010	9:03:55 PM	BCl3 valve closed
9/28/2010	9:03:55 PM	PH3 valve closed
9/28/2010	9:03:55 PM	SiCl4 pre valve closed
9/28/2010	9:03:55 PM	SiCl4 post valve closed
9/28/2010	9:03:55 PM	Bubbler valve closed
9/28/2010	9:03:55 PM	Main Vac valve opened
9/28/2010	9:03:55 PM	Bypass valve opened
9/28/2010	9:03:55 PM	Helium MFC set to  0.000000
9/28/2010	9:03:55 PM	H2 MFC set to  0.000000
9/28/2010	9:03:55 PM	BCl3 MFC set to  0.000000
9/28/2010	9:03:55 PM	PHl3 MFC set to  0.000000
9/28/2010	9:03:55 PM	SiCl4 MFC set to  0.000000
9/28/2010	9:03:55 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	9:03:56 PM	Tube furnace set to 0
9/28/2010	9:03:57 PM	Run finished at 9:03 PM
9/28/2010	9:03:57 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/28/2010	9:04:45 PM	Bypass valve closed
9/28/2010	9:04:45 PM	Main Vac valve closed
9/28/2010	9:04:56 PM	Bypass valve opened
9/28/2010	9:04:57 PM	Main Vac valve opened
9/28/2010	9:05:17 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/28/2010	9:05:28 PM	Recipe started at 9:05 PM
9/28/2010	9:05:28 PM	Helium valve closed
9/28/2010	9:05:28 PM	H2 valve closed
9/28/2010	9:05:28 PM	BCl3 valve closed
9/28/2010	9:05:28 PM	PH3 valve closed
9/28/2010	9:05:28 PM	SiCl4 pre valve closed
9/28/2010	9:05:28 PM	SiCl4 post valve closed
9/28/2010	9:05:28 PM	Main Vac valve closed
9/28/2010	9:05:28 PM	Bubbler valve closed
9/28/2010	9:05:28 PM	Bypass valve opened
9/28/2010	9:05:28 PM	Helium MFC set to  0.000000
9/28/2010	9:05:28 PM	H2 MFC set to  0.000000
9/28/2010	9:05:28 PM	BCl3 MFC set to  0.000000
9/28/2010	9:05:28 PM	PHl3 MFC set to  0.000000
9/28/2010	9:05:28 PM	SiCl4 MFC set to  0.000000
9/28/2010	9:05:28 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	9:05:28 PM	Tube furnace set to 0
9/28/2010	9:05:29 PM	Helium valve closed
9/28/2010	9:05:29 PM	H2 valve closed
9/28/2010	9:05:29 PM	BCl3 valve closed
9/28/2010	9:05:29 PM	PH3 valve closed
9/28/2010	9:05:29 PM	SiCl4 pre valve closed
9/28/2010	9:05:29 PM	SiCl4 post valve closed
9/28/2010	9:05:29 PM	Bubbler valve closed
9/28/2010	9:05:29 PM	Main Vac valve opened
9/28/2010	9:05:29 PM	Bypass valve opened
9/28/2010	9:05:29 PM	Helium MFC set to  0.000000
9/28/2010	9:05:29 PM	H2 MFC set to  0.000000
9/28/2010	9:05:29 PM	BCl3 MFC set to  0.000000
9/28/2010	9:05:29 PM	PHl3 MFC set to  0.000000
9/28/2010	9:05:29 PM	SiCl4 MFC set to  0.000000
9/28/2010	9:05:29 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	9:05:29 PM	Tube furnace set to 0
9/28/2010	9:06:29 PM	H2 valve closed
9/28/2010	9:06:29 PM	BCl3 valve closed
9/28/2010	9:06:29 PM	PH3 valve closed
9/28/2010	9:06:29 PM	SiCl4 pre valve closed
9/28/2010	9:06:29 PM	SiCl4 post valve closed
9/28/2010	9:06:29 PM	Bubbler valve closed
9/28/2010	9:06:29 PM	Helium valve opened
9/28/2010	9:06:29 PM	Main Vac valve opened
9/28/2010	9:06:29 PM	Bypass valve opened
9/28/2010	9:06:29 PM	Helium MFC set to  100.000000
9/28/2010	9:06:29 PM	H2 MFC set to  0.000000
9/28/2010	9:06:29 PM	BCl3 MFC set to  0.000000
9/28/2010	9:06:29 PM	PHl3 MFC set to  0.000000
9/28/2010	9:06:29 PM	SiCl4 MFC set to  0.000000
9/28/2010	9:06:29 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	9:06:29 PM	Tube furnace set to 0
9/28/2010	9:07:29 PM	Helium valve closed
9/28/2010	9:07:29 PM	H2 valve closed
9/28/2010	9:07:29 PM	BCl3 valve closed
9/28/2010	9:07:29 PM	PH3 valve closed
9/28/2010	9:07:29 PM	SiCl4 pre valve closed
9/28/2010	9:07:29 PM	SiCl4 post valve closed
9/28/2010	9:07:29 PM	Bubbler valve closed
9/28/2010	9:07:29 PM	Main Vac valve opened
9/28/2010	9:07:29 PM	Bypass valve opened
9/28/2010	9:07:29 PM	Helium MFC set to  0.000000
9/28/2010	9:07:29 PM	H2 MFC set to  0.000000
9/28/2010	9:07:29 PM	BCl3 MFC set to  0.000000
9/28/2010	9:07:29 PM	PHl3 MFC set to  0.000000
9/28/2010	9:07:29 PM	SiCl4 MFC set to  0.000000
9/28/2010	9:07:29 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	9:07:29 PM	Tube furnace set to 0
9/28/2010	9:08:29 PM	H2 valve closed
9/28/2010	9:08:29 PM	BCl3 valve closed
9/28/2010	9:08:29 PM	PH3 valve closed
9/28/2010	9:08:29 PM	SiCl4 pre valve closed
9/28/2010	9:08:29 PM	SiCl4 post valve closed
9/28/2010	9:08:29 PM	Bubbler valve closed
9/28/2010	9:08:29 PM	Helium valve opened
9/28/2010	9:08:29 PM	Main Vac valve opened
9/28/2010	9:08:29 PM	Bypass valve opened
9/28/2010	9:08:29 PM	Helium MFC set to  100.000000
9/28/2010	9:08:29 PM	H2 MFC set to  0.000000
9/28/2010	9:08:29 PM	BCl3 MFC set to  0.000000
9/28/2010	9:08:29 PM	PHl3 MFC set to  0.000000
9/28/2010	9:08:29 PM	SiCl4 MFC set to  0.000000
9/28/2010	9:08:29 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	9:08:30 PM	Tube furnace set to 0
9/28/2010	9:09:30 PM	Helium valve closed
9/28/2010	9:09:30 PM	H2 valve closed
9/28/2010	9:09:30 PM	BCl3 valve closed
9/28/2010	9:09:30 PM	PH3 valve closed
9/28/2010	9:09:30 PM	SiCl4 pre valve closed
9/28/2010	9:09:30 PM	SiCl4 post valve closed
9/28/2010	9:09:30 PM	Bubbler valve closed
9/28/2010	9:09:30 PM	Main Vac valve opened
9/28/2010	9:09:30 PM	Bypass valve opened
9/28/2010	9:09:30 PM	Helium MFC set to  0.000000
9/28/2010	9:09:30 PM	H2 MFC set to  0.000000
9/28/2010	9:09:30 PM	BCl3 MFC set to  0.000000
9/28/2010	9:09:30 PM	PHl3 MFC set to  0.000000
9/28/2010	9:09:30 PM	SiCl4 MFC set to  0.000000
9/28/2010	9:09:30 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	9:09:30 PM	Tube furnace set to 0
9/28/2010	9:10:30 PM	H2 valve closed
9/28/2010	9:10:30 PM	BCl3 valve closed
9/28/2010	9:10:30 PM	PH3 valve closed
9/28/2010	9:10:30 PM	SiCl4 pre valve closed
9/28/2010	9:10:30 PM	SiCl4 post valve closed
9/28/2010	9:10:30 PM	Bubbler valve closed
9/28/2010	9:10:30 PM	Helium valve opened
9/28/2010	9:10:30 PM	Main Vac valve opened
9/28/2010	9:10:30 PM	Bypass valve opened
9/28/2010	9:10:30 PM	Helium MFC set to  100.000000
9/28/2010	9:10:30 PM	H2 MFC set to  0.000000
9/28/2010	9:10:30 PM	BCl3 MFC set to  0.000000
9/28/2010	9:10:30 PM	PHl3 MFC set to  0.000000
9/28/2010	9:10:30 PM	SiCl4 MFC set to  0.000000
9/28/2010	9:10:30 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	9:10:30 PM	Tube furnace set to 0
9/28/2010	9:11:30 PM	Helium valve closed
9/28/2010	9:11:30 PM	H2 valve closed
9/28/2010	9:11:30 PM	BCl3 valve closed
9/28/2010	9:11:30 PM	PH3 valve closed
9/28/2010	9:11:30 PM	SiCl4 pre valve closed
9/28/2010	9:11:30 PM	SiCl4 post valve closed
9/28/2010	9:11:30 PM	Bubbler valve closed
9/28/2010	9:11:30 PM	Main Vac valve opened
9/28/2010	9:11:30 PM	Bypass valve opened
9/28/2010	9:11:30 PM	Helium MFC set to  0.000000
9/28/2010	9:11:30 PM	H2 MFC set to  0.000000
9/28/2010	9:11:30 PM	BCl3 MFC set to  0.000000
9/28/2010	9:11:30 PM	PHl3 MFC set to  0.000000
9/28/2010	9:11:30 PM	SiCl4 MFC set to  0.000000
9/28/2010	9:11:30 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	9:11:30 PM	Tube furnace set to 0
9/28/2010	9:12:30 PM	H2 valve closed
9/28/2010	9:12:30 PM	BCl3 valve closed
9/28/2010	9:12:30 PM	PH3 valve closed
9/28/2010	9:12:30 PM	SiCl4 pre valve closed
9/28/2010	9:12:30 PM	SiCl4 post valve closed
9/28/2010	9:12:30 PM	Bubbler valve closed
9/28/2010	9:12:30 PM	Helium valve opened
9/28/2010	9:12:30 PM	Main Vac valve opened
9/28/2010	9:12:30 PM	Bypass valve opened
9/28/2010	9:12:30 PM	Helium MFC set to  100.000000
9/28/2010	9:12:30 PM	H2 MFC set to  0.000000
9/28/2010	9:12:30 PM	BCl3 MFC set to  0.000000
9/28/2010	9:12:30 PM	PHl3 MFC set to  0.000000
9/28/2010	9:12:30 PM	SiCl4 MFC set to  0.000000
9/28/2010	9:12:30 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	9:12:30 PM	Tube furnace set to 0
9/28/2010	9:13:30 PM	Helium valve closed
9/28/2010	9:13:30 PM	H2 valve closed
9/28/2010	9:13:30 PM	BCl3 valve closed
9/28/2010	9:13:30 PM	PH3 valve closed
9/28/2010	9:13:30 PM	SiCl4 pre valve closed
9/28/2010	9:13:30 PM	SiCl4 post valve closed
9/28/2010	9:13:30 PM	Bubbler valve closed
9/28/2010	9:13:30 PM	Main Vac valve opened
9/28/2010	9:13:30 PM	Bypass valve opened
9/28/2010	9:13:30 PM	Helium MFC set to  0.000000
9/28/2010	9:13:30 PM	H2 MFC set to  0.000000
9/28/2010	9:13:30 PM	BCl3 MFC set to  0.000000
9/28/2010	9:13:30 PM	PHl3 MFC set to  0.000000
9/28/2010	9:13:30 PM	SiCl4 MFC set to  0.000000
9/28/2010	9:13:30 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	9:13:30 PM	Tube furnace set to 0
9/28/2010	9:14:31 PM	H2 valve closed
9/28/2010	9:14:31 PM	BCl3 valve closed
9/28/2010	9:14:31 PM	PH3 valve closed
9/28/2010	9:14:31 PM	SiCl4 pre valve closed
9/28/2010	9:14:31 PM	SiCl4 post valve closed
9/28/2010	9:14:31 PM	Bubbler valve closed
9/28/2010	9:14:31 PM	Helium valve opened
9/28/2010	9:14:31 PM	Main Vac valve opened
9/28/2010	9:14:31 PM	Bypass valve opened
9/28/2010	9:14:31 PM	Helium MFC set to  100.000000
9/28/2010	9:14:31 PM	H2 MFC set to  0.000000
9/28/2010	9:14:31 PM	BCl3 MFC set to  0.000000
9/28/2010	9:14:31 PM	PHl3 MFC set to  0.000000
9/28/2010	9:14:31 PM	SiCl4 MFC set to  0.000000
9/28/2010	9:14:31 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	9:14:31 PM	Tube furnace set to 0
9/28/2010	9:15:31 PM	Helium valve closed
9/28/2010	9:15:31 PM	H2 valve closed
9/28/2010	9:15:31 PM	BCl3 valve closed
9/28/2010	9:15:31 PM	PH3 valve closed
9/28/2010	9:15:31 PM	SiCl4 pre valve closed
9/28/2010	9:15:31 PM	SiCl4 post valve closed
9/28/2010	9:15:31 PM	Bubbler valve closed
9/28/2010	9:15:31 PM	Main Vac valve opened
9/28/2010	9:15:31 PM	Bypass valve opened
9/28/2010	9:15:31 PM	Helium MFC set to  0.000000
9/28/2010	9:15:31 PM	H2 MFC set to  0.000000
9/28/2010	9:15:31 PM	BCl3 MFC set to  0.000000
9/28/2010	9:15:31 PM	PHl3 MFC set to  0.000000
9/28/2010	9:15:31 PM	SiCl4 MFC set to  0.000000
9/28/2010	9:15:31 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	9:15:31 PM	Tube furnace set to 0
9/28/2010	9:16:31 PM	H2 valve closed
9/28/2010	9:16:31 PM	BCl3 valve closed
9/28/2010	9:16:31 PM	PH3 valve closed
9/28/2010	9:16:31 PM	SiCl4 pre valve closed
9/28/2010	9:16:31 PM	SiCl4 post valve closed
9/28/2010	9:16:31 PM	Bubbler valve closed
9/28/2010	9:16:31 PM	Helium valve opened
9/28/2010	9:16:31 PM	Main Vac valve opened
9/28/2010	9:16:31 PM	Bypass valve opened
9/28/2010	9:16:31 PM	Helium MFC set to  100.000000
9/28/2010	9:16:31 PM	H2 MFC set to  0.000000
9/28/2010	9:16:31 PM	BCl3 MFC set to  0.000000
9/28/2010	9:16:31 PM	PHl3 MFC set to  0.000000
9/28/2010	9:16:31 PM	SiCl4 MFC set to  0.000000
9/28/2010	9:16:31 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	9:16:31 PM	Tube furnace set to 0
9/28/2010	9:17:31 PM	Helium valve closed
9/28/2010	9:17:31 PM	H2 valve closed
9/28/2010	9:17:31 PM	BCl3 valve closed
9/28/2010	9:17:31 PM	PH3 valve closed
9/28/2010	9:17:31 PM	SiCl4 pre valve closed
9/28/2010	9:17:31 PM	SiCl4 post valve closed
9/28/2010	9:17:31 PM	Bubbler valve closed
9/28/2010	9:17:31 PM	Main Vac valve opened
9/28/2010	9:17:31 PM	Bypass valve opened
9/28/2010	9:17:31 PM	Helium MFC set to  0.000000
9/28/2010	9:17:31 PM	H2 MFC set to  0.000000
9/28/2010	9:17:31 PM	BCl3 MFC set to  0.000000
9/28/2010	9:17:31 PM	PHl3 MFC set to  0.000000
9/28/2010	9:17:31 PM	SiCl4 MFC set to  0.000000
9/28/2010	9:17:31 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	9:17:31 PM	Tube furnace set to 0
9/28/2010	9:18:31 PM	H2 valve closed
9/28/2010	9:18:31 PM	BCl3 valve closed
9/28/2010	9:18:31 PM	PH3 valve closed
9/28/2010	9:18:31 PM	SiCl4 pre valve closed
9/28/2010	9:18:31 PM	SiCl4 post valve closed
9/28/2010	9:18:31 PM	Bubbler valve closed
9/28/2010	9:18:31 PM	Helium valve opened
9/28/2010	9:18:31 PM	Main Vac valve opened
9/28/2010	9:18:31 PM	Bypass valve opened
9/28/2010	9:18:31 PM	Helium MFC set to  100.000000
9/28/2010	9:18:31 PM	H2 MFC set to  0.000000
9/28/2010	9:18:31 PM	BCl3 MFC set to  0.000000
9/28/2010	9:18:31 PM	PHl3 MFC set to  0.000000
9/28/2010	9:18:31 PM	SiCl4 MFC set to  0.000000
9/28/2010	9:18:31 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	9:18:31 PM	Tube furnace set to 0
9/28/2010	9:19:31 PM	Helium valve closed
9/28/2010	9:19:31 PM	H2 valve closed
9/28/2010	9:19:31 PM	BCl3 valve closed
9/28/2010	9:19:31 PM	PH3 valve closed
9/28/2010	9:19:32 PM	SiCl4 pre valve closed
9/28/2010	9:19:32 PM	SiCl4 post valve closed
9/28/2010	9:19:32 PM	Bubbler valve closed
9/28/2010	9:19:32 PM	Main Vac valve opened
9/28/2010	9:19:32 PM	Bypass valve opened
9/28/2010	9:19:32 PM	Helium MFC set to  0.000000
9/28/2010	9:19:32 PM	H2 MFC set to  0.000000
9/28/2010	9:19:32 PM	BCl3 MFC set to  0.000000
9/28/2010	9:19:32 PM	PHl3 MFC set to  0.000000
9/28/2010	9:19:32 PM	SiCl4 MFC set to  0.000000
9/28/2010	9:19:32 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	9:19:32 PM	Tube furnace set to 0
9/28/2010	9:20:32 PM	H2 valve closed
9/28/2010	9:20:32 PM	BCl3 valve closed
9/28/2010	9:20:32 PM	PH3 valve closed
9/28/2010	9:20:32 PM	SiCl4 pre valve closed
9/28/2010	9:20:32 PM	SiCl4 post valve closed
9/28/2010	9:20:32 PM	Bubbler valve closed
9/28/2010	9:20:32 PM	Helium valve opened
9/28/2010	9:20:32 PM	Main Vac valve opened
9/28/2010	9:20:32 PM	Bypass valve opened
9/28/2010	9:20:32 PM	Helium MFC set to  100.000000
9/28/2010	9:20:32 PM	H2 MFC set to  0.000000
9/28/2010	9:20:32 PM	BCl3 MFC set to  0.000000
9/28/2010	9:20:32 PM	PHl3 MFC set to  0.000000
9/28/2010	9:20:32 PM	SiCl4 MFC set to  0.000000
9/28/2010	9:20:32 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	9:20:32 PM	Tube furnace set to 0
9/28/2010	9:21:32 PM	Helium valve closed
9/28/2010	9:21:32 PM	H2 valve closed
9/28/2010	9:21:32 PM	BCl3 valve closed
9/28/2010	9:21:32 PM	PH3 valve closed
9/28/2010	9:21:32 PM	SiCl4 pre valve closed
9/28/2010	9:21:32 PM	SiCl4 post valve closed
9/28/2010	9:21:32 PM	Bubbler valve closed
9/28/2010	9:21:32 PM	Main Vac valve opened
9/28/2010	9:21:32 PM	Bypass valve opened
9/28/2010	9:21:32 PM	Helium MFC set to  0.000000
9/28/2010	9:21:32 PM	H2 MFC set to  0.000000
9/28/2010	9:21:32 PM	BCl3 MFC set to  0.000000
9/28/2010	9:21:32 PM	PHl3 MFC set to  0.000000
9/28/2010	9:21:32 PM	SiCl4 MFC set to  0.000000
9/28/2010	9:21:32 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	9:21:32 PM	Tube furnace set to 0
9/28/2010	9:22:32 PM	H2 valve closed
9/28/2010	9:22:32 PM	BCl3 valve closed
9/28/2010	9:22:32 PM	PH3 valve closed
9/28/2010	9:22:32 PM	SiCl4 pre valve closed
9/28/2010	9:22:32 PM	SiCl4 post valve closed
9/28/2010	9:22:32 PM	Bubbler valve closed
9/28/2010	9:22:32 PM	Helium valve opened
9/28/2010	9:22:32 PM	Main Vac valve opened
9/28/2010	9:22:32 PM	Bypass valve opened
9/28/2010	9:22:32 PM	Helium MFC set to  100.000000
9/28/2010	9:22:32 PM	H2 MFC set to  0.000000
9/28/2010	9:22:32 PM	BCl3 MFC set to  0.000000
9/28/2010	9:22:32 PM	PHl3 MFC set to  0.000000
9/28/2010	9:22:32 PM	SiCl4 MFC set to  0.000000
9/28/2010	9:22:32 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	9:22:32 PM	Tube furnace set to 0
9/28/2010	9:23:32 PM	Helium valve closed
9/28/2010	9:23:32 PM	H2 valve closed
9/28/2010	9:23:32 PM	BCl3 valve closed
9/28/2010	9:23:32 PM	PH3 valve closed
9/28/2010	9:23:32 PM	SiCl4 pre valve closed
9/28/2010	9:23:32 PM	SiCl4 post valve closed
9/28/2010	9:23:32 PM	Bubbler valve closed
9/28/2010	9:23:32 PM	Main Vac valve opened
9/28/2010	9:23:32 PM	Bypass valve opened
9/28/2010	9:23:32 PM	Helium MFC set to  0.000000
9/28/2010	9:23:32 PM	H2 MFC set to  0.000000
9/28/2010	9:23:32 PM	BCl3 MFC set to  0.000000
9/28/2010	9:23:32 PM	PHl3 MFC set to  0.000000
9/28/2010	9:23:32 PM	SiCl4 MFC set to  0.000000
9/28/2010	9:23:32 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	9:23:32 PM	Tube furnace set to 0
9/28/2010	9:24:32 PM	H2 valve closed
9/28/2010	9:24:32 PM	BCl3 valve closed
9/28/2010	9:24:32 PM	PH3 valve closed
9/28/2010	9:24:32 PM	SiCl4 pre valve closed
9/28/2010	9:24:32 PM	SiCl4 post valve closed
9/28/2010	9:24:32 PM	Bubbler valve closed
9/28/2010	9:24:32 PM	Helium valve opened
9/28/2010	9:24:32 PM	Main Vac valve opened
9/28/2010	9:24:32 PM	Bypass valve opened
9/28/2010	9:24:32 PM	Helium MFC set to  100.000000
9/28/2010	9:24:32 PM	H2 MFC set to  0.000000
9/28/2010	9:24:32 PM	BCl3 MFC set to  0.000000
9/28/2010	9:24:32 PM	PHl3 MFC set to  0.000000
9/28/2010	9:24:32 PM	SiCl4 MFC set to  0.000000
9/28/2010	9:24:32 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	9:24:33 PM	Tube furnace set to 0
9/28/2010	9:25:33 PM	Helium valve closed
9/28/2010	9:25:33 PM	H2 valve closed
9/28/2010	9:25:33 PM	BCl3 valve closed
9/28/2010	9:25:33 PM	PH3 valve closed
9/28/2010	9:25:33 PM	SiCl4 pre valve closed
9/28/2010	9:25:33 PM	SiCl4 post valve closed
9/28/2010	9:25:33 PM	Bubbler valve closed
9/28/2010	9:25:33 PM	Main Vac valve opened
9/28/2010	9:25:33 PM	Bypass valve opened
9/28/2010	9:25:33 PM	Helium MFC set to  0.000000
9/28/2010	9:25:33 PM	H2 MFC set to  0.000000
9/28/2010	9:25:33 PM	BCl3 MFC set to  0.000000
9/28/2010	9:25:33 PM	PHl3 MFC set to  0.000000
9/28/2010	9:25:33 PM	SiCl4 MFC set to  0.000000
9/28/2010	9:25:33 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	9:25:33 PM	Tube furnace set to 0
9/28/2010	9:25:34 PM	Run finished at 9:25 PM
9/28/2010	9:25:34 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/28/2010	9:29:58 PM	Recipe started at 9:29 PM
9/28/2010	9:29:58 PM	Helium valve closed
9/28/2010	9:29:58 PM	BCl3 valve closed
9/28/2010	9:29:58 PM	PH3 valve closed
9/28/2010	9:29:58 PM	SiCl4 pre valve closed
9/28/2010	9:29:58 PM	SiCl4 post valve closed
9/28/2010	9:29:58 PM	Main Vac valve closed
9/28/2010	9:29:58 PM	Bypass valve closed
9/28/2010	9:29:58 PM	Bubbler valve closed
9/28/2010	9:29:58 PM	H2 valve opened
9/28/2010	9:29:58 PM	Helium MFC set to  0.000000
9/28/2010	9:29:58 PM	H2 MFC set to  500.000000
9/28/2010	9:29:58 PM	BCl3 MFC set to  0.000000
9/28/2010	9:29:58 PM	PHl3 MFC set to  0.000000
9/28/2010	9:29:58 PM	SiCl4 MFC set to  0.000000
9/28/2010	9:29:58 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	9:29:58 PM	Tube furnace set to 0
9/28/2010	9:31:58 PM	Run aborted at 9:31 PM
9/28/2010	9:31:58 PM	Helium valve closed
9/28/2010	9:31:58 PM	H2 valve closed
9/28/2010	9:31:58 PM	BCl3 valve closed
9/28/2010	9:31:58 PM	PH3 valve closed
9/28/2010	9:31:58 PM	SiCl4 pre valve closed
9/28/2010	9:31:58 PM	SiCl4 post valve closed
9/28/2010	9:31:58 PM	Bypass valve closed
9/28/2010	9:31:58 PM	Main Vac valve closed
9/28/2010	9:31:58 PM	Bubbler valve closed
9/28/2010	9:31:58 PM	Helium MFC set to  0.000000
9/28/2010	9:31:58 PM	H2 MFC set to  0.000000
9/28/2010	9:31:58 PM	BCl3 MFC set to  0.000000
9/28/2010	9:31:58 PM	PHl3 MFC set to  0.000000
9/28/2010	9:31:58 PM	SiCl4 MFC set to  0.000000
9/28/2010	9:31:59 PM	Tube furnace set to 0
9/28/2010	9:32:13 PM	Recipe started at 9:32 PM
9/28/2010	9:32:13 PM	Helium valve closed
9/28/2010	9:32:13 PM	BCl3 valve closed
9/28/2010	9:32:13 PM	PH3 valve closed
9/28/2010	9:32:13 PM	SiCl4 pre valve closed
9/28/2010	9:32:13 PM	SiCl4 post valve closed
9/28/2010	9:32:13 PM	Main Vac valve closed
9/28/2010	9:32:13 PM	Bypass valve closed
9/28/2010	9:32:13 PM	Bubbler valve closed
9/28/2010	9:32:13 PM	H2 valve opened
9/28/2010	9:32:13 PM	Helium MFC set to  0.000000
9/28/2010	9:32:13 PM	H2 MFC set to  500.000000
9/28/2010	9:32:13 PM	BCl3 MFC set to  0.000000
9/28/2010	9:32:13 PM	PHl3 MFC set to  0.000000
9/28/2010	9:32:13 PM	SiCl4 MFC set to  0.000000
9/28/2010	9:32:13 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	9:32:13 PM	Tube furnace set to 0
9/28/2010	10:03:52 PM	Run aborted at 10:03 PM
9/28/2010	10:03:52 PM	Helium valve closed
9/28/2010	10:03:52 PM	H2 valve closed
9/28/2010	10:03:52 PM	BCl3 valve closed
9/28/2010	10:03:52 PM	PH3 valve closed
9/28/2010	10:03:52 PM	SiCl4 pre valve closed
9/28/2010	10:03:52 PM	SiCl4 post valve closed
9/28/2010	10:03:52 PM	Bypass valve closed
9/28/2010	10:03:52 PM	Main Vac valve closed
9/28/2010	10:03:52 PM	Bubbler valve closed
9/28/2010	10:03:52 PM	Helium MFC set to  0.000000
9/28/2010	10:03:52 PM	H2 MFC set to  0.000000
9/28/2010	10:03:52 PM	BCl3 MFC set to  0.000000
9/28/2010	10:03:52 PM	PHl3 MFC set to  0.000000
9/28/2010	10:03:52 PM	SiCl4 MFC set to  0.000000
9/28/2010	10:03:53 PM	Tube furnace set to 0
9/28/2010	10:04:08 PM	Recipe started at 10:04 PM
9/28/2010	10:04:08 PM	Helium valve closed
9/28/2010	10:04:08 PM	BCl3 valve closed
9/28/2010	10:04:08 PM	PH3 valve closed
9/28/2010	10:04:08 PM	SiCl4 pre valve closed
9/28/2010	10:04:08 PM	SiCl4 post valve closed
9/28/2010	10:04:08 PM	Main Vac valve closed
9/28/2010	10:04:08 PM	Bypass valve closed
9/28/2010	10:04:08 PM	Bubbler valve closed
9/28/2010	10:04:08 PM	H2 valve opened
9/28/2010	10:04:08 PM	Helium MFC set to  0.000000
9/28/2010	10:04:08 PM	H2 MFC set to  500.000000
9/28/2010	10:04:08 PM	BCl3 MFC set to  0.000000
9/28/2010	10:04:08 PM	PHl3 MFC set to  0.000000
9/28/2010	10:04:08 PM	SiCl4 MFC set to  0.000000
9/28/2010	10:04:08 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	10:04:08 PM	Tube furnace set to 0
9/28/2010	10:05:10 PM	Run aborted at 10:05 PM
9/28/2010	10:05:10 PM	Helium valve closed
9/28/2010	10:05:10 PM	H2 valve closed
9/28/2010	10:05:10 PM	BCl3 valve closed
9/28/2010	10:05:10 PM	PH3 valve closed
9/28/2010	10:05:10 PM	SiCl4 pre valve closed
9/28/2010	10:05:10 PM	SiCl4 post valve closed
9/28/2010	10:05:10 PM	Bypass valve closed
9/28/2010	10:05:10 PM	Main Vac valve closed
9/28/2010	10:05:10 PM	Bubbler valve closed
9/28/2010	10:05:10 PM	Helium MFC set to  0.000000
9/28/2010	10:05:10 PM	H2 MFC set to  0.000000
9/28/2010	10:05:10 PM	BCl3 MFC set to  0.000000
9/28/2010	10:05:10 PM	PHl3 MFC set to  0.000000
9/28/2010	10:05:10 PM	SiCl4 MFC set to  0.000000
9/28/2010	10:05:10 PM	Tube furnace set to 0
9/28/2010	10:49:20 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/28/2010	10:49:20 PM	Recipe started at 10:49 PM
9/28/2010	10:49:20 PM	Helium valve closed
9/28/2010	10:49:20 PM	H2 valve closed
9/28/2010	10:49:20 PM	BCl3 valve closed
9/28/2010	10:49:20 PM	PH3 valve closed
9/28/2010	10:49:20 PM	SiCl4 pre valve closed
9/28/2010	10:49:20 PM	SiCl4 post valve closed
9/28/2010	10:49:20 PM	Main Vac valve closed
9/28/2010	10:49:20 PM	Bubbler valve closed
9/28/2010	10:49:20 PM	Bypass valve opened
9/28/2010	10:49:20 PM	Helium MFC set to  0.000000
9/28/2010	10:49:20 PM	H2 MFC set to  0.000000
9/28/2010	10:49:20 PM	BCl3 MFC set to  0.000000
9/28/2010	10:49:20 PM	PHl3 MFC set to  0.000000
9/28/2010	10:49:20 PM	SiCl4 MFC set to  0.000000
9/28/2010	10:49:20 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	10:49:21 PM	Tube furnace set to 0
9/28/2010	10:49:48 PM	Run aborted at 10:49 PM
9/28/2010	10:49:48 PM	Helium valve closed
9/28/2010	10:49:48 PM	H2 valve closed
9/28/2010	10:49:48 PM	BCl3 valve closed
9/28/2010	10:49:48 PM	PH3 valve closed
9/28/2010	10:49:48 PM	SiCl4 pre valve closed
9/28/2010	10:49:48 PM	SiCl4 post valve closed
9/28/2010	10:49:48 PM	Bypass valve closed
9/28/2010	10:49:48 PM	Main Vac valve closed
9/28/2010	10:49:48 PM	Bubbler valve closed
9/28/2010	10:49:48 PM	Helium MFC set to  0.000000
9/28/2010	10:49:48 PM	H2 MFC set to  0.000000
9/28/2010	10:49:48 PM	BCl3 MFC set to  0.000000
9/28/2010	10:49:48 PM	PHl3 MFC set to  0.000000
9/28/2010	10:49:48 PM	SiCl4 MFC set to  0.000000
9/28/2010	10:49:48 PM	Tube furnace set to 0
9/28/2010	10:49:48 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/28/2010	10:50:16 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/28/2010	10:50:17 PM	Recipe started at 10:50 PM
9/28/2010	10:50:17 PM	H2 valve closed
9/28/2010	10:50:17 PM	BCl3 valve closed
9/28/2010	10:50:17 PM	PH3 valve closed
9/28/2010	10:50:17 PM	SiCl4 pre valve closed
9/28/2010	10:50:17 PM	SiCl4 post valve closed
9/28/2010	10:50:17 PM	Main Vac valve closed
9/28/2010	10:50:17 PM	Bypass valve closed
9/28/2010	10:50:17 PM	Bubbler valve closed
9/28/2010	10:50:17 PM	Helium valve opened
9/28/2010	10:50:17 PM	Helium MFC set to  500.000000
9/28/2010	10:50:17 PM	H2 MFC set to  0.000000
9/28/2010	10:50:17 PM	BCl3 MFC set to  0.000000
9/28/2010	10:50:17 PM	PHl3 MFC set to  0.000000
9/28/2010	10:50:17 PM	SiCl4 MFC set to  0.000000
9/28/2010	10:50:17 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	10:50:17 PM	Tube furnace set to 0
9/28/2010	10:50:40 PM	Run aborted at 10:50 PM
9/28/2010	10:50:40 PM	Helium valve closed
9/28/2010	10:50:40 PM	H2 valve closed
9/28/2010	10:50:40 PM	BCl3 valve closed
9/28/2010	10:50:40 PM	PH3 valve closed
9/28/2010	10:50:40 PM	SiCl4 pre valve closed
9/28/2010	10:50:40 PM	SiCl4 post valve closed
9/28/2010	10:50:40 PM	Bypass valve closed
9/28/2010	10:50:40 PM	Main Vac valve closed
9/28/2010	10:50:40 PM	Bubbler valve closed
9/28/2010	10:50:40 PM	Helium MFC set to  0.000000
9/28/2010	10:50:40 PM	H2 MFC set to  0.000000
9/28/2010	10:50:40 PM	BCl3 MFC set to  0.000000
9/28/2010	10:50:40 PM	PHl3 MFC set to  0.000000
9/28/2010	10:50:40 PM	SiCl4 MFC set to  0.000000
9/28/2010	10:50:40 PM	Tube furnace set to 0
9/28/2010	10:50:40 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/28/2010	10:50:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/28/2010	10:50:49 PM	Recipe started at 10:50 PM
9/28/2010	10:50:49 PM	Helium valve closed
9/28/2010	10:50:49 PM	H2 valve closed
9/28/2010	10:50:49 PM	BCl3 valve closed
9/28/2010	10:50:49 PM	PH3 valve closed
9/28/2010	10:50:49 PM	SiCl4 pre valve closed
9/28/2010	10:50:49 PM	SiCl4 post valve closed
9/28/2010	10:50:49 PM	Main Vac valve closed
9/28/2010	10:50:49 PM	Bubbler valve closed
9/28/2010	10:50:49 PM	Bypass valve opened
9/28/2010	10:50:49 PM	Helium MFC set to  0.000000
9/28/2010	10:50:49 PM	H2 MFC set to  0.000000
9/28/2010	10:50:49 PM	BCl3 MFC set to  0.000000
9/28/2010	10:50:49 PM	PHl3 MFC set to  0.000000
9/28/2010	10:50:49 PM	SiCl4 MFC set to  0.000000
9/28/2010	10:50:49 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	10:50:49 PM	Tube furnace set to 0
9/28/2010	10:51:02 PM	Run aborted at 10:51 PM
9/28/2010	10:51:02 PM	Helium valve closed
9/28/2010	10:51:02 PM	H2 valve closed
9/28/2010	10:51:02 PM	BCl3 valve closed
9/28/2010	10:51:02 PM	PH3 valve closed
9/28/2010	10:51:02 PM	SiCl4 pre valve closed
9/28/2010	10:51:02 PM	SiCl4 post valve closed
9/28/2010	10:51:02 PM	Bypass valve closed
9/28/2010	10:51:02 PM	Main Vac valve closed
9/28/2010	10:51:02 PM	Bubbler valve closed
9/28/2010	10:51:02 PM	Helium MFC set to  0.000000
9/28/2010	10:51:02 PM	H2 MFC set to  0.000000
9/28/2010	10:51:02 PM	BCl3 MFC set to  0.000000
9/28/2010	10:51:02 PM	PHl3 MFC set to  0.000000
9/28/2010	10:51:02 PM	SiCl4 MFC set to  0.000000
9/28/2010	10:51:02 PM	Tube furnace set to 0
9/28/2010	10:51:02 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/28/2010	10:51:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/28/2010	10:51:16 PM	Recipe started at 10:51 PM
9/28/2010	10:51:16 PM	H2 valve closed
9/28/2010	10:51:16 PM	BCl3 valve closed
9/28/2010	10:51:16 PM	PH3 valve closed
9/28/2010	10:51:16 PM	SiCl4 pre valve closed
9/28/2010	10:51:16 PM	SiCl4 post valve closed
9/28/2010	10:51:16 PM	Main Vac valve closed
9/28/2010	10:51:16 PM	Bypass valve closed
9/28/2010	10:51:16 PM	Bubbler valve closed
9/28/2010	10:51:16 PM	Helium valve opened
9/28/2010	10:51:16 PM	Helium MFC set to  500.000000
9/28/2010	10:51:16 PM	H2 MFC set to  0.000000
9/28/2010	10:51:16 PM	BCl3 MFC set to  0.000000
9/28/2010	10:51:16 PM	PHl3 MFC set to  0.000000
9/28/2010	10:51:16 PM	SiCl4 MFC set to  0.000000
9/28/2010	10:51:16 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	10:51:16 PM	Tube furnace set to 0
9/28/2010	10:51:29 PM	Run aborted at 10:51 PM
9/28/2010	10:51:29 PM	Helium valve closed
9/28/2010	10:51:29 PM	H2 valve closed
9/28/2010	10:51:29 PM	BCl3 valve closed
9/28/2010	10:51:29 PM	PH3 valve closed
9/28/2010	10:51:29 PM	SiCl4 pre valve closed
9/28/2010	10:51:29 PM	SiCl4 post valve closed
9/28/2010	10:51:29 PM	Bypass valve closed
9/28/2010	10:51:29 PM	Main Vac valve closed
9/28/2010	10:51:29 PM	Bubbler valve closed
9/28/2010	10:51:29 PM	Helium MFC set to  0.000000
9/28/2010	10:51:29 PM	H2 MFC set to  0.000000
9/28/2010	10:51:29 PM	BCl3 MFC set to  0.000000
9/28/2010	10:51:29 PM	PHl3 MFC set to  0.000000
9/28/2010	10:51:29 PM	SiCl4 MFC set to  0.000000
9/28/2010	10:51:29 PM	Tube furnace set to 0
9/28/2010	10:51:29 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/28/2010	10:53:29 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/28/2010	10:53:30 PM	Recipe started at 10:53 PM
9/28/2010	10:53:30 PM	Helium valve closed
9/28/2010	10:53:30 PM	H2 valve closed
9/28/2010	10:53:30 PM	BCl3 valve closed
9/28/2010	10:53:30 PM	PH3 valve closed
9/28/2010	10:53:30 PM	SiCl4 pre valve closed
9/28/2010	10:53:30 PM	SiCl4 post valve closed
9/28/2010	10:53:30 PM	Main Vac valve closed
9/28/2010	10:53:30 PM	Bubbler valve closed
9/28/2010	10:53:30 PM	Bypass valve opened
9/28/2010	10:53:30 PM	Helium MFC set to  0.000000
9/28/2010	10:53:30 PM	H2 MFC set to  0.000000
9/28/2010	10:53:30 PM	BCl3 MFC set to  0.000000
9/28/2010	10:53:30 PM	PHl3 MFC set to  0.000000
9/28/2010	10:53:30 PM	SiCl4 MFC set to  0.000000
9/28/2010	10:53:30 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	10:53:30 PM	Tube furnace set to 0
9/28/2010	10:53:42 PM	Run aborted at 10:53 PM
9/28/2010	10:53:42 PM	Helium valve closed
9/28/2010	10:53:42 PM	H2 valve closed
9/28/2010	10:53:42 PM	BCl3 valve closed
9/28/2010	10:53:42 PM	PH3 valve closed
9/28/2010	10:53:42 PM	SiCl4 pre valve closed
9/28/2010	10:53:42 PM	SiCl4 post valve closed
9/28/2010	10:53:42 PM	Bypass valve closed
9/28/2010	10:53:42 PM	Main Vac valve closed
9/28/2010	10:53:42 PM	Bubbler valve closed
9/28/2010	10:53:42 PM	Helium MFC set to  0.000000
9/28/2010	10:53:42 PM	H2 MFC set to  0.000000
9/28/2010	10:53:42 PM	BCl3 MFC set to  0.000000
9/28/2010	10:53:42 PM	PHl3 MFC set to  0.000000
9/28/2010	10:53:42 PM	SiCl4 MFC set to  0.000000
9/28/2010	10:53:42 PM	Tube furnace set to 0
9/28/2010	10:53:42 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/28/2010	10:53:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/28/2010	10:53:45 PM	Recipe started at 10:53 PM
9/28/2010	10:53:45 PM	H2 valve closed
9/28/2010	10:53:45 PM	BCl3 valve closed
9/28/2010	10:53:45 PM	PH3 valve closed
9/28/2010	10:53:45 PM	SiCl4 pre valve closed
9/28/2010	10:53:45 PM	SiCl4 post valve closed
9/28/2010	10:53:45 PM	Main Vac valve closed
9/28/2010	10:53:45 PM	Bypass valve closed
9/28/2010	10:53:45 PM	Bubbler valve closed
9/28/2010	10:53:45 PM	Helium valve opened
9/28/2010	10:53:45 PM	Helium MFC set to  500.000000
9/28/2010	10:53:45 PM	H2 MFC set to  0.000000
9/28/2010	10:53:45 PM	BCl3 MFC set to  0.000000
9/28/2010	10:53:45 PM	PHl3 MFC set to  0.000000
9/28/2010	10:53:45 PM	SiCl4 MFC set to  0.000000
9/28/2010	10:53:45 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	10:53:45 PM	Tube furnace set to 0
9/28/2010	10:54:13 PM	Run aborted at 10:54 PM
9/28/2010	10:54:13 PM	Helium valve closed
9/28/2010	10:54:13 PM	H2 valve closed
9/28/2010	10:54:13 PM	BCl3 valve closed
9/28/2010	10:54:13 PM	PH3 valve closed
9/28/2010	10:54:13 PM	SiCl4 pre valve closed
9/28/2010	10:54:13 PM	SiCl4 post valve closed
9/28/2010	10:54:13 PM	Bypass valve closed
9/28/2010	10:54:13 PM	Main Vac valve closed
9/28/2010	10:54:13 PM	Bubbler valve closed
9/28/2010	10:54:13 PM	Helium MFC set to  0.000000
9/28/2010	10:54:13 PM	H2 MFC set to  0.000000
9/28/2010	10:54:13 PM	BCl3 MFC set to  0.000000
9/28/2010	10:54:13 PM	PHl3 MFC set to  0.000000
9/28/2010	10:54:13 PM	SiCl4 MFC set to  0.000000
9/28/2010	10:54:13 PM	Tube furnace set to 0
9/28/2010	10:54:13 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/28/2010	10:56:17 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/28/2010	10:56:17 PM	Recipe started at 10:56 PM
9/28/2010	10:56:17 PM	H2 valve closed
9/28/2010	10:56:17 PM	BCl3 valve closed
9/28/2010	10:56:17 PM	PH3 valve closed
9/28/2010	10:56:17 PM	SiCl4 pre valve closed
9/28/2010	10:56:17 PM	SiCl4 post valve closed
9/28/2010	10:56:17 PM	Main Vac valve closed
9/28/2010	10:56:17 PM	Bypass valve closed
9/28/2010	10:56:17 PM	Bubbler valve closed
9/28/2010	10:56:17 PM	Helium valve opened
9/28/2010	10:56:17 PM	Helium MFC set to  500.000000
9/28/2010	10:56:17 PM	H2 MFC set to  0.000000
9/28/2010	10:56:17 PM	BCl3 MFC set to  0.000000
9/28/2010	10:56:17 PM	PHl3 MFC set to  0.000000
9/28/2010	10:56:18 PM	SiCl4 MFC set to  0.000000
9/28/2010	10:56:18 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	10:56:18 PM	Tube furnace set to 0
9/28/2010	10:56:22 PM	Run aborted at 10:56 PM
9/28/2010	10:56:22 PM	Helium valve closed
9/28/2010	10:56:22 PM	H2 valve closed
9/28/2010	10:56:22 PM	BCl3 valve closed
9/28/2010	10:56:22 PM	PH3 valve closed
9/28/2010	10:56:22 PM	SiCl4 pre valve closed
9/28/2010	10:56:22 PM	SiCl4 post valve closed
9/28/2010	10:56:22 PM	Bypass valve closed
9/28/2010	10:56:22 PM	Main Vac valve closed
9/28/2010	10:56:22 PM	Bubbler valve closed
9/28/2010	10:56:22 PM	Helium MFC set to  0.000000
9/28/2010	10:56:22 PM	H2 MFC set to  0.000000
9/28/2010	10:56:22 PM	BCl3 MFC set to  0.000000
9/28/2010	10:56:22 PM	PHl3 MFC set to  0.000000
9/28/2010	10:56:22 PM	SiCl4 MFC set to  0.000000
9/28/2010	10:56:22 PM	Tube furnace set to 0
9/28/2010	10:56:22 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/28/2010	10:56:25 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/28/2010	10:56:25 PM	Recipe started at 10:56 PM
9/28/2010	10:56:25 PM	Helium valve closed
9/28/2010	10:56:25 PM	H2 valve closed
9/28/2010	10:56:25 PM	BCl3 valve closed
9/28/2010	10:56:25 PM	PH3 valve closed
9/28/2010	10:56:25 PM	SiCl4 pre valve closed
9/28/2010	10:56:25 PM	SiCl4 post valve closed
9/28/2010	10:56:25 PM	Main Vac valve closed
9/28/2010	10:56:25 PM	Bubbler valve closed
9/28/2010	10:56:25 PM	Bypass valve opened
9/28/2010	10:56:25 PM	Helium MFC set to  0.000000
9/28/2010	10:56:25 PM	H2 MFC set to  0.000000
9/28/2010	10:56:25 PM	BCl3 MFC set to  0.000000
9/28/2010	10:56:25 PM	PHl3 MFC set to  0.000000
9/28/2010	10:56:25 PM	SiCl4 MFC set to  0.000000
9/28/2010	10:56:25 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	10:56:25 PM	Tube furnace set to 0
9/28/2010	10:56:30 PM	Run aborted at 10:56 PM
9/28/2010	10:56:30 PM	Helium valve closed
9/28/2010	10:56:30 PM	H2 valve closed
9/28/2010	10:56:30 PM	BCl3 valve closed
9/28/2010	10:56:30 PM	PH3 valve closed
9/28/2010	10:56:30 PM	SiCl4 pre valve closed
9/28/2010	10:56:30 PM	SiCl4 post valve closed
9/28/2010	10:56:30 PM	Bypass valve closed
9/28/2010	10:56:30 PM	Main Vac valve closed
9/28/2010	10:56:30 PM	Bubbler valve closed
9/28/2010	10:56:30 PM	Helium MFC set to  0.000000
9/28/2010	10:56:30 PM	H2 MFC set to  0.000000
9/28/2010	10:56:30 PM	BCl3 MFC set to  0.000000
9/28/2010	10:56:30 PM	PHl3 MFC set to  0.000000
9/28/2010	10:56:30 PM	SiCl4 MFC set to  0.000000
9/28/2010	10:56:30 PM	Tube furnace set to 0
9/28/2010	10:56:30 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/28/2010	11:08:32 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/28/2010	11:08:33 PM	Recipe started at 11:08 PM
9/28/2010	11:08:33 PM	H2 valve closed
9/28/2010	11:08:33 PM	BCl3 valve closed
9/28/2010	11:08:33 PM	PH3 valve closed
9/28/2010	11:08:33 PM	SiCl4 pre valve closed
9/28/2010	11:08:33 PM	SiCl4 post valve closed
9/28/2010	11:08:33 PM	Main Vac valve closed
9/28/2010	11:08:33 PM	Bypass valve closed
9/28/2010	11:08:33 PM	Bubbler valve closed
9/28/2010	11:08:33 PM	Helium valve opened
9/28/2010	11:08:33 PM	Helium MFC set to  500.000000
9/28/2010	11:08:33 PM	H2 MFC set to  0.000000
9/28/2010	11:08:33 PM	BCl3 MFC set to  0.000000
9/28/2010	11:08:33 PM	PHl3 MFC set to  0.000000
9/28/2010	11:08:33 PM	SiCl4 MFC set to  0.000000
9/28/2010	11:08:33 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	11:08:33 PM	Tube furnace set to 0
9/28/2010	11:09:00 PM	Helium valve closed
9/28/2010	11:09:00 PM	H2 valve closed
9/28/2010	11:09:00 PM	BCl3 valve closed
9/28/2010	11:09:00 PM	PH3 valve closed
9/28/2010	11:09:00 PM	SiCl4 pre valve closed
9/28/2010	11:09:00 PM	SiCl4 post valve closed
9/28/2010	11:09:00 PM	Main Vac valve closed
9/28/2010	11:09:00 PM	Bypass valve closed
9/28/2010	11:09:00 PM	Bubbler valve closed
9/28/2010	11:09:00 PM	Helium MFC set to  0.000000
9/28/2010	11:09:00 PM	H2 MFC set to  0.000000
9/28/2010	11:09:00 PM	BCl3 MFC set to  0.000000
9/28/2010	11:09:00 PM	PHl3 MFC set to  0.000000
9/28/2010	11:09:00 PM	SiCl4 MFC set to  0.000000
9/28/2010	11:09:00 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	11:09:01 PM	Tube furnace set to 0
9/28/2010	11:09:01 PM	Run finished at 11:09 PM
9/28/2010	11:09:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
9/28/2010	11:09:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/28/2010	11:09:16 PM	Recipe started at 11:09 PM
9/28/2010	11:09:16 PM	Helium valve closed
9/28/2010	11:09:16 PM	H2 valve closed
9/28/2010	11:09:16 PM	BCl3 valve closed
9/28/2010	11:09:16 PM	PH3 valve closed
9/28/2010	11:09:16 PM	SiCl4 pre valve closed
9/28/2010	11:09:16 PM	SiCl4 post valve closed
9/28/2010	11:09:16 PM	Main Vac valve closed
9/28/2010	11:09:16 PM	Bubbler valve closed
9/28/2010	11:09:16 PM	Bypass valve opened
9/28/2010	11:09:16 PM	Helium MFC set to  0.000000
9/28/2010	11:09:16 PM	H2 MFC set to  0.000000
9/28/2010	11:09:16 PM	BCl3 MFC set to  0.000000
9/28/2010	11:09:16 PM	PHl3 MFC set to  0.000000
9/28/2010	11:09:16 PM	SiCl4 MFC set to  0.000000
9/28/2010	11:09:16 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	11:09:16 PM	Tube furnace set to 0
9/28/2010	11:09:40 PM	Helium valve closed
9/28/2010	11:09:40 PM	H2 valve closed
9/28/2010	11:09:40 PM	BCl3 valve closed
9/28/2010	11:09:40 PM	PH3 valve closed
9/28/2010	11:09:40 PM	SiCl4 pre valve closed
9/28/2010	11:09:40 PM	SiCl4 post valve closed
9/28/2010	11:09:40 PM	Bubbler valve closed
9/28/2010	11:09:40 PM	Main Vac valve opened
9/28/2010	11:09:40 PM	Bypass valve opened
9/28/2010	11:09:40 PM	Helium MFC set to  0.000000
9/28/2010	11:09:40 PM	H2 MFC set to  0.000000
9/28/2010	11:09:40 PM	BCl3 MFC set to  0.000000
9/28/2010	11:09:40 PM	PHl3 MFC set to  0.000000
9/28/2010	11:09:40 PM	SiCl4 MFC set to  0.000000
9/28/2010	11:09:40 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	11:09:40 PM	Tube furnace set to 0
9/28/2010	11:09:41 PM	Run finished at 11:09 PM
9/28/2010	11:09:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
9/28/2010	11:12:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/28/2010	11:12:47 PM	Recipe started at 11:12 PM
9/28/2010	11:12:47 PM	Helium valve closed
9/28/2010	11:12:47 PM	H2 valve closed
9/28/2010	11:12:47 PM	BCl3 valve closed
9/28/2010	11:12:47 PM	PH3 valve closed
9/28/2010	11:12:47 PM	SiCl4 pre valve closed
9/28/2010	11:12:47 PM	SiCl4 post valve closed
9/28/2010	11:12:47 PM	Main Vac valve closed
9/28/2010	11:12:47 PM	Bubbler valve closed
9/28/2010	11:12:47 PM	Bypass valve opened
9/28/2010	11:12:47 PM	Helium MFC set to  0.000000
9/28/2010	11:12:47 PM	H2 MFC set to  0.000000
9/28/2010	11:12:47 PM	BCl3 MFC set to  0.000000
9/28/2010	11:12:47 PM	PHl3 MFC set to  0.000000
9/28/2010	11:12:47 PM	SiCl4 MFC set to  0.000000
9/28/2010	11:12:47 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	11:12:47 PM	Tube furnace set to 0
9/28/2010	11:12:47 PM	Helium valve closed
9/28/2010	11:12:47 PM	H2 valve closed
9/28/2010	11:12:47 PM	BCl3 valve closed
9/28/2010	11:12:47 PM	PH3 valve closed
9/28/2010	11:12:47 PM	SiCl4 pre valve closed
9/28/2010	11:12:47 PM	SiCl4 post valve closed
9/28/2010	11:12:47 PM	Bubbler valve closed
9/28/2010	11:12:47 PM	Main Vac valve opened
9/28/2010	11:12:47 PM	Bypass valve opened
9/28/2010	11:12:47 PM	Helium MFC set to  0.000000
9/28/2010	11:12:47 PM	H2 MFC set to  0.000000
9/28/2010	11:12:47 PM	BCl3 MFC set to  0.000000
9/28/2010	11:12:47 PM	PHl3 MFC set to  0.000000
9/28/2010	11:12:47 PM	SiCl4 MFC set to  0.000000
9/28/2010	11:12:47 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	11:12:47 PM	Tube furnace set to 0
9/28/2010	11:13:47 PM	H2 valve closed
9/28/2010	11:13:47 PM	BCl3 valve closed
9/28/2010	11:13:47 PM	PH3 valve closed
9/28/2010	11:13:47 PM	SiCl4 pre valve closed
9/28/2010	11:13:47 PM	SiCl4 post valve closed
9/28/2010	11:13:47 PM	Bubbler valve closed
9/28/2010	11:13:47 PM	Helium valve opened
9/28/2010	11:13:47 PM	Main Vac valve opened
9/28/2010	11:13:47 PM	Bypass valve opened
9/28/2010	11:13:47 PM	Helium MFC set to  100.000000
9/28/2010	11:13:47 PM	H2 MFC set to  0.000000
9/28/2010	11:13:47 PM	BCl3 MFC set to  0.000000
9/28/2010	11:13:47 PM	PHl3 MFC set to  0.000000
9/28/2010	11:13:47 PM	SiCl4 MFC set to  0.000000
9/28/2010	11:13:47 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	11:13:47 PM	Tube furnace set to 0
9/28/2010	11:14:47 PM	Helium valve closed
9/28/2010	11:14:47 PM	H2 valve closed
9/28/2010	11:14:47 PM	BCl3 valve closed
9/28/2010	11:14:47 PM	PH3 valve closed
9/28/2010	11:14:47 PM	SiCl4 pre valve closed
9/28/2010	11:14:47 PM	SiCl4 post valve closed
9/28/2010	11:14:47 PM	Bubbler valve closed
9/28/2010	11:14:47 PM	Main Vac valve opened
9/28/2010	11:14:47 PM	Bypass valve opened
9/28/2010	11:14:47 PM	Helium MFC set to  0.000000
9/28/2010	11:14:47 PM	H2 MFC set to  0.000000
9/28/2010	11:14:47 PM	BCl3 MFC set to  0.000000
9/28/2010	11:14:47 PM	PHl3 MFC set to  0.000000
9/28/2010	11:14:47 PM	SiCl4 MFC set to  0.000000
9/28/2010	11:14:47 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	11:14:48 PM	Tube furnace set to 0
9/28/2010	11:15:48 PM	H2 valve closed
9/28/2010	11:15:48 PM	BCl3 valve closed
9/28/2010	11:15:48 PM	PH3 valve closed
9/28/2010	11:15:48 PM	SiCl4 pre valve closed
9/28/2010	11:15:48 PM	SiCl4 post valve closed
9/28/2010	11:15:48 PM	Bubbler valve closed
9/28/2010	11:15:48 PM	Helium valve opened
9/28/2010	11:15:48 PM	Main Vac valve opened
9/28/2010	11:15:48 PM	Bypass valve opened
9/28/2010	11:15:48 PM	Helium MFC set to  100.000000
9/28/2010	11:15:48 PM	H2 MFC set to  0.000000
9/28/2010	11:15:48 PM	BCl3 MFC set to  0.000000
9/28/2010	11:15:48 PM	PHl3 MFC set to  0.000000
9/28/2010	11:15:48 PM	SiCl4 MFC set to  0.000000
9/28/2010	11:15:48 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	11:15:48 PM	Tube furnace set to 0
9/28/2010	11:16:48 PM	Helium valve closed
9/28/2010	11:16:48 PM	H2 valve closed
9/28/2010	11:16:48 PM	BCl3 valve closed
9/28/2010	11:16:48 PM	PH3 valve closed
9/28/2010	11:16:48 PM	SiCl4 pre valve closed
9/28/2010	11:16:48 PM	SiCl4 post valve closed
9/28/2010	11:16:48 PM	Bubbler valve closed
9/28/2010	11:16:48 PM	Main Vac valve opened
9/28/2010	11:16:48 PM	Bypass valve opened
9/28/2010	11:16:48 PM	Helium MFC set to  0.000000
9/28/2010	11:16:48 PM	H2 MFC set to  0.000000
9/28/2010	11:16:48 PM	BCl3 MFC set to  0.000000
9/28/2010	11:16:48 PM	PHl3 MFC set to  0.000000
9/28/2010	11:16:48 PM	SiCl4 MFC set to  0.000000
9/28/2010	11:16:48 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	11:16:48 PM	Tube furnace set to 0
9/28/2010	11:17:48 PM	H2 valve closed
9/28/2010	11:17:48 PM	BCl3 valve closed
9/28/2010	11:17:48 PM	PH3 valve closed
9/28/2010	11:17:48 PM	SiCl4 pre valve closed
9/28/2010	11:17:48 PM	SiCl4 post valve closed
9/28/2010	11:17:48 PM	Bubbler valve closed
9/28/2010	11:17:48 PM	Helium valve opened
9/28/2010	11:17:48 PM	Main Vac valve opened
9/28/2010	11:17:48 PM	Bypass valve opened
9/28/2010	11:17:48 PM	Helium MFC set to  100.000000
9/28/2010	11:17:48 PM	H2 MFC set to  0.000000
9/28/2010	11:17:48 PM	BCl3 MFC set to  0.000000
9/28/2010	11:17:48 PM	PHl3 MFC set to  0.000000
9/28/2010	11:17:48 PM	SiCl4 MFC set to  0.000000
9/28/2010	11:17:48 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	11:17:48 PM	Tube furnace set to 0
9/28/2010	11:18:48 PM	Helium valve closed
9/28/2010	11:18:48 PM	H2 valve closed
9/28/2010	11:18:48 PM	BCl3 valve closed
9/28/2010	11:18:48 PM	PH3 valve closed
9/28/2010	11:18:48 PM	SiCl4 pre valve closed
9/28/2010	11:18:48 PM	SiCl4 post valve closed
9/28/2010	11:18:48 PM	Bubbler valve closed
9/28/2010	11:18:48 PM	Main Vac valve opened
9/28/2010	11:18:48 PM	Bypass valve opened
9/28/2010	11:18:48 PM	Helium MFC set to  0.000000
9/28/2010	11:18:48 PM	H2 MFC set to  0.000000
9/28/2010	11:18:48 PM	BCl3 MFC set to  0.000000
9/28/2010	11:18:48 PM	PHl3 MFC set to  0.000000
9/28/2010	11:18:48 PM	SiCl4 MFC set to  0.000000
9/28/2010	11:18:48 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	11:18:48 PM	Tube furnace set to 0
9/28/2010	11:19:48 PM	H2 valve closed
9/28/2010	11:19:48 PM	BCl3 valve closed
9/28/2010	11:19:48 PM	PH3 valve closed
9/28/2010	11:19:48 PM	SiCl4 pre valve closed
9/28/2010	11:19:48 PM	SiCl4 post valve closed
9/28/2010	11:19:48 PM	Bubbler valve closed
9/28/2010	11:19:48 PM	Helium valve opened
9/28/2010	11:19:48 PM	Main Vac valve opened
9/28/2010	11:19:48 PM	Bypass valve opened
9/28/2010	11:19:48 PM	Helium MFC set to  100.000000
9/28/2010	11:19:48 PM	H2 MFC set to  0.000000
9/28/2010	11:19:48 PM	BCl3 MFC set to  0.000000
9/28/2010	11:19:48 PM	PHl3 MFC set to  0.000000
9/28/2010	11:19:48 PM	SiCl4 MFC set to  0.000000
9/28/2010	11:19:48 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	11:19:49 PM	Tube furnace set to 0
9/28/2010	11:20:49 PM	Helium valve closed
9/28/2010	11:20:49 PM	H2 valve closed
9/28/2010	11:20:49 PM	BCl3 valve closed
9/28/2010	11:20:49 PM	PH3 valve closed
9/28/2010	11:20:49 PM	SiCl4 pre valve closed
9/28/2010	11:20:49 PM	SiCl4 post valve closed
9/28/2010	11:20:49 PM	Bubbler valve closed
9/28/2010	11:20:49 PM	Main Vac valve opened
9/28/2010	11:20:49 PM	Bypass valve opened
9/28/2010	11:20:49 PM	Helium MFC set to  0.000000
9/28/2010	11:20:49 PM	H2 MFC set to  0.000000
9/28/2010	11:20:49 PM	BCl3 MFC set to  0.000000
9/28/2010	11:20:49 PM	PHl3 MFC set to  0.000000
9/28/2010	11:20:49 PM	SiCl4 MFC set to  0.000000
9/28/2010	11:20:49 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	11:20:49 PM	Tube furnace set to 0
9/28/2010	11:21:49 PM	H2 valve closed
9/28/2010	11:21:49 PM	BCl3 valve closed
9/28/2010	11:21:49 PM	PH3 valve closed
9/28/2010	11:21:49 PM	SiCl4 pre valve closed
9/28/2010	11:21:49 PM	SiCl4 post valve closed
9/28/2010	11:21:49 PM	Bubbler valve closed
9/28/2010	11:21:49 PM	Helium valve opened
9/28/2010	11:21:49 PM	Main Vac valve opened
9/28/2010	11:21:49 PM	Bypass valve opened
9/28/2010	11:21:49 PM	Helium MFC set to  100.000000
9/28/2010	11:21:49 PM	H2 MFC set to  0.000000
9/28/2010	11:21:49 PM	BCl3 MFC set to  0.000000
9/28/2010	11:21:49 PM	PHl3 MFC set to  0.000000
9/28/2010	11:21:49 PM	SiCl4 MFC set to  0.000000
9/28/2010	11:21:49 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	11:21:49 PM	Tube furnace set to 0
9/28/2010	11:22:49 PM	Helium valve closed
9/28/2010	11:22:49 PM	H2 valve closed
9/28/2010	11:22:49 PM	BCl3 valve closed
9/28/2010	11:22:49 PM	PH3 valve closed
9/28/2010	11:22:49 PM	SiCl4 pre valve closed
9/28/2010	11:22:49 PM	SiCl4 post valve closed
9/28/2010	11:22:49 PM	Bubbler valve closed
9/28/2010	11:22:49 PM	Main Vac valve opened
9/28/2010	11:22:49 PM	Bypass valve opened
9/28/2010	11:22:49 PM	Helium MFC set to  0.000000
9/28/2010	11:22:49 PM	H2 MFC set to  0.000000
9/28/2010	11:22:49 PM	BCl3 MFC set to  0.000000
9/28/2010	11:22:49 PM	PHl3 MFC set to  0.000000
9/28/2010	11:22:49 PM	SiCl4 MFC set to  0.000000
9/28/2010	11:22:49 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	11:22:49 PM	Tube furnace set to 0
9/28/2010	11:23:49 PM	H2 valve closed
9/28/2010	11:23:49 PM	BCl3 valve closed
9/28/2010	11:23:49 PM	PH3 valve closed
9/28/2010	11:23:49 PM	SiCl4 pre valve closed
9/28/2010	11:23:49 PM	SiCl4 post valve closed
9/28/2010	11:23:49 PM	Bubbler valve closed
9/28/2010	11:23:49 PM	Helium valve opened
9/28/2010	11:23:49 PM	Main Vac valve opened
9/28/2010	11:23:49 PM	Bypass valve opened
9/28/2010	11:23:49 PM	Helium MFC set to  100.000000
9/28/2010	11:23:49 PM	H2 MFC set to  0.000000
9/28/2010	11:23:49 PM	BCl3 MFC set to  0.000000
9/28/2010	11:23:49 PM	PHl3 MFC set to  0.000000
9/28/2010	11:23:49 PM	SiCl4 MFC set to  0.000000
9/28/2010	11:23:49 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	11:23:49 PM	Tube furnace set to 0
9/28/2010	11:24:49 PM	Helium valve closed
9/28/2010	11:24:49 PM	H2 valve closed
9/28/2010	11:24:49 PM	BCl3 valve closed
9/28/2010	11:24:49 PM	PH3 valve closed
9/28/2010	11:24:49 PM	SiCl4 pre valve closed
9/28/2010	11:24:49 PM	SiCl4 post valve closed
9/28/2010	11:24:49 PM	Bubbler valve closed
9/28/2010	11:24:49 PM	Main Vac valve opened
9/28/2010	11:24:49 PM	Bypass valve opened
9/28/2010	11:24:49 PM	Helium MFC set to  0.000000
9/28/2010	11:24:49 PM	H2 MFC set to  0.000000
9/28/2010	11:24:49 PM	BCl3 MFC set to  0.000000
9/28/2010	11:24:49 PM	PHl3 MFC set to  0.000000
9/28/2010	11:24:49 PM	SiCl4 MFC set to  0.000000
9/28/2010	11:24:49 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	11:24:50 PM	Tube furnace set to 0
9/28/2010	11:25:50 PM	H2 valve closed
9/28/2010	11:25:50 PM	BCl3 valve closed
9/28/2010	11:25:50 PM	PH3 valve closed
9/28/2010	11:25:50 PM	SiCl4 pre valve closed
9/28/2010	11:25:50 PM	SiCl4 post valve closed
9/28/2010	11:25:50 PM	Bubbler valve closed
9/28/2010	11:25:50 PM	Helium valve opened
9/28/2010	11:25:50 PM	Main Vac valve opened
9/28/2010	11:25:50 PM	Bypass valve opened
9/28/2010	11:25:50 PM	Helium MFC set to  100.000000
9/28/2010	11:25:50 PM	H2 MFC set to  0.000000
9/28/2010	11:25:50 PM	BCl3 MFC set to  0.000000
9/28/2010	11:25:50 PM	PHl3 MFC set to  0.000000
9/28/2010	11:25:50 PM	SiCl4 MFC set to  0.000000
9/28/2010	11:25:50 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	11:25:50 PM	Tube furnace set to 0
9/28/2010	11:26:50 PM	Helium valve closed
9/28/2010	11:26:50 PM	H2 valve closed
9/28/2010	11:26:50 PM	BCl3 valve closed
9/28/2010	11:26:50 PM	PH3 valve closed
9/28/2010	11:26:50 PM	SiCl4 pre valve closed
9/28/2010	11:26:50 PM	SiCl4 post valve closed
9/28/2010	11:26:50 PM	Bubbler valve closed
9/28/2010	11:26:50 PM	Main Vac valve opened
9/28/2010	11:26:50 PM	Bypass valve opened
9/28/2010	11:26:50 PM	Helium MFC set to  0.000000
9/28/2010	11:26:50 PM	H2 MFC set to  0.000000
9/28/2010	11:26:50 PM	BCl3 MFC set to  0.000000
9/28/2010	11:26:50 PM	PHl3 MFC set to  0.000000
9/28/2010	11:26:50 PM	SiCl4 MFC set to  0.000000
9/28/2010	11:26:50 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	11:26:50 PM	Tube furnace set to 0
9/28/2010	11:27:50 PM	H2 valve closed
9/28/2010	11:27:50 PM	BCl3 valve closed
9/28/2010	11:27:50 PM	PH3 valve closed
9/28/2010	11:27:50 PM	SiCl4 pre valve closed
9/28/2010	11:27:50 PM	SiCl4 post valve closed
9/28/2010	11:27:50 PM	Bubbler valve closed
9/28/2010	11:27:50 PM	Helium valve opened
9/28/2010	11:27:50 PM	Main Vac valve opened
9/28/2010	11:27:50 PM	Bypass valve opened
9/28/2010	11:27:50 PM	Helium MFC set to  100.000000
9/28/2010	11:27:50 PM	H2 MFC set to  0.000000
9/28/2010	11:27:50 PM	BCl3 MFC set to  0.000000
9/28/2010	11:27:50 PM	PHl3 MFC set to  0.000000
9/28/2010	11:27:50 PM	SiCl4 MFC set to  0.000000
9/28/2010	11:27:50 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	11:27:50 PM	Tube furnace set to 0
9/28/2010	11:28:50 PM	Helium valve closed
9/28/2010	11:28:50 PM	H2 valve closed
9/28/2010	11:28:50 PM	BCl3 valve closed
9/28/2010	11:28:50 PM	PH3 valve closed
9/28/2010	11:28:50 PM	SiCl4 pre valve closed
9/28/2010	11:28:50 PM	SiCl4 post valve closed
9/28/2010	11:28:50 PM	Bubbler valve closed
9/28/2010	11:28:50 PM	Main Vac valve opened
9/28/2010	11:28:50 PM	Bypass valve opened
9/28/2010	11:28:50 PM	Helium MFC set to  0.000000
9/28/2010	11:28:50 PM	H2 MFC set to  0.000000
9/28/2010	11:28:50 PM	BCl3 MFC set to  0.000000
9/28/2010	11:28:50 PM	PHl3 MFC set to  0.000000
9/28/2010	11:28:50 PM	SiCl4 MFC set to  0.000000
9/28/2010	11:28:50 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	11:28:50 PM	Tube furnace set to 0
9/28/2010	11:29:50 PM	H2 valve closed
9/28/2010	11:29:50 PM	BCl3 valve closed
9/28/2010	11:29:50 PM	PH3 valve closed
9/28/2010	11:29:50 PM	SiCl4 pre valve closed
9/28/2010	11:29:50 PM	SiCl4 post valve closed
9/28/2010	11:29:50 PM	Bubbler valve closed
9/28/2010	11:29:50 PM	Helium valve opened
9/28/2010	11:29:50 PM	Main Vac valve opened
9/28/2010	11:29:50 PM	Bypass valve opened
9/28/2010	11:29:50 PM	Helium MFC set to  100.000000
9/28/2010	11:29:50 PM	H2 MFC set to  0.000000
9/28/2010	11:29:50 PM	BCl3 MFC set to  0.000000
9/28/2010	11:29:50 PM	PHl3 MFC set to  0.000000
9/28/2010	11:29:50 PM	SiCl4 MFC set to  0.000000
9/28/2010	11:29:50 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	11:29:51 PM	Tube furnace set to 0
9/28/2010	11:30:51 PM	Helium valve closed
9/28/2010	11:30:51 PM	H2 valve closed
9/28/2010	11:30:51 PM	BCl3 valve closed
9/28/2010	11:30:51 PM	PH3 valve closed
9/28/2010	11:30:51 PM	SiCl4 pre valve closed
9/28/2010	11:30:51 PM	SiCl4 post valve closed
9/28/2010	11:30:51 PM	Bubbler valve closed
9/28/2010	11:30:51 PM	Main Vac valve opened
9/28/2010	11:30:51 PM	Bypass valve opened
9/28/2010	11:30:51 PM	Helium MFC set to  0.000000
9/28/2010	11:30:51 PM	H2 MFC set to  0.000000
9/28/2010	11:30:51 PM	BCl3 MFC set to  0.000000
9/28/2010	11:30:51 PM	PHl3 MFC set to  0.000000
9/28/2010	11:30:51 PM	SiCl4 MFC set to  0.000000
9/28/2010	11:30:51 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	11:30:51 PM	Tube furnace set to 0
9/28/2010	11:31:51 PM	H2 valve closed
9/28/2010	11:31:51 PM	BCl3 valve closed
9/28/2010	11:31:51 PM	PH3 valve closed
9/28/2010	11:31:51 PM	SiCl4 pre valve closed
9/28/2010	11:31:51 PM	SiCl4 post valve closed
9/28/2010	11:31:51 PM	Bubbler valve closed
9/28/2010	11:31:51 PM	Helium valve opened
9/28/2010	11:31:51 PM	Main Vac valve opened
9/28/2010	11:31:51 PM	Bypass valve opened
9/28/2010	11:31:51 PM	Helium MFC set to  100.000000
9/28/2010	11:31:51 PM	H2 MFC set to  0.000000
9/28/2010	11:31:51 PM	BCl3 MFC set to  0.000000
9/28/2010	11:31:51 PM	PHl3 MFC set to  0.000000
9/28/2010	11:31:51 PM	SiCl4 MFC set to  0.000000
9/28/2010	11:31:51 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	11:31:51 PM	Tube furnace set to 0
9/28/2010	11:32:51 PM	Helium valve closed
9/28/2010	11:32:51 PM	H2 valve closed
9/28/2010	11:32:51 PM	BCl3 valve closed
9/28/2010	11:32:51 PM	PH3 valve closed
9/28/2010	11:32:51 PM	SiCl4 pre valve closed
9/28/2010	11:32:51 PM	SiCl4 post valve closed
9/28/2010	11:32:51 PM	Bubbler valve closed
9/28/2010	11:32:51 PM	Main Vac valve opened
9/28/2010	11:32:51 PM	Bypass valve opened
9/28/2010	11:32:51 PM	Helium MFC set to  0.000000
9/28/2010	11:32:51 PM	H2 MFC set to  0.000000
9/28/2010	11:32:51 PM	BCl3 MFC set to  0.000000
9/28/2010	11:32:51 PM	PHl3 MFC set to  0.000000
9/28/2010	11:32:51 PM	SiCl4 MFC set to  0.000000
9/28/2010	11:32:51 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	11:32:51 PM	Tube furnace set to 0
9/28/2010	11:32:52 PM	Run finished at 11:32 PM
9/28/2010	11:32:52 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
9/28/2010	11:34:31 PM	Recipe started at 11:34 PM
9/28/2010	11:34:31 PM	Helium valve closed
9/28/2010	11:34:31 PM	BCl3 valve closed
9/28/2010	11:34:31 PM	PH3 valve closed
9/28/2010	11:34:31 PM	SiCl4 pre valve closed
9/28/2010	11:34:31 PM	SiCl4 post valve closed
9/28/2010	11:34:31 PM	Main Vac valve closed
9/28/2010	11:34:31 PM	Bypass valve closed
9/28/2010	11:34:31 PM	Bubbler valve closed
9/28/2010	11:34:31 PM	H2 valve opened
9/28/2010	11:34:31 PM	Helium MFC set to  0.000000
9/28/2010	11:34:31 PM	H2 MFC set to  500.000000
9/28/2010	11:34:31 PM	BCl3 MFC set to  0.000000
9/28/2010	11:34:31 PM	PHl3 MFC set to  0.000000
9/28/2010	11:34:31 PM	SiCl4 MFC set to  0.000000
9/28/2010	11:34:31 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	11:34:31 PM	Tube furnace set to 0
9/28/2010	11:35:51 PM	Helium valve closed
9/28/2010	11:35:51 PM	BCl3 valve closed
9/28/2010	11:35:51 PM	PH3 valve closed
9/28/2010	11:35:51 PM	SiCl4 pre valve closed
9/28/2010	11:35:51 PM	SiCl4 post valve closed
9/28/2010	11:35:51 PM	Main Vac valve closed
9/28/2010	11:35:51 PM	Bypass valve closed
9/28/2010	11:35:51 PM	H2 valve opened
9/28/2010	11:35:51 PM	Bubbler valve opened
9/28/2010	11:35:51 PM	Helium MFC set to  0.000000
9/28/2010	11:35:51 PM	H2 MFC set to  500.000000
9/28/2010	11:35:51 PM	BCl3 MFC set to  0.000000
9/28/2010	11:35:51 PM	PHl3 MFC set to  0.000000
9/28/2010	11:35:51 PM	SiCl4 MFC set to  0.000000
9/28/2010	11:35:51 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	11:35:52 PM	Tube furnace set to 1000
9/28/2010	11:45:52 PM	Helium valve closed
9/28/2010	11:45:52 PM	BCl3 valve closed
9/28/2010	11:45:52 PM	PH3 valve closed
9/28/2010	11:45:52 PM	Main Vac valve closed
9/28/2010	11:45:52 PM	Bypass valve closed
9/28/2010	11:45:52 PM	H2 valve opened
9/28/2010	11:45:52 PM	SiCl4 pre valve opened
9/28/2010	11:45:52 PM	SiCl4 post valve opened
9/28/2010	11:45:52 PM	Bubbler valve opened
9/28/2010	11:45:52 PM	Helium MFC set to  0.000000
9/28/2010	11:45:52 PM	H2 MFC set to  500.000000
9/28/2010	11:45:52 PM	BCl3 MFC set to  0.000000
9/28/2010	11:45:52 PM	PHl3 MFC set to  0.000000
9/28/2010	11:45:52 PM	SiCl4 MFC set to  50.000000
9/28/2010	11:45:52 PM	Bypass solenoid MFC set to  0.000000
9/28/2010	11:45:52 PM	Tube furnace set to 1000
